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    • 1. 发明授权
    • Laser processing apparatus and method using beam split
    • 激光加工设备和使用光束分割的方法
    • US08329560B2
    • 2012-12-11
    • US12670159
    • 2008-05-06
    • Dong Jun LeeJung Rae ParkHak Yong LeeYoung Hoon Kwon
    • Dong Jun LeeJung Rae ParkHak Yong LeeYoung Hoon Kwon
    • H01L21/30H01L21/461B23K26/36
    • B23K26/067B23K26/0608B23K26/0652B23K26/0676B23K26/0736B23K26/082B23K26/0821B23K26/364B23K26/40B23K2101/40B23K2103/172B23K2103/30B23K2103/50H01L21/268
    • Disclosed are a laser processing apparatus and method that can effectively remove a low-k material formed on a wafer. A laser processing apparatus of the invention is a laser processing apparatus that processes a subject on which a low-k material is formed. The laser processing apparatus includes a laser generating unit that emits a laser beam; and an optical system that splits the laser beam emitted from the laser generating unit into two and irradiates the split laser beams onto the subject In this case, the optical system includes a pair of condensing lenses in which cut surfaces that are cut at a predetermined distance from central axes to be parallel to the central axes contact with each other, and the interval between the two split laser beams is the same as the interval between two edges of the low-k material in a removal subject region. According to the invention, after splitting a laser beam into two laser beams and primarily removing the edges of the low-k material in the removal subject region using the laser beams, the remaining low-k material between the edges is removed. As a result, it is possible to improve processing quality.
    • 公开了一种能够有效地去除在晶片上形成的低k材料的激光加工装置和方法。 本发明的激光加工装置是对形成有低k材料的被摄体进行处理的激光加工装置。 激光加工装置包括发射激光束的激光发生单元; 以及将从激光发生单元发射的激光束分成两部分并将分离的激光束照射到被摄体上的光学系统。在这种情况下,光学系统包括一对聚光透镜,其中以预定距离切割的切割表面 从中心轴平行于中心轴彼此接触,并且两个分离激光束之间的间隔与去除对象区域中的低k材料的两个边缘之间的间隔相同。 根据本发明,在将激光束分成两束激光束并且主要使用激光束去除去除对象区域中的低k材料的边缘之后,边缘之间剩余的低k材料被去除。 结果,可以提高加工质量。
    • 2. 发明授权
    • Magnetic ceramic composition for use in microwave devices, magnetic
ceramics for use in microwave devices, and preparation method therefor
    • 用于微波器件的磁性陶瓷组合物,用于微波器件的磁性陶瓷及其制备方法
    • US5902514A
    • 1999-05-11
    • US903773
    • 1997-07-31
    • Jung-Rae ParkTae-Hong KimSang-Seok LeeTae-Goo Choy
    • Jung-Rae ParkTae-Hong KimSang-Seok LeeTae-Goo Choy
    • C04B35/00C04B35/26C04B35/40C04B35/50H01F1/34
    • C04B35/26H01F1/346
    • A material for microwave band devices used by the general people and in industrial electronic apparatuses is disclosed. Particularly, a magnetic ceramic composition for use in microwave devices, a magnetic ceramics for use in microwave devices and a preparation method therefore are disclosed, in which the saturation magnetization can be easily controlled, and a low ferri-magnetic resonance half line width and an acceptable curie temperature are ensured. The magnetic ceramic composition for microwave devices includes yttrium oxide (Y.sub.2 O.sub.3), iron oxide (Fe.sub.2 O.sub.3), tin oxide (SnO.sub.2), aluminum oxide (Al.sub.2 O.sub.3) and a calcium supply source. The magnetic ceramics for the microwave devices are manufactured by carrying out a forming and a sintering after mixing: yttrium oxide, iron oxide, tin oxide, aluminum oxide and calcium carbonate (or calcium oxide) based on a formula shown below. It has a saturation magnetization of 100-1,800 G at the normal temperature, a temperature coefficient for the saturation magnetization of 0.2%/.degree.C., and a ferri-magnetic resonance half line width of less than 60 Oe, Y.sub.3-x Ca.sub.x/2 Sn.sub.x/2 Fe.sub.5-y Al.sub.y O.sub.12 where 0.1.ltoreq.x.ltoreq.1, and 0.1.ltoreq.y.ltoreq.1.5.
