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    • 4. 发明授权
    • Manufacturing apparatus and method for semiconductor device
    • 半导体器件的制造装置和方法
    • US08921212B2
    • 2014-12-30
    • US13685870
    • 2012-11-27
    • Kunihiko SuzukiShinichi Mitani
    • Kunihiko SuzukiShinichi Mitani
    • H01L21/02C23C16/458C30B25/10H01L21/67H01L21/687
    • H01L21/02639C23C16/4584C23C16/4586C30B25/10H01L21/67109H01L21/68792
    • A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring.
    • 半导体器件制造装置包括其中装载晶片的腔室; 用于将处理气体供应到所述室中的第一气体供应单元; 用于从所述室排出气体的排气单元; 其上放置晶片的晶片支撑构件; 其上放置有晶片支撑构件的环; 旋转驱动控制单元,连接到所述环以旋转晶片; 设置在所述环中并且包括用于将晶片加热到预定温度并且在至少一个表面上包括SiC层的加热器元件的加热器和与加热器元件整体模制并且包括至少一个SiC层的SiC层的加热器电极部分 表面; 以及用于将SiC源气体供给到所述环中的第二气体供给单元。
    • 6. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08441010B2
    • 2013-05-14
    • US13164806
    • 2011-06-21
    • Mitsuhiro IchijoToshiya EndoKunihiko SuzukiYasuhiko Takemura
    • Mitsuhiro IchijoToshiya EndoKunihiko SuzukiYasuhiko Takemura
    • H01L29/786
    • H01L29/7869
    • In a transistor including an oxide semiconductor, hydrogen in the oxide semiconductor leads to degradation of electric characteristics of the transistor. Thus, an object is to provide a semiconductor device having good electrical characteristics. An insulating layer in contact with an oxide semiconductor layer where a channel region is formed is formed by a plasma CVD method using a silicon halide. The insulating layer thus formed has a hydrogen concentration less than 6×1020 atoms/cm3 and a halogen concentration greater than or equal to 1×1020 atoms/cm3; accordingly, hydrogen diffusion into the oxide semiconductor layer can be prevented and hydrogen in the oxide semiconductor layer is inactivated or released from the oxide semiconductor layer by the halogen, whereby a semiconductor device having good electrical characteristics can be provided.
    • 在包括氧化物半导体的晶体管中,氧化物半导体中的氢导致晶体管的电特性的劣化。 因此,目的在于提供具有良好的电气特性的半导体器件。 通过使用卤化硅的等离子体CVD法形成与形成沟道区的氧化物半导体层接触的绝缘层。 如此形成的绝缘层的氢浓度小于6×1020原子/ cm3,卤素浓度大于或等于1×1020原子/ cm3; 因此,可以防止氢扩散到氧化物半导体层中,并且氧化物半导体层中的氢被卤素氧化半导体层失活或释放,从而可以提供具有良好电特性的半导体器件。
    • 7. 发明申请
    • HEATING UNIT AND FILM-FORMING APPARATUS
    • 加热单元和成膜装置
    • US20130068164A1
    • 2013-03-21
    • US13611493
    • 2012-09-12
    • Naohisa IKEYAKunihiko SuzukiYuusuke Sato
    • Naohisa IKEYAKunihiko SuzukiYuusuke Sato
    • F27D11/00C23C16/46
    • C23C16/46C30B25/10C30B35/00F27B17/0025F27D2099/0065H01L21/67103
    • A heating unit and a film-forming apparatus comprising of a film-forming chamber, a heating unit for heating a substrate placed in the film-forming chamber, wherein the heating unit comprises of a heat source with a plane surfaced top, an electrode contacting electrically with the heat source, wherein the heat source has a ring-shape or a disk-shape that is formed by an individual, or plurality of heat source members. Wherein the heat source is comprised of a material selected from a group consisting of a carbon (C) material, a carbon material or a silicon carbide (SiC) material coated with silicon carbide (SiC), and a silicon carbide (SiC) material, and wherein the heat source has a ratio of the width (a) of the top portion direction to the thickness (X) of the side part (a/X) is 3 to 10.
    • 一种加热单元和成膜设备,包括成膜室,用于加热置于成膜室中的基底的加热单元,其中加热单元包括具有顶面平面的热源,电极接触 与热源电连接,其中热源具有由单个或多个热源构件形成的环形或圆盘形状。 其中,热源由选自由碳(C)材料,碳材料或涂覆有碳化硅(SiC)的碳化硅(SiC)材料和碳化硅(SiC)材料组成的组中的材料组成, 并且其中所述热源具有所述顶部方向的宽度(a)与所述侧面部分(a / X)的厚度(X)的比率为3至10。
    • 10. 发明授权
    • Engine control device
    • 发动机控制装置
    • US08326516B2
    • 2012-12-04
    • US12786903
    • 2010-05-25
    • Seiji AsanoShingo KimuraKenichi KotabeKenji MizushimaKunihiko Suzuki
    • Seiji AsanoShingo KimuraKenichi KotabeKenji MizushimaKunihiko Suzuki
    • F02D41/04F02D13/02F01L1/34F02P5/04
    • F02D41/0002F02D13/0219F02D41/18F02D2041/001F02D2200/0402F02D2200/0408F02M26/01F02P5/1504Y02T10/18Y02T10/42Y02T10/46
    • There is provided an engine control device which can accurately calculate a compensation coefficient used for transient compensation of an ignition timing without involving a complicated and large-scale calculation model in order to prevent a combustion deterioration and the like caused by a mechanical response delay and the like of the variable valve timing mechanism at a transition time such as an acceleration/deceleration time. The angular difference between each current real phase of the intake/exhaust valves 21 and 22 and a target phase set based on an engine load equivalent amount such as an intake air amount is obtained; the shift amount or its correlation value between a current real intake air amount and a theoretical intake air amount value calculated using a pressure inside an intake manifold when each phase of the intake/exhaust valves has reached the target phase is obtained; further a compensation coefficient for matching the shift amount or its correlation value with the angular difference is obtained; and the compensation coefficient is used to perform transient compensation of an ignition timing.
    • 提供了一种发动机控制装置,其能够精确地计算用于点火正时的瞬时补偿的补偿系数,而不涉及复杂的大型计算模型,以防止由机械响应延迟引起的燃烧劣化等, 类似于可变气门正时机构在诸如加速/减速时间的转变时间。 获得进气/排气门21和22的每个电流实际相位与基于诸如进气量之类的发动机负载当量量设定的目标相位之间的角度差; 获得当进气/排气阀的各相达到目标相位时,使用进气歧管内的压力计算出的当前实际进气量与理论进气量值之间的偏移量或其相关值; 获得用于使偏移量或其相关值与角度差匹配的补偿系数; 并且使用补偿系数来执行点火正时的瞬时补偿。