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1. 发明授权

US08166641B2 Holding tray for substrate, substrate alignment system using the same and method thereof 有权
标题翻译：用于基板的保持托盘，使用其的基板对准系统及其方法
公开(公告)号：US08166641B2
公开(公告)日：2012-05-01
申请号：US11325575
申请日：2006-01-05
申请人： Sang-Jin Han , Kwan-Seop Song , Hee-Cheol Kang , Seok-Heon Jeong
发明人： Sang-Jin Han , Kwan-Seop Song , Hee-Cheol Kang , Seok-Heon Jeong
IPC分类号： H01L21/68
CPC分类号： H01L21/68728 , H01L21/68735 , H01L21/68778 , Y10S414/136 , Y10S414/141 , Y10T29/53265
摘要： Disclosed are a holding tray, a substrate alignment system using the same and a method thereof. More specifically, the present invention relates to a holding tray for substrate capable of accomplishing high-precision alignment and conducting a stable deposition. A holding means is included in at least one side of the substrate to hold and support the substrate in a manner that the substrate is vertically held and supported on a flat surface of the holding tray during a vacuum process.The holding tray according to the present invention, the substrate alignment system using the same, and the method thereof include a substrate on which a deposition is made, a frame formed to receive the substrate, a tray formed to receive the frame, and at least one holding means formed to hold the substrate on the frame.The holding tray for substrate according to the present invention, the substrate alignment system using the same, and the method thereof are useful to accomplish high-precision alignment and conduct a stable deposition process due to the stable vertical arrangement of the substrate during the deposition process.
摘要翻译：公开了一种保持托盘，使用其的基板对准系统及其方法。更具体地，本发明涉及一种能够实现高精度对准并进行稳定沉积的基板用保持托盘。保持装置包括在基板的至少一侧，以在真空过程中将基板竖直保持并支撑在保持托盘的平坦表面上以保持和支撑基板。根据本发明的保持托盘，使用其的基板对准系统及其方法包括其上形成沉积物的基板，形成为接收基板的框架，形成为接收框架的托盘，并且至少一个保持装置被形成为将基板保持在框架上。根据本发明的基板用保持托盘，使用其的基板对准系统及其方法可用于实现高精度对准并且由于在沉积工艺期间基板的稳定垂直排列而进行稳定的沉积工艺。

2. 发明授权

US07651079B2 Substrate support plate transfer apparatus for fabricating organic light emitting display 有权
标题翻译：用于制造有机发光显示器的基板支撑板传送装置
公开(公告)号：US07651079B2
公开(公告)日：2010-01-26
申请号：US11489646
申请日：2006-07-18
申请人： Ji Yong Lee , Kwan Seop Song , Hee Cheol Kang
发明人： Ji Yong Lee , Kwan Seop Song , Hee Cheol Kang
IPC分类号： B25B11/00
CPC分类号： H01L51/5246 , H01L51/524 , Y10S269/90
摘要： A substrate support plate transfer apparatus for fabricating an organic light emitting display is disclosed. In one embodiment, the apparatus includes a quartz plate transferred into a bonding processing chamber for an organic light emitting device, a protection frame on which the quartz plate is placed in order to transfer the quartz plate into the chamber, and a frame-shaped supporting plate including a sliding transfer device for helping the transfer of the protection frame and installed in the chamber. The quartz plate has a rigidity capable of enduring pressure in the bonding process applied to a large sized substrate, and the apparatus provides for convenient replacement of the quartz plate.
摘要翻译：公开了一种用于制造有机发光显示器的基板支撑板传送装置。在一个实施例中，该装置包括转移到有机发光装置的接合处理室中的石英板，设置石英板以便将石英板转移到室中的保护框架，以及框形支撑其包括用于帮助保护框架的传送并安装在室中的滑动传送装置。石英板具有在施加到大尺寸基板的接合工艺中能承受压力的刚性，并且该装置提供方便的石英板更换。

