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    • 7. 发明申请
    • CHEMICAL VAPOR DEPOSITION OF CuInxGa1-x(SeyS1-y)2 THIN FILMS AND USES THEREOF
    • CuInxGa1-x(SeyS1-y)2薄膜的化学气相沉积及其用途
    • US20100236630A1
    • 2010-09-23
    • US12602203
    • 2008-05-30
    • W.K. KIMTim Anderson
    • W.K. KIMTim Anderson
    • H01L31/0272B32B9/04B32B27/06B32B17/06B32B15/04H01L21/36
    • C23C16/305Y10T428/31678
    • The subject application relates to a chemical vapor (CV) deposition technique to form CuInxGa1-x(SeyS1-y)2, compounds. As a copper source, solid copper can be used with a HCl transport gas and Cu3Cl3 is expected to be a major Cu-containing vapor species in this system, Liquid indium and HCl transport gas are appropriate for the indium source to provide InCl vapor species. Since selenium and sulphur are relatively highly volatile, their vapor can be carried by an inert gas without an additional transport gas, although H2Se and H2S can be used. Each source temperature can be controlled separately so as to provide a sufficient and stable vapor flux. Also provided by the subject application are CV-deposited substrates and devices, such as electronic devices or solar cells, that contain CV-deposited CuInxGa1-x(SeyS1-y)2 substrates.
    • 本申请涉及形成CuInxGa1-x(SeyS1-y)2化合物的化学蒸气(CV)沉积技术。 作为铜源,固体铜可以与HCl输送气体一起使用,并且预期Cu 3 Cl 3在该系统中是主要的含Cu蒸气物质,液体铟和HCl输送气体适合于铟源以提供InCl蒸气物质。 由于硒和硫的挥发性相对较高,所以尽管可以使用H2Se和H2S,但它们的蒸气可以通过惰性气体进行运输,而不需要额外的运输气体。 可以分别控制每个源温度,以便提供足够和稳定的蒸气通量。 由本申请提供的还包括CV沉积的基板和诸如电子器件或太阳能电池的装置,其包含CV沉积的CuInxGa1-x(SeyS1-y)2基板。
    • 10. 发明授权
    • Method and apparatus for producing group-III nitrides
    • 用于生产III族氮化物的方法和装置
    • US06733591B2
    • 2004-05-11
    • US09735217
    • 2000-12-12
    • Tim Anderson
    • Tim Anderson
    • C23C1600
    • C30B25/02C30B29/403C30B29/406C30B29/60H01L21/0242H01L21/02458H01L21/0254H01L21/0262H01L21/02658H01L33/007H01S5/0218H01S5/32341
    • The subject invention pertains to a method and device for producing large area single crystalline III-V nitride compound semiconductor substrates with a composition AlxInyGa1-x-y N (where 0≦x≦1, 0≦y≦1, and 0≦x+y≦1). In a specific embodiment, GaN substrates, with low dislocation densities (˜107 cm2) can be produced. These crystalline III-V substrates can be used to fabricate lasers and transistors. Large area free standing single crystals of III-V compounds, for example GaN, can be produced in accordance with the subject invention. By utilizing the rapid growth rates afforded by hydride vapor phase epitaxy (HVPE) and growing on lattice matching orthorhombic structure oxide substrates, good quality III-V crystals can be grown. Examples of oxide substrates include LiGaO2, LiAlO2, MgAlScO4, Al2MgO4, and LiNdO2. The subject invention relates to a method and apparatus, for the deposition of III-V compounds, which can alternate between MOVPE and HVPE, combining the advantages of both. In particular, the subject hybrid reactor can go back and forth between MOVPE and HVPE in situ so that the substrate does not have to be transported between reactor apparatus and, therefore, cooled between the performance of different growth techniques.
    • 本发明涉及一种用于制备具有组成Al x In y Ga 1-xy N(其中0≤x≤1,0<= y <= 1,和0≤x≤1)的大面积单晶III-V族氮化物化合物半导体衬底的方法和装置, = x + y <= 1)。 在具体实施方案中,可以生产具有低位错密度(〜10 7 cm 2)的GaN衬底。 这些晶体III-V衬底可用于制造激光器和晶体管。 根据本发明可以制备III-V族化合物的大面积自立单晶,例如GaN。 通过利用由氢化物气相外延(HVPE)提供的快速生长速率并在晶格匹配正交结构氧化物衬底上生长,可以生长出优质的III-V晶体。 氧化物基板的实例包括LiGaO 2,LiAlO 2,MgAlScO 4,Al 2 MgO 4和LiNdO 2。 本发明涉及用于沉积III-V化合物的方法和装置,其可以在MOVPE和HVPE之间交替,结合两者的优点。 特别地,目标混合反应器可以在MOVPE和HVPE之间来回地进行原位处理,使得基板不必在反应器装置之间传输,因此在不同生长技术的性能之间进行冷却。