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1. 发明授权

US07492020B2 Micro structure with interlock configuration 失效
标题翻译：微结构具有互锁配置
公开(公告)号：US07492020B2
公开(公告)日：2009-02-17
申请号：US11247193
申请日：2005-10-12
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： H01L29/04 , H01L31/036 , H01L29/82 , H01L23/48 , H01L29/40
CPC分类号： B81B3/0054 , B81B3/001 , B81B2203/0118 , B81B2203/0307 , H01L21/76804 , H01L21/76877
摘要： A micro structure has: a semiconductor substrate; an insulating film having a via hole and formed on the semiconductor substrate; an interlock structure formed on a side wall of the via hole and having a retracted portion and a protruded portion above the retracted portion; a conductive member having at one end a connection portion formed burying the via hole and an extension portion continuous with the connection portion and extending along a direction parallel to a surface of the semiconductor substrate.
摘要翻译：微结构具有：半导体衬底; 具有通孔并形成在所述半导体基板上的绝缘膜; 形成在所述通孔的侧壁上并具有在所述缩回部分上方的缩回部分和突出部分的互锁结构; 一个导电构件，其一端形成埋设通孔的连接部分和与该连接部分连续的延伸部分，并沿着与半导体衬底的表面平行的方向延伸。

2. 发明授权

US07434463B2 Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith 失效
标题翻译：静电容量型加速度传感器和加速度测量装置
公开(公告)号：US07434463B2
公开(公告)日：2008-10-14
申请号：US11210966
申请日：2005-08-25
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814
摘要： A moving member having a plurality of moving electrodes is supported by support members at both ends thereof on a substrate surface in such a way that it can be subjected to displacement in a two-dimensional plane. A plurality of fixed electrodes are arranged to face the plurality of moving electrodes respectively, thus forming different facing areas therebetween when an input acceleration is zero. The facing areas formed between pairs of the electrodes facing each other are varied in response to the displacement of the moving member, whereby a capacitance caused by one pair of the electrodes whose facing area is relatively small is used to detect a relatively small input acceleration, and a capacitance caused by the other pair of the electrodes whose facing area is relatively large is used to detect a relatively large input acceleration.
摘要翻译：具有多个移动电极的移动部件的两端由支撑部件支撑在基板表面上，使其能够在二维平面中进行位移。多个固定电极被布置为分别面向多个移动电极，从而当输入加速度为零时在其间形成不同的面对区域。形成在彼此面对的电极对之间的面对区域响应于移动构件的位移而变化，由此使用由相对面积相对较小的一对电极引起的电容来检测相对较小的输入加速度，并且使用由面对面积较大的另一对电极引起的电容来检测相对较大的输入加速度。

3. 发明授权

US07071017B2 Micro structure with interlock configuration 失效
公开(公告)号：US07071017B2
公开(公告)日：2006-07-04
申请号：US10902390
申请日：2004-07-30
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： H01L29/00 , H01L29/302 , H01L29/461
CPC分类号： B81B3/0054 , B81B3/001 , B81B2203/0118 , B81B2203/0307 , H01L21/76804 , H01L21/76877
摘要： A micro structure has: a semiconductor substrate; an insulating film having a via hole and formed on the semiconductor substrate; an interlock structure formed on a side wall of the via hole and having a retracted portion and a protruded portion above the retracted portion; a conductive member having at one end a connection portion formed burying the via hole and an extension portion continuous with the connection portion and extending along a direction parallel to a surface of the semiconductor substrate.

4. 发明授权

US08126167B2 Condenser microphone 有权
标题翻译：冷凝器麦克风
公开(公告)号：US08126167B2
公开(公告)日：2012-02-28
申请号：US11691943
申请日：2007-03-27
申请人： Seiji Hirade , Tamito Suzuki , Yukitoshi Suzuki , Masayoshi Omura , Yuusaku Ebihara
发明人： Seiji Hirade , Tamito Suzuki , Yukitoshi Suzuki , Masayoshi Omura , Yuusaku Ebihara
IPC分类号： H04R25/00
CPC分类号： H04R19/04 , H04R19/005 , H04R31/00
摘要： The present invention provides a condenser microphone, in which, with a simple manufacturing process, vibration characteristics of a diaphragm are improved, and a parasitic capacitance occurring between the diaphragm and a back plate is reduced, thus improving sensitivity. Specifically, the diaphragm having a gear-like shape including a center portion and a plurality of arms and the back plate having a gear-like shape including a center portion and a plurality of arms are positioned opposite to each other above a substrate, wherein the arms of the diaphragm and the arms of the back plate are not positioned opposite to each other. Alternatively, it is possible to independently support the diaphragm and the back plate above the substrate. Furthermore, it is possible to support the back plate above the substrate by means of a plurality of supports inserted into a plurality of holes formed in the center portion of the diaphragm.
摘要翻译：本发明提供了一种电容麦克风，其中通过简单的制造工艺，提高了隔膜的振动特性，并且减小了在隔膜和背板之间产生的寄生电容，从而提高了灵敏度。具体而言，具有中央部和多个臂的齿轮状的隔膜和具有中心部和多个臂的齿轮状的背板位于基板的上方相对的位置，隔膜的臂和背板的臂不彼此相对定位。或者，可以独立地支撑基板上方的隔膜和背板。此外，可以通过插入形成在隔膜的中心部分中的多个孔中的多个支撑件来将基板支撑在基板上。