3. 发明申请

US20060150910A1 Alignment system, vertical tray transporting assembly, and deposition apparatus with the same 审中-公开
标题翻译：校准系统，垂直托盘运输组件和具有相同的沉积设备
公开(公告)号：US20060150910A1
公开(公告)日：2006-07-13
申请号：US11302522
申请日：2005-12-14
申请人： Sang-Jin Han , Kwan-Seop Song , Seok-Heon Jeong , Hee-Cheol Kang
发明人： Sang-Jin Han , Kwan-Seop Song , Seok-Heon Jeong , Hee-Cheol Kang
IPC分类号： C23C16/00
CPC分类号： C23C14/042 , C23C14/50
摘要： An alignment system, a vertical tray transporting assembly and a deposition apparatus having the same allow alignment of high precision, and perform a stable deposition process in a short period of time, minimize the effect of fine particles during transportation, and secure a sufficient uniformity of a mask by fixing and supporting a vertically disposed substrate using a fixing holder member and an auxiliary attaching member in a tray of a vertical in-line deposition alignment system.
摘要翻译：对准系统，垂直托盘传送组件和具有该对准系统的沉积设备允许高精度对准，并且在短时间内执行稳定的沉积处理，使运输期间细颗粒的影响最小化，并确保足够的均匀性通过使用垂直的在线沉积取向系统的托盘中的固定保持器构件和辅助附接构件来固定和支撑垂直布置的基底的掩模。

4. 发明申请

US20070023986A1 Holder for fabricating organic light emitting display 有权
标题翻译：用于制造有机发光显示器的支架
公开(公告)号：US20070023986A1
公开(公告)日：2007-02-01
申请号：US11483773
申请日：2006-07-11
申请人： Kyu-Sung Lee , Kwan-Seop Song , Hee-Cheol Kang , Do-Geun Kim
发明人： Kyu-Sung Lee , Kwan-Seop Song , Hee-Cheol Kang , Do-Geun Kim
IPC分类号： B23Q3/00
CPC分类号： C23C14/50 , C23C14/042 , H01L51/56
摘要： A holder for fabricating an organic light emitting display comprises: a holder main body; and a plurality of supporters provided on opposite sides of the holder main body; wherein each supporter has a ‘┐’-shape and comprises a side wall having a predetermined height, and a supporting plate bent from the side wall. The supporting plate is formed with a plurality of stepped parts to support a substrate, a film tray and a mask, to hold the substrate, the film tray and the mask while the substrate, the film tray and the mask are being transported, and to prevent a pattern from being distorted, thereby transporting and processing a substrate, a film tray and a mask in a single chamber at the same time.
摘要翻译：一种用于制造有机发光显示器的保持器，包括：保持器主体; 以及设置在保持器主体的相对侧上的多个支撑件; 其中每个支撑件具有“┐”形并且包括具有预定高度的侧壁和从侧壁弯曲的支撑板。支撑板形成有多个阶梯部，以支撑基板，胶片托盘和掩模，以在基板，胶片托盘和面罩正在运送的同时保持基板，胶片托盘和掩模，并且防止图案变形，从而同时在单个室中输送和处理基板，胶片托盘和掩模。