    • 公开了一般用户和工业电子设备中使用的微波带装置的材料。 特别地,公开了一种用于微波器件的磁性陶瓷组合物,用于微波器件的磁性陶瓷及其制备方法,其中可以容易地控制饱和磁化强度,并且低铁磁共振半线宽度和 确保可接受的居里温度。 用于微波器件的磁性陶瓷组合物包括氧化钇(Y 2 O 3),氧化铁(Fe 2 O 3),氧化锡(SnO 2),氧化铝(Al 2 O 3)和钙供应源。 用于微波器件的磁性陶瓷通过以下所示的配方在混合之后进行成形和烧结来制造:氧化钇,氧化铁,氧化锡,氧化铝和碳酸钙(或氧化钙)。 在正常温度下饱和磁化强度为100-1800G,饱和磁化强度的温度系数为0.2%/℃,铁磁共振半线宽度小于60Oe,Y3-xCax / 2Snx / 2Fe5-yAlyO12,其中0.1≤x≤1,0.1≤y≤1.5。
    • 4. 发明申请
    • STRUCTURE HAVING NANOANTENNA AND METHOD FOR MANUFACTURING SAME
    • 具有纳米诺纳的结构及其制造方法
    • US20130317421A1
    • 2013-11-28
    • US13982856
    • 2012-01-31
    • Sung Hoi ChoiJung Rae ParkYoung Keun Kim
    • Sung Hoi ChoiJung Rae ParkYoung Keun Kim
    • A61M5/172H01Q17/00A61M31/00H01P11/00
    • A61M5/1723A61K41/0052A61M31/002H01P11/003H01Q1/22H01Q17/002Y10T29/49016
    • The present invention relates to a structure having a nanoantenna, a method for manufacturing same, a drug delivery body having the same, a thermotherapy complex, a drug therapy device, and a thermotherapy device. The structure of the present invention has a nanoantenna pattern formed on the outer surface of a porous micro-container, thereby enabling wireless control from the outside, and when the structure is used as a drug delivery system and a thermotherapy complex, drug therapy and thermotherapy can be carried out at a desired application region inside a living body at a desired time. Also, the structure of the present invention enables transmission and reception of a wireless signal with an external controller through the nanoantenna, thereby enabling the detection of a signal inside the living body and the transmission of the signal to the external controller, and the discharge of a drug or nanowires according to a response signal transmitted from the external controller.
    • 本发明涉及具有纳米天线的结构,其制造方法,具有该纳米天线的药物递送体,热疗复合物,药物治疗装置和热疗装置。 本发明的结构具有形成在多孔微型容器的外表面上的纳米天线图案,从而能够从外部进行无线控制,并且当该结构用作药物递送系统和热疗复合物时,药物治疗和热疗 可以在期望的时间内在生物体内的期望的应用区域进行。 此外,本发明的结构能够通过天线与外部控制器进行无线信号的发送接收,从而能够检测生物体内部的信号,并将信号发送到外部控制器, 根据从外部控制器发送的响应信号的药物或纳米线。
    • 6. 发明申请
    • LASER PROCESSING APPARATUS AND METHOD USING BEAM SPLIT
    • 激光加工设备和使用光束分离的方法
    • US20100187207A1
    • 2010-07-29
    • US12670159
    • 2008-05-06
    • Dong Jun LeeJung Rae ParkHak Yong LeeYoung Hoon Kwon
    • Dong Jun LeeJung Rae ParkHak Yong LeeYoung Hoon Kwon
    • B23K26/00
    • B23K26/067B23K26/0608B23K26/0652B23K26/0676B23K26/0736B23K26/082B23K26/0821B23K26/364B23K26/40B23K2101/40B23K2103/172B23K2103/30B23K2103/50H01L21/268
    • Disclosed are a laser processing apparatus and method that can effectively remove a low-k material formed on a wafer. A laser processing apparatus of the invention is a laser processing apparatus that processes a subject on which a low-k material is formed. The laser processing apparatus includes a laser generating unit that emits a laser beam; and an optical system that splits the laser beam emitted from the laser generating unit into two and irradiates the split laser beams onto the subject In this case, the optical system includes a pair of condensing lenses in which cut surfaces that are cut at a predetermined distance from central axes to be parallel to the central axes contact with each other, and the interval between the two split laser beams is the same as the interval between two edges of the low-k material in a removal subject region. According to the invention, after splitting a laser beam into two laser beams and primarily removing the edges of the low-k material in the removal subject region using the laser beams, the remaining low-k material between the edges is removed. As a result, it is possible to improve processing quality.
