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1. 发明授权

US4728534A Thick film conductor structure 失效
标题翻译：厚膜导体结构
公开(公告)号：US4728534A
公开(公告)日：1988-03-01
申请号：US892629
申请日：1986-08-04
申请人： Roland K. Ho , Richard H. Jung
发明人： Roland K. Ho , Richard H. Jung
IPC分类号： H01C17/28 , H05K1/09 , H05K1/16 , H05K3/46 , B05D5/12
CPC分类号： H05K1/167 , H01C17/28 , H05K3/4685 , H05K1/092 , H05K2201/035 , H05K2203/1453
摘要： In one embodiment of the present invention a thick film resistor structure comprising common materials is disclosed. The structure includes a supporting carrier as a base for the thick film resistor arrangement, which comprises a resistive material printed on the carrier, first and second noble metal terminating layers connected to either side of the resistive material, first and second barrier layers respectively connected to the first and second noble metal terminating layers, and first and second conducting layers respectively connected to said first and second barrier layers. The barrier layers are preferably composed of nickel or tungsten, whereas the noble metal terminating layers are preferably composed of silver. The resistive material, being formed between the terminating layers, is electrically connected to said copper conducting layers to form a precise thick film resistor structure whose resistance is measurable between said conducting layers.
摘要翻译：在本发明的一个实施例中，公开了包含普通材料的厚膜电阻器结构。该结构包括作为厚膜电阻器布置的基底的支撑载体，其包括印刷在载体上的电阻材料，连接到电阻材料的任一侧的第一和第二贵金属端接层，第一和第二阻挡层分别连接到第一和第二贵金属端接层，以及分别连接到所述第一和第二阻挡层的第一和第二导电层。阻挡层优选由镍或钨构成，而贵金属端接层优选由银构成。形成在端接层之间的电阻材料电连接到所述铜导电层以形成精确的厚膜电阻器结构，其电阻可在所述导电层之间测量。

2. 发明授权

US4380041A Capacitor pressure transducer with housing 失效
标题翻译：带外壳的电容式压力传感器
公开(公告)号：US4380041A
公开(公告)日：1983-04-12
申请号：US314811
申请日：1981-10-26
申请人： Roland K. Ho
发明人： Roland K. Ho
IPC分类号： G01L9/00 , H04R19/04 , H01G7/00
CPC分类号： G01L9/0075 , H04R19/04
摘要： An improved ceramic capacitive pressure transducer adaptable for use in automobiles is disclosed. The pressure transducer comprises a thin flexible diaphragm disc having a capacitor electrode deposited on it. A thick cylindrical base substrate has a top surface with a second capacitor electrode deposited thereon and the diaphragm is bonded to the top surface of the base substrate by an annular glass ring such that the first and second electrodes are separated from each other and face each other directly across an air gap. The diaphragm, the top surface of the base substrate and the annular glass ring form an internal cavity in which a reference vacuum is stored. In response to pressure changes outside of this cavity, the diaphragm will flex and thereby change the capacitance created by the first and second electrodes. The base substrate has an integral annular flange laterally extending with respect to and beyond the top surface of the base and located below the top surface and between the top and bottom surfaces. A sealing rubber O-ring is mounted on the flange and is used to sealingly mount the transducer to a housing wall without applying stress to the diaphram.
摘要翻译：公开了适用于汽车的改进的陶瓷电容式压力传感器。压力传感器包括具有沉积在其上的电容器电极的薄柔性隔膜盘。厚圆柱形基底具有顶表面，其上沉积有第二电容器电极，并且隔膜通过环形玻璃环结合到基底基板的顶表面，使得第一和第二电极彼此分离并面对彼此直接穿过气隙。隔膜，基底基板的顶表面和环形玻璃环形成存储参考真空的内腔。响应于该腔外的压力变化，隔膜将弯曲并由此改变由第一和第二电极产生的电容。基底基底具有相对于基底的顶表面横向延伸并位于顶表面之下且位于顶表面和底表面之间的整体环形凸缘。密封橡胶O形圈安装在法兰上，用于将换能器密封地安装到外壳壁上，而不对堤坝施加压力。