5. 发明授权

US07548304B2 Chuck plate assembly with cooling means 有权
标题翻译：带冷却装置的卡盘组件
公开(公告)号：US07548304B2
公开(公告)日：2009-06-16
申请号：US11298566
申请日：2005-12-12
申请人： Sang Jin Han , Sung Ho Lee , Myung Soo Huh , Seok Heon Jeong , Kwan Seop Song , Hee Cheol Kang
发明人： Sang Jin Han , Sung Ho Lee , Myung Soo Huh , Seok Heon Jeong , Kwan Seop Song , Hee Cheol Kang
IPC分类号： G03B27/62 , G03B27/52 , C23C14/00 , C23C16/00
CPC分类号： C03C17/28 , C03C17/001 , C03C17/002 , C23C14/042 , C23C14/541
摘要： The invention provides a chuck plate assembly that includes a shadow mask formed with a predetermined pattern; a shadow mask frame holding the shadow mask and having heat-radiating and cooling functions; a substrate aligned with the shadow mask and onto which deposition materials from a deposition source are deposited; and a chuck plate, attaching the substrate to the shadow mask, that includes a refrigerant circulating duct. The temperature of the substrate is optimized in consideration of the temperature of the shadow mask so that an alignment error due to thermal deformation is minimized. That is, the temperature of the shadow mask itself is prevented from rising, and thereby prevents deformation of the shadow mask due to thermal expansion, which improves the precision of a substrate pattern position.
摘要翻译：本发明提供一种卡盘板组件，其包括以预定图案形成的荫罩; 保持荫罩并具有散热和冷却功能的荫罩框架; 与荫罩对准的衬底，沉积来自沉积源的沉积材料; 以及夹持板，将基板安装在荫罩上，该荫罩包括制冷剂循环管道。考虑到荫罩的温度来优化衬底的温度，使得由于热变形引起的取向误差最小化。也就是说，防止荫罩本身的温度上升，从而防止由于热膨胀而引起的荫罩的变形，这提高了基板图案位置的精度。

6. 发明授权

US07862855B2 Controlling effusion cell of deposition system 有权
标题翻译：控制沉积系统的积液细胞
公开(公告)号：US07862855B2
公开(公告)日：2011-01-04
申请号：US11325558
申请日：2006-01-05
申请人： Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
发明人： Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
IPC分类号： C23C16/448
CPC分类号： C23C14/243 , C23C14/12
摘要： In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.
摘要翻译：在包括坩埚，引导通道和注射喷嘴，引导通道和注射喷嘴的沉积系统中控制渗出池的方法中，在加热引导通道和注射喷嘴之后加热坩埚。此外，在冷却包括坩埚，引导通道和注射喷嘴的积液池时，将坩埚冷却。冷却坩埚后，引导通道和喷嘴被冷却。该方法具有通过防止在坩埚中蒸发的沉积材料或喷溅而防止喷嘴堵塞而提高形成在基板上的有机层的均匀性的优点。

7. 发明授权

US07834451B2 Film tray for fabricating flexible display 有权
标题翻译：用于制造柔性显示器的胶片托盘
公开(公告)号：US07834451B2
公开(公告)日：2010-11-16
申请号：US11512649
申请日：2006-08-29
申请人： Kyu Sung Lee , Do Geun Kim , Kwan Seop Song , Hee Cheol Kang
发明人： Kyu Sung Lee , Do Geun Kim , Kwan Seop Song , Hee Cheol Kang
IPC分类号： H01L23/34
CPC分类号： C23C14/50 , C23C14/042 , H01L51/0008 , H01L51/0097 , H01L51/56 , H01L2251/5338
摘要： A film tray for fabricating a flexible display, the film tray preventing a flexible substrate or film from sagging. The film tray includes a support plate and at least one pair of clamps, each clamp of the at least one pair of clamps located along an opposite edge of the support plate to fix a flexible film. A first clamp of the at least one pair clamps is aligned with a second clamp of the least one pair of clamps. Each clamp includes an open-shut part adapted to be opened to receive the flexible substrate or film and adapted to be shut to fix the flexible substrate or film and a support part separated from the open-shut part by a predetermined space to support the flexible substrate or film at a predetermined level when the open-shut part is closed.
摘要翻译：一种用于制造柔性显示器的胶片托盘，该胶片托盘防止柔性基底或胶片下垂。薄膜托盘包括支撑板和至少一对夹具，所述至少一对夹具的每个夹具沿着支撑板的相对边缘设置以固定柔性膜。至少一对夹具的第一夹具与至少一对夹具的第二夹具对齐。每个夹具包括适于打开以接收柔性基底或膜并且适于关闭以将柔性基底或膜固定的开闭部分和与开闭部分隔开预定空间的支撑部分，以支撑柔性基底基板或薄膜在开闭部分闭合时处于预定水平。