5. 发明授权

US08059842B2 Capacitor microphone 失效
标题翻译：电容麦克风
公开(公告)号：US08059842B2
公开(公告)日：2011-11-15
申请号：US11470991
申请日：2006-09-07
申请人： Yukitoshi Suzuki , Tamito Suzuki
发明人： Yukitoshi Suzuki , Tamito Suzuki
IPC分类号： H04R25/00
CPC分类号： H04R19/04 , H04R19/005
摘要： A capacitor microphone is constituted by a plate having a fixed electrode, a diaphragm including a center portion and at least one near-end portion that is fixed to the outer periphery, in which the center portion having a vibrating electrode, which is positioned relative to the fixed electrode and which vibrates in response to sound waves, is increased in rigidity in comparison with the near-end portion; and a spacer that is fixed to the plate and the near-end portion of the diaphragm and that has an air gap formed between the plate and the diaphragm. Alternatively, a diaphragm electrode is horizontally supported by extension arms extended from a circular plate thereof and is vertically held in a hanging state being apart from a fixed electrode with a controlled distance therebetween.
摘要翻译：电容麦克风由具有固定电极的板，包括中心部分的膜片和固定在外周上的至少一个近端部分构成，其中具有振动电极的中心部分相对于固定电极响应于声波振动，与近端部分相比刚性增加; 以及固定到隔膜的板和近端部分并且在板和隔膜之间形成气隙的间隔件。或者，隔膜电极由从其圆形板延伸的延伸臂水平地支撑，并且垂直地保持在与固定电极分开的悬挂状态，并且其间具有受控的距离。

6. 发明授权

US07611952B2 Method of manufacturing semiconductor device having side wall spacers 失效
标题翻译：制造具有侧壁间隔物的半导体器件的方法
公开(公告)号：US07611952B2
公开(公告)日：2009-11-03
申请号：US11330264
申请日：2006-01-12
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： H01L21/336
CPC分类号： H01L21/823814 , H01L21/823857 , H01L21/823864
摘要： Gate insulating films 12A and 12B of different thickness are formed in element openings 16a and 16b in the isolation film 16 of a wafer 10. The gate insulating film 12B is the thinnest gate insulating film. A dummy insulating film having the same thickness as the thinnest gate insulating film 12B is formed in wafer periphery area WP. Gate electrodes 20A and 20B are formed on the gate insulating films 12A and 12B, and thereafter an insulating film is deposited on the wafer surface. The deposited insulating film is dry-etched to form side wall spacers 22a to 22d on side walls of the gate electrodes 20A and 20B. During dry etching, the time when the semiconductor surfaces are exposed in the element opening 16b and area WP is detected as an etching end point by a change in the emission spectrum intensity of etching byproducts.
摘要翻译：在晶片10的隔离膜16中的元件开口16a和16b中形成不同厚度的栅极绝缘膜12A和12B。栅极绝缘膜12B是最薄的栅极绝缘膜。在晶片周边区域WP中形成具有与最薄栅绝缘膜12B相同厚度的虚设绝缘膜。在栅极绝缘膜12A和12B上形成栅电极20A和20B，然后在晶片表面上沉积绝缘膜。对该沉积的绝缘膜进行干蚀刻，以在栅电极20A和20B的侧壁上形成侧壁间隔物22a至22d。在干蚀刻期间，通过蚀刻副产物的发射光谱强度的变化，将半导体表面暴露在元件开口16b和区域WP中的时间检测为蚀刻终点。

7. 发明授权

US07443158B2 Sensor, and method for measuring physical quantity by use of the sensor 失效
标题翻译：传感器和使用传感器测量物理量的方法
公开(公告)号：US07443158B2
公开(公告)日：2008-10-28
申请号：US11236680
申请日：2005-09-28
申请人： Toshiyuki Oohashi , Tamito Suzuki
发明人： Toshiyuki Oohashi , Tamito Suzuki
IPC分类号： G01B7/14 , G01R33/00 , G01P15/105
CPC分类号： G01R33/0283
摘要： A sensor includes a first X-axis GMR element to a fourth X-axis GMR element fixed on a substrate, and a movable coil movably supported on the substrate. When electric current flows through the movable coil, a magnetic field is generated around the movable coil. The generated magnetic field is applied to the first to fourth X-axis GMR elements. The movable coil moves in accordance with acceleration generated in the sensor. The movement of the movable coil causes variation in the magnetic field applied to the first to fourth X-axis GMR element. While no electric current flows to the movable coil, the sensor measures an external magnetic field on the basis of resistances of the first to fourth X-axis GMR elements. While constant electric current flows through the movable coil, the sensor measures acceleration or the like on the basis of resistances of the first to fourth X-axis GMR elements.
摘要翻译：传感器包括固定在基板上的第四X轴GMR元件的第一X轴GMR元件和可移动地支撑在基板上的可动线圈。当电流流过可动线圈时，在可动线圈周围产生磁场。所产生的磁场被施加到第一至第四X轴GMR元件。可动线圈根据传感器中产生的加速度移动。可动线圈的移动引起施加到第一至第四X轴GMR元件的磁场的变化。在没有电流流向可动线圈的情况下，传感器基于第一至第四X轴GMR元件的电阻测量外部磁场。当恒定电流流过可动线圈时，传感器基于第一至第四X轴GMR元件的电阻来测量加速度等。

