专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US11513344B2 Sensor and measurement apparatus for wavefront of light from optical element, and method of manufacturing optical element and optical system 有权
公开(公告)号：US11513344B2
公开(公告)日：2022-11-29
申请号：US16416894
申请日：2019-05-20
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01J9/00 , G02B26/12 , G02B13/16 , G02B5/18 , G02B3/00 , G01M11/02
摘要： A wavefront sensor includes a splitting element configured to split an incident light beam into a plurality of light beams, an image sensor configured to receive the plurality of light beams, and a processing unit configured to calculate a wavefront of the incident light beam based on an intensity distribution of the plurality of light beams received by the image sensor. The splitting element is either in direct contact with the image sensor or in contact with the image sensor via a plate glass. In the calculation of the wavefront, the processing unit corrects a relative positional deviation between the splitting element and the image sensor by calculating a rotation about a rotation axis.

2. 发明申请

US20160153901A1 METHOD FOR MEASURING REFRACTIVE INDEX, REFRACTIVE INDEX MEASURING DEVICE, AND METHOD FOR PRODUCING OPTICAL ELEMENT 审中-公开
标题翻译：用于测量折射率指标，折射率测量装置的方法和用于生产光学元件的方法
公开(公告)号：US20160153901A1
公开(公告)日：2016-06-02
申请号：US14900595
申请日：2014-06-18
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/45 , G01M11/02
CPC分类号： G01N21/45 , G01M11/0228 , G01N2201/13
摘要： The refractive index of a test object is measured with high precision.The present invention relates to a method for measuring a refractive index of a test object by splitting light from a light source into test light and reference light and measuring interference light resulting from interference between the reference light and the test light transmitted through the test object. In the method, the test object is arranged in a medium whose group refractive index is equal to a group refractive index of the test object at a particular wavelength, interference light is measured, the particular wavelength is determined based on a wavelength dependence of a phase difference between the test light and the reference light, and the group refractive index of the medium corresponding to the particular wavelength is calculated as the group refractive index of the test object corresponding to the particular wavelength.
摘要翻译：以高精度测量被测物的折射率。本发明涉及一种通过将来自光源的光分解为测试光和参考光并测量由参考光与通过测试对象透射的测试光之间的干扰而产生的干涉光来测量被测物体的折射率的方法。在该方法中，测试对象被布置在其特定波长的组折射率等于测试对象的组折射率的介质中，测量干涉光，特定波长基于相位的波长依赖性来确定将测试光与参考光之间的差异以及对应于特定波长的介质的组折射率计算为对应于特定波长的测试对象的组折射率。

3. 发明授权

US09255879B2 Method of measuring refractive index distribution, method of manufacturing optical element, and measurement apparatus of refractive index distribution 有权
$Method of measuring refractive index distribution, method of manufacturing optical element, and measurement apparatus of refractive index distribution$
标题翻译：测量折射率分布的方法，光学元件的制造方法和折射率分布的测量装置
公开(公告)号：US09255879B2
公开(公告)日：2016-02-09
申请号：US13923580
申请日：2013-06-21
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/21 , G01N21/41 , G01N21/45 , B29D11/00 , G01M11/02
CPC分类号： G01N21/41 , B29D11/00951 , G01M11/0242 , G01N21/45
摘要： A method of measuring a refractive index distribution includes steps of setting a plurality of different arrangements by a translation movement in a state where an object is arranged in first and second media having refractive indices different from a refractive index of the object, measuring transmissive wavefront of the object for each of media and each of the plurality of arrangements by reference light entering the object (S400), obtaining wavefront aberration corresponding to a difference between each transmissive wavefront and a reference transmissive wavefront (S500), obtaining refractive index distribution of the object by removing an influence of a shape error of the object using wavefront aberration of two media in which the object is arranged at the same position (S70), and obtaining refractive index distribution information of the object based on a plurality of refractive index distributions corresponding to the plurality of arrangements (S80).
摘要翻译：测量折射率分布的方法包括以下步骤：在物体被布置在具有不同于物体的折射率的折射率的第一和第二介质中的状态下通过平移运动来设置多个不同的布置，测量透射波前通过参考光进入物体（S400），获得与每个透射波阵面和基准透射波阵面之间的差值相对应的波前像差（S500）的每个介质的对象和多个布置中的每一个，获得对象的折射率分布通过使用其中对象被布置在相同位置的两个介质的波面像差去除对象的形状误差的影响（S70），并且基于对应于多个折射率分布的多个折射率分布来获得对象的折射率分布信息多个布置（S80）。

