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1. 发明授权

US4141621A Three layer waveguide for thin film lens fabrication 失效
标题翻译：用于薄膜透镜制造的三层波导
公开(公告)号：US4141621A
公开(公告)日：1979-02-27
申请号：US822116
申请日：1977-08-05
申请人： Roger L. Aagard , Robert P. Ulmer
发明人： Roger L. Aagard , Robert P. Ulmer
IPC分类号： G02B6/124 , G02B5/14
CPC分类号： G02B6/1245
摘要： In thin film optical systems including thin film optical waveguides, of such materials as Nb.sub.2 O.sub.5, it is desirable to fabricate thin film lenses. One of the types of lenses which can be made is the step-in-thickness type. This type of thin-film lens can be fabricated by plasma etching through a photoresist mask in such materials as Nb.sub.2 O.sub.5 and Ta.sub.2 O.sub.5. Plasma etching yields an etch wall with smooth steep sides which is important for good quality thin-film lenses; however, the etch rate is too variable for reproducible etch depth based upon etch time, and the bottom of the etch is very rough, causing excessive scattering loss. It has been found that a sandwich-like structure of Nb.sub.2 O.sub.5, TiO.sub.2 and Nb.sub.2 O.sub.5 provides an improved arrangement in that a good control of the etch depth and a smooth flat bottom in the etch areas have been achieved by introducing the layer of TiO.sub.2 as an etch stop.
摘要翻译：在包括诸如Nb 2 O 5的材料的薄膜光波导的薄膜光学系统中，期望制造薄膜透镜。可以制造的透镜类型之一是厚度类型。这种类型的薄膜透镜可以通过诸如Nb 2 O 5和Ta 2 O 5的材料的光致抗蚀剂掩模的等离子体蚀刻来制造。等离子体蚀刻产生具有平滑陡边的蚀刻壁，这对于优质薄膜透镜是重要的; 然而，基于蚀刻时间，蚀刻速率对于可再现的蚀刻深度来说太可变，并且蚀刻的底部非常粗糙，导致过度的散射损失。已经发现，Nb 2 O 5，TiO 2和Nb 2 O 5的夹心状结构提供了改进的布置，因为通过将TiO 2层引入蚀刻来实现蚀刻深度的良好控制和蚀刻区域中的平滑平坦底部停止。

2. 发明授权

US4651120A Piezoresistive pressure sensor 失效
标题翻译：压阻传感器
公开(公告)号：US4651120A
公开(公告)日：1987-03-17
申请号：US774127
申请日：1985-09-09
申请人： Roger L. Aagard
发明人： Roger L. Aagard
IPC分类号： G01L9/00 , G01L1/22
CPC分类号： G01L9/0054 , Y10T29/42 , Y10T29/49103
摘要： A piezoresisitve pressure sensor having a diaphragm of silicon nitride with a stressed resistor under the edge of the diaphragm in a single crystal supporting wafer. The signal is derived from the stress in the silicon where the diaphragm attaches to the edge of the opening etched through the silicon.
摘要翻译：一种压阻传感器，其具有在单晶支撑晶片中的隔膜边缘处的具有应力电阻器的氮化硅膜。该信号源于硅中的应力，其中光阑附着到通过硅蚀刻的开口的边缘。

3. 发明授权

US4322621A Folded path absorption cell gas sensor 失效
标题翻译：折叠路径吸收池气体传感器
公开(公告)号：US4322621A
公开(公告)日：1982-03-30
申请号：US146818
申请日：1980-05-05
申请人： Roger L. Aagard
发明人： Roger L. Aagard
IPC分类号： G01N21/01 , G01N21/03 , G01N21/31 , G01J1/00 , G01J1/42 , G02B5/10
CPC分类号： G01N21/031 , G01N2021/3181
摘要： In an optical absorption gas sensor there is a practical problem of obtaining a sufficiently long optical path necessary to provide the required sensitivity within a compact space. In the present invention the path length can be multiplied to about 2 meters in a hemispheric like chamber having a radius about 8 cm. A novel, compact and inexpensive cell structure for increasing the optical path length by multiple reflections is provided.
摘要翻译：在光吸收式气体传感器中存在获得在紧凑的空间内提供所需灵敏度所需的足够长的光路的实际问题。在本发明中，路径长度可以在具有约8cm的半径的半球状腔室中乘以大约2米。提供了一种用于通过多次反射来增加光程长度的新型，紧凑且廉价的单元结构。

4. 发明授权

US5389225A Solid-state oxygen microsensor and thin structure therefor 失效
标题翻译：固态氧微量传感器及其薄型结构
公开(公告)号：US5389225A
公开(公告)日：1995-02-14
申请号：US875795
申请日：1992-04-28
申请人： Roger L. Aagard , Ulrich Bonne , Barrett E. Cole
发明人： Roger L. Aagard , Ulrich Bonne , Barrett E. Cole
IPC分类号： G01N27/406 , G01N27/407
CPC分类号： G01N27/4067
摘要： A solid-state oxygen microsensor which measures the potential difference (EMF) generated by two spaced apart electrodes deposited on a solid oxygen ion conducting electrolyte and located in a known and preferably constant temperature gradient in the same ambient atmosphere. Output voltage of the sensor is proportional to the temperature gradient established across the electrodes and the unknown oxygen partial pressure of the ambient atmosphere. The solid-state oxygen microsensor is useful for application to systems such as combustion systems to maintain and improve combustion efficiency levels and exhaust gas cleanliness.
摘要翻译：固态氧气微量传感器，其测量在相同环境气氛中沉积在固体氧离子导电电解质上并位于已知且优选恒定温度梯度的两个间隔开的电极产生的电位差（EMF）。传感器的输出电压与电极周围建立的温度梯度和环境大气未知的氧分压成比例。固态氧气微量传感器可用于诸如燃烧系统之类的系统，以保持并提高燃烧效率水平和废气清洁度。

5. 发明授权

US4487206A Fiber optic pressure sensor with temperature compensation and reference 失效
标题翻译：光纤压力传感器，具有温度补偿和参考
公开(公告)号：US4487206A
公开(公告)日：1984-12-11
申请号：US434028
申请日：1982-10-13
申请人： Roger L. Aagard
发明人： Roger L. Aagard
IPC分类号： A61B5/0215 , G01L9/00 , A61B5/02
CPC分类号： A61B5/02154 , G01L9/0077
摘要： An intravascular catheter tip fiber optic pressure sensor wherein a lens element at the end of the fiber optic collimates the light emanating from the fiber and directs the light in a column towards a closely spaced reflecting diaphragm. The diaphragm is pressure responsive and modulates the focal length of the lens-diaphragm-mirror combination. Three optic fibers traverse the length of the hollow catheter tube, one carrying transmitted light to the tip, one carrying the reflected light from the diaphragm (i.e. the signal), and the third fiber carrying a reflected reference light. The reference detector provides a signal level to control the level of intensity of the light source.
摘要翻译：一种血管内导管末端光纤压力传感器，其中在光纤端部处的透镜元件使从光纤发出的光准直，并将光引导到柱中朝向紧密间隔的反射膜片。隔膜是压力响应的，并且调节透镜 - 光圈镜组合的焦距。三根光纤穿过中空导管的长度，其中一个将透射光传送到尖端，一个承载来自隔膜的反射光（即，信号），第三个光纤承载反射的参考光。参考检测器提供信号电平以控制光源的强度水平。

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