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1. 发明授权

US08804241B2 Methods for forming optical films 有权
标题翻译：光学膜形成方法
公开(公告)号：US08804241B2
公开(公告)日：2014-08-12
申请号：US12946767
申请日：2010-11-15
申请人： Qihong Wu , Kelvin Xu Zhang , Shiaw-Wen Tai
发明人： Qihong Wu , Kelvin Xu Zhang , Shiaw-Wen Tai
IPC分类号： G02B5/30 , G02B5/18
CPC分类号： G02B5/3058 , G02B5/1809
摘要： A method includes providing a layer having a plurality of spaced-apart lines of a first material extending along a first direction and forming a line of a second material on opposing surfaces of each line of the first material, the first and second materials being different and adjacent lines of the second material being discontinuous. After forming the lines of the second material, forming pairs of spaced-apart lines of a third material between adjacent pairs of the lines of the second material, wherein each line of the third material is spaced apart from the closest line of the second material and the first and third materials are different.
摘要翻译：一种方法包括提供具有沿着第一方向延伸的多个间隔开的第一材料线的层并且在第一材料的每条线的相对表面上形成第二材料的线，所述第一和第二材料是不同的，第二材料的相邻线是不连续的。在形成第二材料的线之后，在相邻的第二材料线对之间形成第三材料的间隔开的线对，其中第三材料的每条线与第二材料的最接近的线分开，第一和第三种材料是不同的。

2. 发明授权

US5865423A High flow diaphragm valve 失效
标题翻译：高流量隔膜阀
公开(公告)号：US5865423A
公开(公告)日：1999-02-02
申请号：US986564
申请日：1997-12-05
申请人： Patrick P. Barber , Shiaw-wen Tai
发明人： Patrick P. Barber , Shiaw-wen Tai
IPC分类号： F16K41/12 , F16K31/50
CPC分类号： F16K41/12
摘要： A diaphragm valve is provided with a valve housing having an inlet passage extending into a chamber and an outlet passage extending from the chamber. A diaphragm is mounted to the valve housing for covering the valve chamber. The diaphragm is provided with an aperture extending centrally therethrough. A valve stem is mounted adjacent the diaphragm externally of the valve chamber, such that movement of the valve stem deflects the diaphragm. A valving element is disposed in the valve chamber and is threadedly engaged with the valve stem through the aperture in the diaphragm. A toroidal sealing bead on the valving element is sealingly engaged with portions of the diaphragm surrounding the aperture therein.
摘要翻译：隔膜阀设置有阀壳体，其具有延伸到腔室中的入口通道和从腔室延伸的出口通道。隔膜安装到阀壳体上以覆盖阀室。隔膜设置有中心延伸穿过的孔。阀杆安装在阀室外部的膜片附近，使得阀杆的运动使膜片偏转。阀元件设置在阀室中，并且通过隔膜中的孔与阀杆螺纹接合。阀元件上的环形密封珠密封地与围绕其中的孔的膜片的部分密封接合。

3. 发明申请

US20090231702A1 OPTICAL FILMS AND METHODS OF MAKING THE SAME 审中-公开
标题翻译：光学薄膜及其制作方法
公开(公告)号：US20090231702A1
公开(公告)日：2009-09-17
申请号：US12049965
申请日：2008-03-17
申请人： Qihong Wu , Xu Zhang , Shiaw-Wen Tai
发明人： Qihong Wu , Xu Zhang , Shiaw-Wen Tai
IPC分类号： G02B27/28 , B44C1/22
CPC分类号： G02B5/3058 , G02B5/1809
摘要： In general, in a first aspect, the invent features a method, including providing a layer having a plurality of spaced-apart lines of a first material extending along a first direction and forming a line of a second material on opposing surfaces of each line of the first material, the first and second materials being different and adjacent lines of the second material being discontinuous. After forming the lines of the second material, forming pairs of spaced-apart lines of a third material between adjacent pairs of the lines of the second material, wherein each line of the third material is spaced apart from the closest line of the second material and the first and third materials are different.
摘要翻译：通常，在第一方面，本发明的特征在于一种方法，包括提供具有沿着第一方向延伸的第一材料的多个间隔开的线的层并在每条线的相对表面上形成第二材料的线所述第一材料，所述第一材料和所述第二材料是不同的并且所述第二材料的相邻线是不连续的。在形成第二材料的线之后，在相邻的第二材料线对之间形成第三材料的间隔开的线对，其中第三材料的每条线与第二材料的最接近的线分开，第一和第三种材料是不同的。