4. 发明申请

US20160363531A1 REFRACTIVE INDEX MEASUREMENT METHOD, MEASUREMENT APPARATUS, AND OPTICAL ELEMENT MANUFACTURING METHOD 审中-公开
标题翻译：折射指数测量方法，测量装置和光学元件制造方法
公开(公告)号：US20160363531A1
公开(公告)日：2016-12-15
申请号：US15174434
申请日：2016-06-06
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/45 , G01B11/06 , G01B9/02
CPC分类号： G01N21/45 , G01B9/02024 , G01B11/06 , G01M11/0271 , G01N2201/066 , G01N2201/068 , G01N2201/12
摘要： A phase refractive index of a test object is measured with high accuracy. A phase difference between a reference light beam and a test light beam is measured by dividing light from a light source into the reference light beam and the test light beam, and causing interference between the test light beam transmitted through the test object and the reference light beam. A phase refractive index of the test object is calculated by calculating a value corresponding to an integral multiple of 2π included in the phase difference, based on a slope of a phase refractive index of a reference object with respect to wavelength.
摘要翻译：以高精度测量被测物体的相位折射率。通过将来自光源的光分成参考光束和测试光束来测量参考光束和测试光束之间的相位差，并且使透过测试对象的测试光束与参考光之间的干涉光束。基于相对于波长的参考对象的相位折射率的斜率，通过计算对应于包括在相位差中的2π的整数倍的值来计算被测物体的相位折射率。

5. 发明申请

US20160161403A1 REFRACTIVE INDEX DISTRIBUTION MEASURING METHOD, REFRACTIVE INDEX DISTRIBUTION MEASURING APPARATUS, AND OPTICAL ELEMENT MANUFACTURING METHOD 有权
标题翻译：折射率分布测量方法，折射率分布测量装置和光学元件制造方法
公开(公告)号：US20160161403A1
公开(公告)日：2016-06-09
申请号：US14959878
申请日：2015-12-04
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/45 , G01M11/02
CPC分类号： G01N21/45 , G01M11/0214 , G01M11/0228 , G01N21/958
摘要： A test unit is formed by sandwiching a test lens by a first reference lens whose shape and refractive index are known, a second reference lens whose shape and refractive index are known, and a medium. A wavefront of light transmitted through the test unit is measured, and, by using the shape and the refractive index of the first reference lens, the shape and refractive index of the second reference lens, and the measured wavefront of the test unit, the refractive index distribution of the test lens is calculated.
摘要翻译：通过用已知的形状和折射率的第一参考透镜，其形状和折射率已知的第二参考透镜和介质夹住测试透镜来形成测试单元。测量穿过测试单元的光的波前，并且通过使用第一参考透镜的形状和折射率，第二参考透镜的形状和折射率以及测试单元的测量波面，折射率计算测试透镜的折射率分布。

6. 发明申请

US20170315053A1 REFRACTIVE INDEX MEASUREMENT METHOD, REFRACTIVE INDEX MEASUREMENT APPARATUS, AND OPTICAL ELEMENT MANUFACTURING METHOD 审中-公开
公开(公告)号：US20170315053A1
公开(公告)日：2017-11-02
申请号：US15484813
申请日：2017-04-11
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/45 , G01B9/02
CPC分类号： G01N21/45 , G01B9/0201 , G01M11/02 , G01M11/0285 , G01N21/31 , G01N2021/414 , G01N2021/458
摘要： A refractive index measurement method uses an interference optical system which divides light from a light source having a plurality of discrete wavelengths into test light and reference light, causes the test light transmitted through the target to interfere with the reference light, and detect the interference light. The refractive index measurement method determines a first optical delay amount of the interference optical system so that a first and a second wavelength become adjacent to a wavelength corresponding to an extremal value of a phase of the interference light, measures phases of interference light at the first and second wavelengths at the first optical delay amount, and calculates a phase difference between a plurality of the discrete wavelengths at a predetermined optical delay amount using the first optical delay amount, the phases of the interference light at the first and second wavelengths to calculate the refractive index of the target.

7. 发明授权

US09709490B2 Refractive index distribution measuring method, refractive index distribution measuring apparatus, and optical element manufacturing method 有权
$Refractive index distribution measuring method, refractive index distribution measuring apparatus, and optical element manufacturing method$
公开(公告)号：US09709490B2
公开(公告)日：2017-07-18
申请号：US14959878
申请日：2015-12-04
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/41 , G01N21/45 , G01M11/02 , G01N21/958
CPC分类号： G01N21/45 , G01M11/0214 , G01M11/0228 , G01N21/958
摘要： A test unit is formed by sandwiching a test lens by a first reference lens whose shape and refractive index are known, a second reference lens whose shape and refractive index are known, and a medium. A wavefront of light transmitted through the test unit is measured, and, by using the shape and the refractive index of the first reference lens, the shape and refractive index of the second reference lens, and the measured wavefront of the test unit, the refractive index distribution of the test lens is calculated.

