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    • 1. 发明授权
    • Single-sided inflatable vertical slit valve
    • 单面充气立式狭缝阀
    • US07422653B2
    • 2008-09-09
    • US10890969
    • 2004-07-13
    • Jeff BlahnikJoe KrausMike Rice
    • Jeff BlahnikJoe KrausMike Rice
    • C23C16/00C23F1/00H01L21/306F16K3/00F16K25/00
    • C23C16/54H01L21/67126
    • A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber housing. The gate valve includes a sealing door located in the processing region and configured to seal the first opening in the chamber housing; a vertical actuator located outside the chamber housing; a one-sided horizontal actuator located within the processing region and connected to the sealing door; and a valve shaft extending through the second opening in the chamber housing and connecting the vertical actuator to the one-sided horizontal actuator.
    • 一种具有闸阀的真空室,该闸阀包括限定内部真空区域的室壳体和通过所述室室的第一和第二开口以及固定到所述室室的闸阀。 闸阀包括位于处理区域中并被构造成密封腔室壳体中的第一开口的密封门; 位于腔室外部的垂直致动器; 位于处理区域内并连接到密封门的单面水平致动器; 以及阀轴,其延伸穿过所述腔室壳体中的所述第二开口并将所述垂直致动器连接到所述单侧水平致动器。
    • 2. 发明申请
    • Single-sided inflatable vertical slit valve
    • 单面充气立式狭缝阀
    • US20060011140A1
    • 2006-01-19
    • US10890969
    • 2004-07-13
    • Jeff BlahnikJoe KrausMike Rice
    • Jeff BlahnikJoe KrausMike Rice
    • C23C16/00
    • C23C16/54H01L21/67126
    • A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber housing. The gate valve includes a sealing door located in the processing region and configured to seal the first opening in the chamber housing; a vertical actuator located outside the chamber housing; a one-sided horizontal actuator located within the processing region and connected to the sealing door; and a valve shaft extending through the second opening in the chamber housing and connecting the vertical actuator to the one-sided horizontal actuator.
    • 一种具有闸阀的真空室,该闸阀包括限定内部真空区域的室壳体和通过所述室室的第一和第二开口以及固定到所述室室的闸阀。 闸阀包括位于处理区域中并被构造成密封腔室壳体中的第一开口的密封门; 位于腔室外部的垂直致动器; 位于处理区域内并连接到密封门的单面水平致动器; 以及阀轴,其延伸穿过所述腔室壳体中的所述第二开口并将所述垂直致动器连接到所述单侧水平致动器。