3. 发明授权

US4345299A Capacitive pressure transducer assembly with improved output lead design 失效
标题翻译：电容式压力传感器组件，具有改进的输出引线设计
公开(公告)号：US4345299A
公开(公告)日：1982-08-17
申请号：US202988
申请日：1980-11-03
申请人： Roland K. Ho
发明人： Roland K. Ho
IPC分类号： G01L9/00 , H01G5/00 , H04R1/04 , H04R19/00 , H01G7/00
CPC分类号： H04R1/04 , G01L9/0075 , H04R19/005
摘要： A ceramic capacitive pressure transducer adaptable for use in automobiles is disclosed. The pressure transducer comprises a relatively thin diaphragm 13 having a capacitive electrode 20 thereon, a base substrate 10 having an opposing electrode 22 thereon, and an annular sealing ring 16 mounting the diaphragm to the base substrate. The base substrate has a peripheral lead bonding area 24 extending laterally beyond the perimeter of the diaphragm with two lead through holes 25, 26 in the bonding area. Metallic output leads 35, 36 are positioned in each of the lead through holes and mechanically and electrically bonded to lead metallizations 27, 28, 30, 31 deposited on the base substrate peripheral portion 24, and one (36) of the output leads is electrically connected to the diaphragm electrode 20 by means of a conductive material 37 inserted through an additional hole 33 in the base substrate located within the perimeter of the diaphragm and in an area of overlap between an outward radial projection 21 of the diaphragm electrode and an inward projection 32 of one (28) of the lead metallizations on the base substrate.
摘要翻译：公开了一种适用于汽车的陶瓷电容式压力传感器。压力传感器包括在其上具有电容电极20的相对薄的隔膜13，其上具有相对电极22的基底10以及将隔膜安装到基底的环形密封环16。底部基板具有在粘合区域中具有两个引导通孔25,26的横向延伸超过隔膜的周边的周边引线接合区域24。金属输出引线35,36定位在每个引线通孔中，并且机械地和电气地结合到沉积在基底周边部分24上的引线金属化物27,28,30,31，并且一个（36）的输出引线是电通过导电材料37连接到隔膜电极20，该导电材料37穿过位于隔膜周边内的基底基板中的附加孔33，并且在隔膜电极的向外的径向突起21与向内突出部 32个在基底衬底上的引线金属化中的一个（28）。

4. 发明授权

US4225632A Fabrication of capacitive transducers 失效
标题翻译：电容式换能器的制造
公开(公告)号：US4225632A
公开(公告)日：1980-09-30
申请号：US850759
申请日：1977-11-11
申请人： Roland K. Ho
发明人： Roland K. Ho
IPC分类号： B32B17/06 , G01L9/00 , G01L9/12 , H01G5/16 , B05D1/32 , H01G7/00
CPC分类号： H01G5/16 , G01L9/0075 , Y10T29/435
摘要： A method for constructing a capacitive transducer by depositing a uniform glass insulating ring. The capacitive transducer consists of a circular base substrate and a circular diaphragm, each supporting one of two capacitor electrode and separated by a uniform glass insulating ring which determines a uniform air gap between the capacitor electrodes. Pressure changes cause the diaphragm to flex and thereby produce capacitance changes in relation to the pressure being sensed. The thickness of the glass insulating ring is critical to the production of an accurate pressure transducer and is produced in the following manner. A first glass insulating ring layer is screen printed onto a substrate through a mask having a pattern therein. Subsequently, the relative rotational orientation between the mask pattern and the first screened layer is altered by a predetermined number of degrees and a second screened layer is deposited on top of the first layer. By this technique, a uniformly thick layer of glass frit (finely divided particles) is deposited on the substrate despite any imperfections or variations in the thickness of the mask or the uniformity of the pattern contained in the mask.
摘要翻译：一种通过沉积均匀的玻璃绝缘环来构造电容换能器的方法。电容式换能器由圆形基底基板和圆形隔膜组成，每个支撑两个电容器电极中的一个并由均匀的玻璃绝缘环分开，该绝缘环确定电容器电极之间的均匀气隙。压力变化导致隔膜弯曲，从而相对于被感测的压力产生电容变化。玻璃绝缘环的厚度对于精确的压力传感器的生产是至关重要的，并且以下列方式生产。通过其中具有图案的掩模将第一玻璃绝缘环层丝网印刷到基底上。随后，掩模图案和第一屏蔽层之间的相对旋转取向改变预定数量的度数，并且第二屏蔽层沉积在第一层的顶部上。通过这种技术，尽管掩模的厚度有任何缺陷或变化或掩模中包含的图案的均匀性，均匀厚的玻璃料（细碎颗粒）沉积在基板上。