4. 发明申请

US20100072170A1 SHORT PITCH METAL GRATINGS AND METHODS FOR MAKING THE SAME 有权
标题翻译：短路金属镀层及其制造方法
公开(公告)号：US20100072170A1
公开(公告)日：2010-03-25
申请号：US12563824
申请日：2009-09-21
申请人： Qihong Wu , Sheng Liu , Xu Zhang , Shiaw-wen Tai , Xiaohua Du , Thomas Tombler
发明人： Qihong Wu , Sheng Liu , Xu Zhang , Shiaw-wen Tai , Xiaohua Du , Thomas Tombler
IPC分类号： C23F1/02
CPC分类号： G02B5/3058
摘要： Methods for forming a metal grating include providing a first grating including a plurality of grating lines formed from a dielectric material, each grating having a pair of sidewalls, facing sidewalls of adjacent grating lines being separated by corresponding trenches, the grating lines and trenches forming a grating surface; forming a layer of a metal on the grating surface, where the metal layer has a constant thickness and conforms to the grating surface; and removing portions of the metal layer between sidewalls of adjacent grating lines of the first grating to form a metal grating having grating lines formed from the metal, the grating lines of the metal grating corresponding to the portions of the metal layer adjacent the sidewalls of the grating lines of the first grating. The metal grating has a pitch of 200 nm or less, a depth of 50 nm or more, and the grating lines of the metal grating have an aspect ratio of 10-to-1 or more.
摘要翻译：用于形成金属光栅的方法包括提供包括由电介质材料形成的多个格栅线的第一光栅，每个光栅具有一对侧壁，其相对的光栅线的侧壁由相应的沟槽分开，所述光栅线和沟槽形成光栅表面在光栅表面上形成金属层，其中金属层具有恒定的厚度并符合光栅表面; 以及去除所述第一光栅的相邻光栅线的侧壁之间的所述金属层的部分以形成具有由所述金属形成的光栅线的金属光栅，所述金属光栅的光栅线对应于邻近所述金属层的侧壁的所述金属层的所述部分第一光栅的光栅线。金属光栅的间距为200nm以下，深度为50nm以上，金属光栅的光栅线的纵横比为10比1以上。

5. 发明授权

US08506827B2 Short pitch metal gratings and methods for making the same 有权
标题翻译：短节距金属光栅及其制作方法
公开(公告)号：US08506827B2
公开(公告)日：2013-08-13
申请号：US12563824
申请日：2009-09-21
申请人： Qihong Wu , Sheng Liu , Xu Zhang , Shiaw-wen Tai , Xiaohua Du , Thomas Tombler
发明人： Qihong Wu , Sheng Liu , Xu Zhang , Shiaw-wen Tai , Xiaohua Du , Thomas Tombler
IPC分类号： C23F1/02
CPC分类号： G02B5/3058
摘要： Methods for forming a metal grating include providing a first grating including a plurality of grating lines formed from a dielectric material, each grating having a pair of sidewalls, facing sidewalls of adjacent grating lines being separated by corresponding trenches, the grating lines and trenches forming a grating surface; forming a layer of a metal on the grating surface, where the metal layer has a constant thickness and conforms to the grating surface; and removing portions of the metal layer between sidewalls of adjacent grating lines of the first grating to form a metal grating having grating lines formed from the metal, the grating lines of the metal grating corresponding to the portions of the metal layer adjacent the sidewalls of the grating lines of the first grating. The metal grating has a pitch of 200 nm or less, a depth of 50 nm or more, and the grating lines of the metal grating have an aspect ratio of 10-to-1 or more.
摘要翻译：用于形成金属光栅的方法包括提供包括由电介质材料形成的多个格栅线的第一光栅，每个光栅具有一对侧壁，其相对的光栅线的侧壁由相应的沟槽分开，所述光栅线和沟槽形成光栅表面; 在光栅表面上形成金属层，其中金属层具有恒定的厚度并符合光栅表面; 以及去除所述第一光栅的相邻光栅线的侧壁之间的所述金属层的部分以形成具有由所述金属形成的光栅线的金属光栅，所述金属光栅的光栅线对应于邻近所述金属层的侧壁的所述金属层的所述部分第一光栅的光栅线。金属光栅的间距为200nm以下，深度为50nm以上，金属光栅的光栅线的纵横比为10比1以上。

