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1. 发明申请

US20070235646A1 Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US20070235646A1
公开(公告)日：2007-10-11
申请号：US11655275
申请日：2007-01-19
申请人： Kazuma Tanii , Yuji Kasai , Katsuhiro Sasada , Eiichi Seya
发明人： Kazuma Tanii , Yuji Kasai , Katsuhiro Sasada , Eiichi Seya
IPC分类号： G01N23/00
CPC分类号： G01N23/2251 , H01J37/28 , H01J2237/004 , H01J2237/216 , H01J2237/24564
摘要： Disclosed is a scanning electron microscope capable of performing speedy focusing by automatically measuring an electrostatic voltage of a surface of a wafer inside a specimen chamber in an accurate, and easy speedy manner, the wafer assuming different electrostatic voltages inside and outside the specimen chamber. The scanning electron microscope that controls optical systems measures an electrostatic voltage of the specimen according to an electrostatic capacitance between the both parts of the divided electrode plate, by dividing an electrode plate into two parts and switching potentials of electrodes obtained by the division with each other, an electrostatic voltage of the specimen based on an electrostatic capacitance between the both parts of the divided electrode plate. The electrode plate is used for applying a retarding voltage and arranged over a specimen.
摘要翻译：公开了一种扫描电子显微镜，其能够以准确且容易的方式自动测量样品室内的晶片表面的静电电压，从而在晶片内部和外部具有不同的静电电压来进行快速聚焦。控制光学系统的扫描电子显微镜通过将电极板分成两部分并通过彼此分割获得的电极的切换电位来测量根据分隔电极板的两个部分之间的静电电容的样品的静电电压基于分割电极板的两个部分之间的静电电容的试样的静电电压。电极板用于施加延迟电压并且布置在试样上。

2. 发明授权

US07514683B2 Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US07514683B2
公开(公告)日：2009-04-07
申请号：US11655275
申请日：2007-01-19
申请人： Kazuma Tanii , Yuji Kasai , Katsuhiro Sasada , Eiichi Seya
发明人： Kazuma Tanii , Yuji Kasai , Katsuhiro Sasada , Eiichi Seya
IPC分类号： H01J37/28
CPC分类号： G01N23/2251 , H01J37/28 , H01J2237/004 , H01J2237/216 , H01J2237/24564
摘要： Disclosed is a scanning electron microscope capable of performing speedy focusing by automatically measuring an electrostatic voltage of a surface of a wafer inside a specimen chamber in an accurate, and easy speedy manner, the wafer assuming different electrostatic voltages inside and outside the specimen chamber. The scanning electron microscope that controls optical systems measures an electrostatic voltage of the specimen according to an electrostatic capacitance between the both parts of the divided electrode plate, by dividing an electrode plate into two parts and switching potentials of electrodes obtained by the division with each other, an electrostatic voltage of the specimen based on an electrostatic capacitance between the both parts of the divided electrode plate. The electrode plate is used for applying a retarding voltage and arranged over a specimen.
摘要翻译：公开了一种扫描电子显微镜，其能够以准确且容易的方式自动测量样品室内的晶片表面的静电电压，从而在晶片内部和外部具有不同的静电电压来进行快速聚焦。控制光学系统的扫描电子显微镜通过将电极板分成两部分并通过彼此分割获得的电极的切换电位来测量根据分隔电极板的两个部分之间的静电电容的样品的静电电压基于分割电极板的两个部分之间的静电电容的试样的静电电压。电极板用于施加延迟电压并且布置在试样上。

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