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    • 2. 发明授权
    • MEMS type resonator, process for fabricating the same and communication unit
    • MEMS型谐振器,其制造方法和通信单元
    • US07517711B2
    • 2009-04-14
    • US10565222
    • 2004-07-21
    • Koji Naniwada
    • Koji Naniwada
    • H01L21/02H03H9/00
    • H03H9/02338H01G5/16H03H3/0072H03H9/2452H03H2009/02511
    • A MEMS resonator and a method for manufacturing thereof are provided, in which an adsorption of a beam into a substrate in a wet process when manufacturing a MEMS is prevented and other oscillation modes, which are unnecessary, than a required oscillation mode are not mixed at the time of operation. Further, a communication apparatus including a filter that has the MEMS resonator is provided. The MEMS resonator includes a substrate in which a lower electrode is formed and a beam formed on the substrate, in which at least one support column is provided between the substrate and the beam. As a filter, the communication apparatus includes a filter of the above MEMS resonator.
    • 提供一种MEMS谐振器及其制造方法,其中防止在制造MEMS时在湿法中将光束吸附到衬底中,并且不需要其它不需要的振荡模式,而不是混合所需的振荡模式 操作时间。 此外,提供了包括具有MEMS谐振器的滤波器的通信装置。 MEMS谐振器包括其中形成下电极的基板和形成在基板上的光束,其中至少一个支撑柱设置在基板和光束之间。 作为滤波器,通信装置包括上述MEMS谐振器的滤波器。