6. 发明申请

US20110255162A1 OPTICAL FILMS AND METHODS OF MAKING THE SAME 有权
标题翻译：光学薄膜及其制作方法
公开(公告)号：US20110255162A1
公开(公告)日：2011-10-20
申请号：US12946767
申请日：2010-11-15
申请人： Qihong Wu , Kelvin Xu Zhang , Shiaw-Wen Tai
发明人： Qihong Wu , Kelvin Xu Zhang , Shiaw-Wen Tai
IPC分类号： G02B27/28 , B29D11/00
CPC分类号： G02B5/3058 , G02B5/1809
摘要： In general, in a first aspect, the invent features a method, including providing a layer having a plurality of spaced-apart lines of a first material extending along a first direction and forming a line of a second material on opposing surfaces of each line of the first material, the first and second materials being different and adjacent lines of the second material being discontinuous. After forming the lines of the second material, forming pairs of spaced-apart lines of a third material between adjacent pairs of the lines of the second material, wherein each line of the third material is spaced apart from the closest line of the second material and the first and third materials are different.
摘要翻译：通常，在第一方面，本发明的特征在于一种方法，包括提供具有沿着第一方向延伸的第一材料的多个间隔开的线的层并在每条线的相对表面上形成第二材料的线所述第一材料，所述第一材料和所述第二材料是不同的并且所述第二材料的相邻线是不连续的。在形成第二材料的线之后，在相邻的第二材料线对之间形成第三材料的间隔开的线对，其中第三材料的每条线与第二材料的最接近的线分开，第一和第三种材料是不同的。

7. 发明申请

US20100291489A1 EXPOSURE METHODS FOR FORMING PATTERNED LAYERS AND APPARATUS FOR PERFORMING THE SAME 审中-公开
标题翻译：用于形成图案的曝光方法和用于实施其的装置
公开(公告)号：US20100291489A1
公开(公告)日：2010-11-18
申请号：US12466853
申请日：2009-05-15
申请人： Martin Moskovits , Linh Nguyen , Robert Koefer , Qihong Wu , Xu Zhang , Shiaw-Wen Tai
发明人： Martin Moskovits , Linh Nguyen , Robert Koefer , Qihong Wu , Xu Zhang , Shiaw-Wen Tai
IPC分类号： G03F7/20
CPC分类号： G03F7/2022 , G02B5/04 , G02B5/1857 , G03F7/70341 , G03F7/70408
摘要： Methods include providing an article including a substrate, a first layer supported by the substrate, and an interface between the substrate and the first layer. The substrate is substantially transparent to radiation at a wavelength λ and the first layer is formed from a photoresist. The methods include exposing the first layer to radiation by directing radiation at λ through the substrate to impinge on the interface so that the radiation experiences total internal reflection at the interface.
摘要翻译：方法包括提供包括衬底，由衬底支撑的第一层以及衬底和第一层之间的界面的制品。衬底对于波长λ的辐射基本上是透明的，第一层由光致抗蚀剂形成。这些方法包括通过将λ射线通过衬底引导辐射第一层到辐射，以撞击界面，使得辐射在界面处经受全内反射。

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