8. 发明授权

US07771539B2 Holder for fabricating organic light emitting display 有权
标题翻译：用于制造有机发光显示器的支架
公开(公告)号：US07771539B2
公开(公告)日：2010-08-10
申请号：US11483773
申请日：2006-07-11
申请人： Kyu-Sung Lee , Kwan-Seop Song , Hee-Cheol Kang , Do-Geun Kim
发明人： Kyu-Sung Lee , Kwan-Seop Song , Hee-Cheol Kang , Do-Geun Kim
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： C23C14/50 , C23C14/042 , H01L51/56
摘要： A holder for fabricating an organic light emitting display comprises: a holder main body; and a plurality of supporters provided on opposite sides of the holder main body; wherein each supporter has a ‘┐’-shape and comprises a side wall having a predetermined height, and a supporting plate bent from the side wall. The supporting plate is formed with a plurality of stepped parts to support a substrate, a film tray and a mask, to hold the substrate, the film tray and the mask while the substrate, the film tray and the mask are being transported, and to prevent a pattern from being distorted, thereby transporting and processing a substrate, a film tray and a mask in a single chamber at the same time.
摘要翻译：一种用于制造有机发光显示器的保持器，包括：保持器主体; 以及设置在保持器主体的相对侧上的多个支撑件; 其中每个支撑件具有“┐”形并且包括具有预定高度的侧壁和从侧壁弯曲的支撑板。支撑板形成有多个阶梯部，以支撑基板，胶片托盘和掩模，以在基板，胶片托盘和面罩正在运送的同时保持基板，胶片托盘和掩模，并且防止图案变形，从而同时在单个室中输送和处理基板，胶片托盘和掩模。

9. 发明申请

US20060147628A1 Controlling effusion cell of deposition system 有权
标题翻译：控制沉积系统的积液细胞
公开(公告)号：US20060147628A1
公开(公告)日：2006-07-06
申请号：US11325558
申请日：2006-01-05
申请人： Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
发明人： Min-Jeong Hwang , Kwan-Seop Song , Do-Geun Kim , Jae-Hong Ahn , Sung-Ho Lee
IPC分类号： C23C16/00 , B05C11/00
CPC分类号： C23C14/243 , C23C14/12
摘要： In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucible is heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled. The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing the clogging of the injection nozzle by deposition material vaporized in the crucible or splashing.
摘要翻译：在包括坩埚，引导通道和注射喷嘴，引导通道和注射喷嘴的沉积系统中控制渗出池的方法中，在加热引导通道和注射喷嘴之后加热坩埚。此外，在冷却包括坩埚，引导通道和注射喷嘴的积液池时，将坩埚冷却。冷却坩埚后，引导通道和喷嘴被冷却。该方法具有通过防止在坩埚中蒸发的沉积材料或喷溅而防止喷嘴堵塞而提高形成在基板上的有机层的均匀性的优点。

10. 发明申请

US20110126400A1 Method of manufacturing lithium secondary battery 审中-公开
标题翻译：锂二次电池的制造方法
公开(公告)号：US20110126400A1
公开(公告)日：2011-06-02
申请号：US12805860
申请日：2010-08-20
申请人： Su-Hwan Kim , Kwan-Seop Song , Byoung-Kuk Kim , Soon-Gon Yoon
发明人： Su-Hwan Kim , Kwan-Seop Song , Byoung-Kuk Kim , Soon-Gon Yoon
IPC分类号： H01M2/36
CPC分类号： H01M10/058 , H01M2/361 , H01M10/052 , Y10T29/49108
摘要： A method of manufacturing a lithium secondary battery, the method includes the operations of injecting a lithium salt; arranging an electrode assembly comprising a positive electrode, a separator, and a negative electrode; and injecting a solvent excluding the lithium salt.
摘要翻译：一种制造锂二次电池的方法，该方法包括注入锂盐的操作; 布置包括正极，隔膜和负极的电极组件; 并注入不含锂盐的溶剂。

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