    • 公开了一种能够有效地去除在晶片上形成的低k材料的激光加工装置和方法。 本发明的激光加工装置是对形成有低k材料的被摄体进行处理的激光加工装置。 激光加工装置包括发射激光束的激光发生单元; 以及将从激光发生单元发射的激光束分成两部分并将分离的激光束照射到被摄体上的光学系统。在这种情况下,光学系统包括一对聚光透镜,其中以预定距离切割的切割表面 从中心轴平行于中心轴彼此接触,并且两个分离激光束之间的间隔与去除对象区域中的低k材料的两个边缘之间的间隔相同。 根据本发明,在将激光束分成两束激光束并且主要使用激光束去除去除对象区域中的低k材料的边缘之后,边缘之间剩余的低k材料被去除。 结果,可以提高加工质量。
    • 7. 发明授权
    • Dielectric ceramic composition for microwave
    • 用于微波的介电陶瓷组合物
    • US5750452A
    • 1998-05-12
    • US804280
    • 1997-03-03
    • Jung-Rae ParkTae-Hong KimSuk-Jin LeeTae-Goo Choy
    • Jung-Rae ParkTae-Hong KimSuk-Jin LeeTae-Goo Choy
    • C04B35/46C04B35/462H01B3/12H01P7/10C04B35/468C04B35/472
    • C04B35/462
    • The present invention relates to a dielectric ceramic composition for microwave which consists of BaO, Sm.sub.2 O.sub.3, TiO.sub.2 and PbO, and has a compositional formula of x(Ba.sub.1-.alpha., Pb.sub..alpha.)O-- ySm.sub.2 O.sub.3 -zTiO.sub.2, wherein 6 mol % .ltoreq.x.ltoreq.20 mol %, 6 mol %.ltoreq.y.ltoreq.20 mol %, 60 mol %.ltoreq.z.ltoreq.75 mol % and 0 mol % .ltoreq..alpha..ltoreq.0.2 mol %. Accordingly, since the dielectric ceramic composition for microwave according to the present invention has the dielectric constant more than 85, the temperature factor of the resonant frequency within .+-.5 ppm/.degree.C., and the quality factor more than 6000 in 1 GHz, it can be utilized in the filter for microwave, the dielectric for the resonator, the laminated ceramic capacitor, the dielectric for the filter for electromagnetic wave obstacle and the dielectric for capacitor. And also, since it is possible to reduce the problems to the volatilization of the plumbic oxide and the bismuth oxide, the dielectric ceramic composition for microwave according to the present invention can be made by a general manufacturing process and can reduce the use of the elements detrimental to the human body.
    • 本发明涉及由BaO,Sm2O3,TiO2和PbO组成的微波介电陶瓷组合物,其组成式为x(Ba1-α,Pba)O-ySm2O3-zTiO2,其中6mol% x = 20摩尔%,6摩尔%≤y20摩尔%,60摩尔%≤75摩尔%,0摩尔%≤0.2摩尔%。 因此,由于本发明的微波用电介质陶瓷组合物的介电常数大于85,谐振频率的温度系数在±5ppm /℃以内,1GHz的质量因子大于6000 ,可以用于微波滤波器,谐振器的电介质,层叠陶瓷电容器,用于电磁波障碍物的滤波器的电介质和用于电容器的电介质。 并且,由于可以减少铅酸铅和氧化铋的挥发的问题,根据本发明的微波介电陶瓷组合物可以通过一般的制造方法制造,并且可以减少元素的使用 有害于人体。