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1. 发明申请

US20080189674A1 Data Generating Method, Data Generating Device, and Program 失效
标题翻译：数据生成方法，数据生成装置和程序
公开(公告)号：US20080189674A1
公开(公告)日：2008-08-07
申请号：US11887966
申请日：2006-04-07
申请人： Yoshiyuki Taniguchi , Tatsuo Morimoto , Akira Nakada , Masae Nakada , Tadahiro Ohmi
发明人： Yoshiyuki Taniguchi , Tatsuo Morimoto , Akira Nakada , Masae Nakada , Tadahiro Ohmi
IPC分类号： G06F17/50
CPC分类号： G03F7/70291 , G03F1/68 , G03F1/78 , G03F7/70508
摘要： To provide a data generating method, device, and program that can generate drawing data for drawing the entire general design graphic data with an accuracy of about 1 to 4 nm in a drawing method or a drawing system adapted to draw gradation-controllable spotlights in a two-dimensional array.The data generating method is a method for generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of the spotlights based on design graphic data. Using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, the method discriminates the feature in the design graphic data near positions of the spotlights and selects the combination of the gradation values in the reference data corresponding to coordinate information of the positions of the spotlights, thereby determining the gradation values.
摘要翻译：为了提供一种数据生成方法，装置和程序，其可以在绘制方法或绘制系统中生成绘制数据，以绘制整个一般设计图形数据，精度约为1至4nm，适于在二维数组。数据生成方法是在具有将二维阵列中的多光可控聚光灯照射到基板上的感光膜上的功能的曝光系统中产生的方法，其基于设计图形数据来生成聚光灯的灰度值。使用根据图形的特征分类的参考数据，并预先描绘映射到图形的坐标信息的灰度值的组合，该方法鉴别聚光灯的位置附近的设计图形数据中的特征，并且选择对应于聚光灯的位置的坐标信息的参考数据，从而确定灰度值。

2. 发明授权

US07971159B2 Data generating method, data generating device, and program in an exposure system for irradiating multigradation-controllable spotlights 失效
标题翻译：曝光系统中的数据生成方法，数据生成装置和程序，用于照射多光可控聚光灯
公开(公告)号：US07971159B2
公开(公告)日：2011-06-28
申请号：US11887966
申请日：2006-04-07
申请人： Yoshiyuki Taniguchi , Tatsuo Morimoto , Akira Nakada , Masae Nakada, legal representative , Tadahiro Ohmi
发明人： Yoshiyuki Taniguchi , Tatsuo Morimoto , Akira Nakada , Tadahiro Ohmi
IPC分类号： G06F17/50
CPC分类号： G03F7/70291 , G03F1/68 , G03F1/78 , G03F7/70508
摘要： To provide a data generating method, device, and program that can generate drawing data for drawing the entire general design graphic data with an accuracy of about 1 to 4 nm in a drawing method or a drawing system adapted to draw gradation-controllable spotlights in a two-dimensional array. The data generating method is a method for generating, in an exposure system having a function of irradiating multigradation-controllable spotlights in a two-dimensional array onto a photosensitive film on a substrate, gradation values of the spotlights based on design graphic data. Using reference data classified by features of a graphic and describing in advance combinations of gradation values mapped to coordinate information of a graphic, the method discriminates the feature in the design graphic data near positions of the spotlights and selects the combination of the gradation values in the reference data corresponding to coordinate information of the positions of the spotlights, thereby determining the gradation values.
摘要翻译：为了提供一种数据生成方法，装置和程序，其可以在绘制方法或绘制系统中生成绘制数据，以绘制整个一般设计图形数据，精度约为1至4nm，适于在二维数组。数据生成方法是在具有将二维阵列中的多光可控聚光灯照射到基板上的感光膜上的功能的曝光系统中产生的方法，其基于设计图形数据来生成聚光灯的灰度值。使用根据图形的特征分类的参考数据，并预先描绘映射到图形的坐标信息的灰度值的组合，该方法鉴别聚光灯的位置附近的设计图形数据中的特征，并且选择对应于聚光灯的位置的坐标信息的参考数据，从而确定灰度值。

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