8. 发明授权

US09625350B2 Refractive index distribution measuring method, refractive index distribution measuring apparatus, and method for manufacturing optical element 有权
$Refractive index distribution measuring method, refractive index distribution measuring apparatus, and method for manufacturing optical element$
公开(公告)号：US09625350B2
公开(公告)日：2017-04-18
申请号：US14574155
申请日：2014-12-17
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/41 , G01M11/02
CPC分类号： G01M11/0271 , G01M11/0285
摘要： A refractive index distribution measuring method includes dividing light emitted from a light source into reference light and test light, causing the reference light to interfere with the test light, which test light has passed through a test object, measuring a phase difference between the reference light and the test light for each of first and second wavelengths, and measuring a wavefront aberration of the test light for each of the first and second wavelengths. The refractive index distribution measuring method further includes calculating a phase-difference difference amount, which is a difference between the phase differences for the first wavelength and the second wavelength, calculating a wavefront aberration difference amount, which is a difference between the wavefront aberrations for the first wavelength and the second wavelength, and calculating a refractive index distribution of the test object based on the phase-difference difference amount and the wavefront aberration difference amount.

9. 发明申请

US20160356707A1 MEASUREMENT METHOD, MEASUREMENT APPARATUS, AND MANUFACTURING METHOD FOR OPTICAL ELEMENT 审中-公开
标题翻译：测量方法，测量装置和光学元件的制造方法
公开(公告)号：US20160356707A1
公开(公告)日：2016-12-08
申请号：US15163065
申请日：2016-05-24
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01N21/41
CPC分类号： G01N21/4133 , G01M11/0285 , G01N21/45
摘要： A test object is placed inside a medium, and wavefronts of light transmitted through the test object are measured at a plurality of wavelengths. From the transmitted wavefronts of the test object measured at the plurality of wavelengths and transmitted wavefronts at a plurality of wavelengths when a reference object having a specific group refractive index distribution is placed in the medium, a changing rate of a wavefront aberration with respect to wavelength corresponding to a difference between the transmitted wavefront of the test object and the transmitted wavefront of the reference object is calculated. A refractive index distribution of the test object is calculated on the basis of the changing rate of the wavefront aberration with respect to wavelength.
摘要翻译：将测试对象放置在介质内，并且以多个波长测量透过测试对象的光的波前。当具有特定组折射率分布的参考对象被放置在介质中时，从在多个波长处测量的测试对象的发射波前和多个波长的发射波前，相对于波长的波前像差的变化率对应于测试对象的发送波前与参考对象的发射波阵面之间的差。基于相对于波长的波前像差的变化率来计算测试对象的折射率分布。

10. 发明申请

US20150177095A1 REFRACTIVE INDEX DISTRIBUTION MEASURING METHOD, REFRACTIVE INDEX DISTRIBUTION MEASURING APPARATUS, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT 有权
标题翻译：折射指数分布测量方法，折射率分布测量装置和制造光学元件的方法
公开(公告)号：US20150177095A1
公开(公告)日：2015-06-25
申请号：US14574155
申请日：2014-12-17
申请人： CANON KABUSHIKI KAISHA
发明人： Tomohiro Sugimoto
IPC分类号： G01M11/02
CPC分类号： G01M11/0271 , G01M11/0285
摘要： A refractive index distribution measuring method includes dividing light emitted from a light source into reference light and test light, causing the reference light to interfere with the test light, which test light has passed through a test object, measuring a phase difference between the reference light and the test light for each of first and second wavelengths, and measuring a wavefront aberration of the test light for each of the first and second wavelengths. The refractive index distribution measuring method further includes calculating a phase-difference difference amount, which is a difference between the phase differences for the first wavelength and the second wavelength, calculating a wavefront aberration difference amount, which is a difference between the wavefront aberrations for the first wavelength and the second wavelength, and calculating a refractive index distribution of the test object based on the phase-difference difference amount and the wavefront aberration difference amount.
摘要翻译：折射率分布测量方法包括将从光源发射的光分成参考光和测试光，使参考光与测试光通过测试对象的测试光干涉，测量参考光之间的相位差以及用于第一和第二波长中的每一个的测试光，以及测量第一和第二波长中的每一个的测试光的波前像差。折射率分布测量方法还包括计算作为第一波长和第二波长的相位差之间的差的相位差差量，计算波前像差差量，该波前像差差量是波前像差差值第一波长和第二波长，并且基于相位差差量和波前像差差量计算被测物体的折射率分布。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式