5. 发明授权

US4204244A Electromechanical pressure transducer 失效
标题翻译：机电式压力传感器
公开(公告)号：US4204244A
公开(公告)日：1980-05-20
申请号：US871273
申请日：1978-01-23
申请人： Roland K. Ho
发明人： Roland K. Ho
IPC分类号： G01L9/00 , H01G7/00
CPC分类号： G01L9/0075
摘要： An improved ceramic capacitive pressure sensor adaptable for use in automobiles is disclosed. The pressure sensor comprises a thin flexible diaphragm disc having a capacitor electrode deposited on it. A thick cylindrical base substrate has a top surface with a second capacitor electrode deposited thereon and the diaphragm is bonded to the top surface of the base substrate by an annular glass ring such that the first and second electrodes are separated from each other and face each other directly across an air gap. The diaphragm, the top surface of the base substrate and the annular glass ring form an internal cavity in which a reference vacuum is stored. In response to pressure changes outside of this cavity, the diaphragm will flex and thereby change the capacitance created by the first and second electrodes. At least one channel portion is provided in the base substrate top surface which opens into the cavity storing the reference vacuum. This improves the electrical and mechanical characteristics of the pressure sensor. The diaphragm electrode is substantially larger than the base electrode and extends substantially over all of the central portion of the diaphragm within the glass annular ring and in this manner the electrode acts as a shield against conductive elements which are exterior to the internal cavity and are adjacent to the thin diaphragm. Also, a large electrode is provided on the diaphragm opposite to the diaphragm electrode, this large electrode being coupled to a metallic housing through a conductive gasket to obtain a similar shielding effect.
摘要翻译：公开了适用于汽车的改进的陶瓷电容式压力传感器。压力传感器包括薄的柔性隔膜盘，其上沉积有电容器电极。厚圆柱形基底具有顶表面，其上沉积有第二电容器电极，并且隔膜通过环形玻璃环结合到基底基板的顶表面，使得第一和第二电极彼此分离并面对彼此直接穿过气隙。隔膜，基底基板的顶表面和环形玻璃环形成存储参考真空的内腔。响应于该腔外的压力变化，隔膜将弯曲并由此改变由第一和第二电极产生的电容。至少一个通道部分设置在基底衬底顶表面中，通道开口进入存储参考真空的空腔。这改善了压力传感器的电气和机械特性。隔膜电极基本上大于基底电极并且基本上在玻璃环形环内的隔膜的所有中心部分上延伸，并且以这种方式，电极用作抵抗在内部空腔外部并且相邻的导电元件的屏蔽到薄膜。此外，在隔膜相对于隔膜电极设置大电极，该大电极通过导电垫圈与金属外壳相连，以获得类似的屏蔽效果。

