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1. 发明授权

US5885881A Planar wave guide cladding 失效
标题翻译：平面波导包层
公开(公告)号：US5885881A
公开(公告)日：1999-03-23
申请号：US842022
申请日：1997-04-23
申请人： Sureshchandra Mishrilal Ojha
发明人： Sureshchandra Mishrilal Ojha
IPC分类号： C23C16/509 , C23C16/56 , G02B6/12 , G02B6/122 , G02B6/132 , G02B6/10
CPC分类号： C23C16/509 , C23C16/56 , G02B6/122 , G02B6/132 , G02B2006/12097 , G02B2006/12169
摘要： An optical circuit device having a core supported on a substrate incorporates a wave guide being in a layer of the core. The structure is provided with a cladding layer by depositing by means of a PECVD process a cladding material on the wave guide core and maintaining a negative bias between the substrate or the core and earth while the deposition is proceeding.
摘要翻译：具有支撑在基板上的芯的光电路装置包括在芯的层中的波导。该结构通过PECVD工艺在波导芯上沉积包覆材料并在沉积进行期间在衬底或芯与地之间保持负偏压而设置有包层。

2. 发明授权

US5979188A Method of fabricating a planar waveguide structure 失效
标题翻译：制造平面波导结构的方法
公开(公告)号：US5979188A
公开(公告)日：1999-11-09
申请号：US880594
申请日：1997-06-23
申请人： Sureshchandra Mishrilal Ojha
发明人： Sureshchandra Mishrilal Ojha
IPC分类号： C23C16/56 , G02B6/12 , G02B6/132 , C23C16/40
CPC分类号： G02B6/132 , C23C16/56 , G02B2006/12169
摘要： Annealing a planar wave guide layer is critical because small structural imperfections lead to optical problems. Chemical vapor deposition of the layer tends to leave gaseous substances bonded to the deposit, which on being driven off by initial annealing warm-ups leave cavities requiring densification. Traditional annealing methods take several hours. This invention proposes a rapid heating of the layer to a temperature below the flow temperature, maintaining this temperature for about 30 to 300 seconds, then rapidly heating up further to a temperature close to or above the flow temperature, maintaining this temperature for about 30 to 300 seconds, then allowing the substrate and layer to cool rapidly to room temperature.
摘要翻译：退火平面波导层是至关重要的，因为小的结构缺陷导致光学问题。该层的化学气相沉积倾向于留下结合到沉积物上的气态物质，其在初始退火预热时被驱除，留下需要致密化的空隙。传统的退火方法需要几个小时。本发明提出将层的快速加热到低于流动温度的温度，将该温度保持约30至300秒，然后进一步快速升温至接近或高于流动温度的温度，将该温度保持在约30℃至 300秒，然后使基材和层迅速冷却至室温。

3. 发明授权

US5930439A Planar optical waveguide 失效
标题翻译：平面光波导
公开(公告)号：US5930439A
公开(公告)日：1999-07-27
申请号：US942189
申请日：1997-10-01
申请人： Sureshchandra Mishrilal Ojha , Terry Bricheno , Clifford Graham Cureton , Stephen Day , David John Moule
发明人： Sureshchandra Mishrilal Ojha , Terry Bricheno , Clifford Graham Cureton , Stephen Day , David John Moule
IPC分类号： G02B6/12 , G02B6/10 , G02B6/122 , G02B6/132 , G02B6/34
CPC分类号： G02B6/1203 , G02B6/10 , G02B6/122 , G02B6/132 , G02B2006/12038 , G02B2006/12061 , G02B2006/12169 , G02B6/12023
摘要： A planar optical waveguide comprises at least two cladding layers on a substrate with at least one core layer disposed between the cladding layers. The overcladding layer of the two layers is doped in order to produce a thermal coefficient of expansion close to or equal to that of the substrate in order to reduce the polarisation sensitivity of the device.
摘要翻译：平面光波导在衬底上包括至少两个覆层，其中至少一个芯层设置在覆层之间。掺杂两层的外包层以产生接近或等于衬底的热膨胀系数，以降低器件的极化灵敏度。

4. 发明授权

US5904491A Planar waveguides 失效
标题翻译：平面波导
公开(公告)号：US5904491A
公开(公告)日：1999-05-18
申请号：US842021
申请日：1997-04-23
申请人： Sureshchandra Mishrilal Ojha , Jonathan Paul Stagg
发明人： Sureshchandra Mishrilal Ojha , Jonathan Paul Stagg
IPC分类号： C23C16/40 , C23C16/56 , G02B6/12 , G02B6/122 , G02B6/125 , G02B6/132 , H01L21/00 , G02B6/00
CPC分类号： C23C16/401 , C23C16/56 , G02B6/122 , G02B6/125 , G02B6/132 , G02B2006/12097 , G02B2006/12147 , G02B2006/12169
摘要： A cladding layer on the core of an optical waveguide is subjected to a rapid thermal annealing process preferably either: in a multi-stage furnace in which the waveguide substrate can be transported rapidly on a carriage between stages at different temperatures; or in a quartz chamber adjacent a bank of quartz halogen lamps of low thermal inertia and easily switched rapidly between different intensities of thermal radiation through the chamber.
摘要翻译：在光波导芯体上的包覆层经受快速热退火处理，优选地是：在多级炉中，其中波导基板能够在不同温度下的载物台之间快速地运输; 或者在与热惯性较小的石英卤素灯组相邻的石英腔中，并且通过腔室在不同强度的热辐射之间快速切换。

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