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1. 发明授权

US09036951B2 Silicon acousto-optic modulator structure and method 有权
标题翻译：硅声光调制器的结构与方法
公开(公告)号：US09036951B2
公开(公告)日：2015-05-19
申请号：US13556617
申请日：2012-07-24
申请人： Sunil Bhave , Suresh Sridaran
发明人： Sunil Bhave , Suresh Sridaran
IPC分类号： G02F1/01 , G02F1/035 , G02F1/295 , G02F1/335 , G02B26/02 , G02B6/12 , G02F1/11 , G02F1/125
CPC分类号： G02F1/335 , G02B6/12007 , G02B26/02 , G02F1/113 , G02F1/125 , G02F2201/17 , G02F2201/20 , G02F2201/58 , G02F2202/105 , G02F2203/15
摘要： An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated are related fabrication and operation methods.
摘要翻译：可以包括用于光声振荡器的声光调制器的电光结构包括多个刚性连接的谐振器芯组件，其被定位成可移动地分离在衬底上并且在锚点处锚定到衬底。致动器电极与刚性连接的谐振器芯部件中的第一个分离开，并且光波导与刚性连接的谐振器芯部件中的第二个分离。致动器电极的射频和直流致动在第一刚性连接的谐振器芯部件中提供机械振动，机械耦合到第二刚性连接的谐振器芯部件，其用于光学调制通过波导传输的光。也可以进行反向操作。实施例还考虑了作为辐射压力驱动检测器的第三刚性连接的谐振器芯部件。进一步考虑的是相关的制造和操作方法。

2. 发明申请

US20120294564A1 SILICON ACOUSTO-OPTIC MODULATOR STRUCTURE AND METHOD 有权
标题翻译：硅光学调制器结构与方法
公开(公告)号：US20120294564A1
公开(公告)日：2012-11-22
申请号：US13556617
申请日：2012-07-24
申请人： Sunil Bhave , Suresh Sridaran
发明人： Sunil Bhave , Suresh Sridaran
IPC分类号： G02F1/035 , G02B6/12 , H01L21/283
CPC分类号： G02F1/335 , G02B6/12007 , G02B26/02 , G02F1/113 , G02F1/125 , G02F2201/17 , G02F2201/20 , G02F2201/58 , G02F2202/105 , G02F2203/15
摘要： An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated is a related fabrication method and a related operation method.
摘要翻译：可以包括用于光声振荡器的声光调制器的电光结构包括多个刚性连接的谐振器芯组件，其被定位成可移动地分离在衬底上并且在锚点处锚定到衬底。致动器电极与刚性连接的谐振器芯部件中的第一个分离开，并且光波导与刚性连接的谐振器芯部件中的第二个分离。致动器电极的射频和直流致动在第一刚性连接的谐振器芯部件中提供机械振动，机械耦合到第二刚性连接的谐振器芯部件，其用于光学调制通过波导传输的光。也可以进行反向操作。实施例还考虑了作为辐射压力驱动检测器的第三刚性连接的谐振器芯部件。进一步考虑的是相关的制造方法和相关的操作方法。

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