6. 发明授权

US4617606A Capacitive pressure transducer 失效
标题翻译：电容式压力传感器
公开(公告)号：US4617606A
公开(公告)日：1986-10-14
申请号：US696933
申请日：1985-01-31
申请人： Peter J. Shak , Roland K. Ho
发明人： Peter J. Shak , Roland K. Ho
IPC分类号： G01L9/00 , G01L9/12
CPC分类号： G01L9/0073
摘要： A capacitive pressure transducer is disclosed in which a preformed metallic component is embedded in a nonconductive base substrate and acts as a first capacitor electrode. A silicon diaphragm acts as a second pressure sensing capacitor electrode whose spacing from the first electrode is determined by sensed pressure. The preformed metallic component forming the first capacitor electrode has an integral projecting portion which extends through the base substrate and provides an externally accessible electrical connection to the first electrode. A top external surface of the first electrode is ground flat so that it is coplanar with surrounding coplanar portions of a top surface of the base substrate. An additional preformed metallic conductor means is embedded in the base substrate and provides an externally accessible bottom side connection to the silicon diaphragm which is bonded to the base top surface. In some embodiments, the integral projecting portion of the first electrode has a through path opening therein to provide external access to an internal cavity formed by the silicon diaphragm, the external top surface of the base electrode and coplanar portions of the top surface of the base which surround the first electrode top external surface. Pressure transducers constructed in accordance with the present invention are more reliable and less costly because of elimination of prior techniques used to provide the base substrate electrode and the electrical feedthrough connections through the base substrate. In addition, repeatability of pressure transducers constructed in accordance with the present invention is enhanced.
摘要翻译：公开了一种电容式压力传感器，其中预成型的金属部件嵌入在非导电基底基板中并用作第一电容器电极。硅隔膜用作第二压力感测电容器电极，其与第一电极的间隔由感测压力确定。形成第一电容器电极的预成型金属部件具有整体的突出部分，该突出部分延伸穿过基底基板并提供到第一电极的外部可触及的电连接。第一电极的顶部外表面被磨平，使得其与基底衬底的顶表面的周围共面部分共面。附加的预制金属导体装置嵌入在基底基底中，并且提供与硅隔膜的外部可接近的底侧连接，所述硅隔膜结合到基底表面。在一些实施例中，第一电极的整体突出部分在其中具有通孔，以提供对由硅隔膜形成的内部空腔的外部通路，基极的外部顶表面和基底顶表面的共面部分其围绕第一电极顶部外表面。根据本发明构造的压力传感器是更可靠和更便宜的，因为消除了用于提供基底基板电极的现有技术和通过基底基板的电馈通连接。此外，增强了根据本发明构造的压力传感器的重复性。

7. 发明授权

US4178621A Electromechanical pressure transducer 失效
标题翻译：机电式压力传感器
公开(公告)号：US4178621A
公开(公告)日：1979-12-11
申请号：US871274
申请日：1978-01-23
申请人： Joseph J. Simonelic , Roland K. Ho
发明人： Joseph J. Simonelic , Roland K. Ho
IPC分类号： G01L9/12 , G01L9/00 , H04R19/04 , H01G7/00
CPC分类号： G01L9/0075
摘要： An improved ceramic capacitive pressure sensor adaptable for use in automobiles is disclosed. The pressure sensor comprises a thin flexible diaphragm disc having a capacitor electrode deposited on it. A thick cylindrical base substrate has a top surface with a second capacitor electrode deposited thereon and the diaphragm is bonded to the top surface of the base substrate by an annular glass ring such that the first and second electrodes are separated from each other and face each other directly across an air gap. The diaphragm, the top surface of the base substrate and the annular glass ring form an internal cavity in which a reference vacuum is stored. In response to pressure changes outside of this cavity, the diaphragm will flex and thereby change the capacitance created by the first and second electrodes. At least one channel portion is provided in the base substrate top surface which opens into the cavity storing the reference vacuum. This improves the electrical and mechanical characteristics of the pressure sensor. The diaphragm electrode is substantially larger than the base electrode and extends substantially over all of the central portion of the diaphragm within the glass annular ring and in this manner the electrode acts as a shield against conductive elements which are exterior to the internal cavity and are adjacent to the thin diaphragm.
摘要翻译：公开了适用于汽车的改进的陶瓷电容式压力传感器。压力传感器包括薄的柔性隔膜盘，其上沉积有电容器电极。厚圆柱形基底具有顶表面，其上沉积有第二电容器电极，并且隔膜通过环形玻璃环结合到基底基板的顶表面，使得第一和第二电极彼此分离并面对彼此直接穿过气隙。隔膜，基底基板的顶表面和环形玻璃环形成存储参考真空的内腔。响应于该腔外的压力变化，隔膜将弯曲并由此改变由第一和第二电极产生的电容。至少一个通道部分设置在基底衬底顶表面中，通道开口进入存储参考真空的空腔。这改善了压力传感器的电气和机械特性。隔膜电极基本上大于基底电极并且基本上在玻璃环形环内的隔膜的所有中心部分上延伸，并且以这种方式，电极用作抵抗在内部空腔外部并且相邻的导电元件的屏蔽到薄膜。

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