8. 发明授权

US07150192B2 Acceleration measurement method using electrostatic-capacity-type acceleration sensor 有权
标题翻译：使用静电容量型加速度传感器的加速度测量方法
公开(公告)号：US07150192B2
公开(公告)日：2006-12-19
申请号：US10925916
申请日：2004-08-26
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： G01P15/125 , H01G7/00
CPC分类号： G01P15/125
摘要： An acceleration measurement method adapted to an electostatic-capacity-type acceleration sensor comprising a first capacitance detector and a second capacitance detector both of which have moving electrodes and fixed electrodes arranged on a substrate surface so that facing areas therebetween are varied in response to input acceleration, wherein said second capacitance detector sets the facing areas between the moving electrodes and the fixed electrodes to be larger than those of the first capacitance detector when the input acceleration is zero. If first acceleration information representing capacitance variations detected between the moving electrodes and fixed electrodes in the first capacitance detector exceed an upper limit value that is set in advance with respect to the first capacitance detector, it outputs second acceleration information representing capacitance variations detected between the moving electrodes and the fixed electrodes in the second capacitance detector. If not, it outputs the first acceleration information.
摘要翻译：一种加速度测量方法，适用于包括第一电容检测器和第二电容检测器的电位容量型加速度传感器，两者均具有布置在基板表面上的移动电极和固定电极，使得它们之间的面对区域响应于输入加速度而变化其中当所述输入加速度为零时，所述第二电容检测器将所述移动电极和所述固定电极之间的面对区域设置为大于所述第一电容检测器的面积。如果表示在第一电容检测器中的移动电极和固定电极之间检测到的电容变化的第一加速度信息超过相对于第一电容检测器预先设定的上限值，则输出表示在移动中检测到的电容变化的第二加速度信息电极和第二电容检测器中的固定电极。否则，输出第一个加速度信息。

9. 发明申请

US20050279167A1 Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith 失效
标题翻译：静电容量型加速度传感器和加速度测量装置
公开(公告)号：US20050279167A1
公开(公告)日：2005-12-22
申请号：US11210966
申请日：2005-08-25
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814
摘要： A moving member having a plurality of moving electrodes is supported by support members at both ends thereof on a substrate surface in such a way that it can be subjected to displacement in a two-dimensional plane. A plurality of fixed electrodes are arranged to face the plurality of moving electrodes respectively, thus forming different facing areas therebetween when an input acceleration is zero. The facing areas formed between pairs of the electrodes facing each other are varied in response to the displacement of the moving member, whereby a capacitance caused by one pair of the electrodes whose facing area is relatively small is used to detect a relatively small input acceleration, and a capacitance caused by the other pair of the electrodes whose facing area is relatively large is used to detect a relatively large input acceleration.
摘要翻译：具有多个移动电极的移动部件的两端由支撑部件支撑在基板表面上，使其能够在二维平面内进行位移。多个固定电极被布置为分别面向多个移动电极，从而当输入加速度为零时在其间形成不同的面对区域。形成在彼此面对的电极对之间的面对区域响应于移动构件的位移而变化，由此使用由相对面积相对较小的一对电极引起的电容来检测相对较小的输入加速度，并且使用由面对面积较大的另一对电极引起的电容来检测相对较大的输入加速度。

10. 发明授权

US07805821B2 Method of making capacitance sensor 失效
标题翻译：电容传感器的制作方法
公开(公告)号：US07805821B2
公开(公告)日：2010-10-05
申请号：US11841455
申请日：2007-08-20
申请人： Tamito Suzuki
发明人： Tamito Suzuki
IPC分类号： H01G7/00
CPC分类号： H04R31/003 , H04R19/005 , Y10T29/42 , Y10T29/43 , Y10T29/49002
摘要： A method for manufacturing a capacitance sensor comprises the steps of (a) depositing a film to be a diaphragm forming a moving electrode, (b) heating the film to be the diaphragm to a first temperature, and (c) depositing a film to be a plate forming a fixed electrode opposing to the moving electrode. Stresses of the diaphragm and the plate of the capacitance sensor are optimized.
摘要翻译：一种制造电容式传感器的方法包括以下步骤：（a）将作为形成移动电极的隔膜的膜沉积，（b）将作为隔膜的膜加热至第一温度;（c）形成与所述移动电极相对的固定电极的板。优化了电容传感器的隔膜和板的应力。

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