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    • 1. 发明授权
    • Method of inspecting accuracy in stitching pattern elements
    • 检查拼接图案元素精度的方法
    • US06904164B2
    • 2005-06-07
    • US09860242
    • 2001-05-18
    • Setsuo NoriokaManabu SaitoAkira Tohyama
    • Setsuo NoriokaManabu SaitoAkira Tohyama
    • G06T7/00G06K9/00G06K9/32G06K9/36
    • G06T7/001G06T7/0002G06T7/74G06T2207/30148
    • A method of quickly and accurately inspecting the stitching accuracy at which regions of a lithographic pattern are stitched at boundaries. The numerous regions of the lithographic pattern are exposed or delineated, one at a time. Inspected regions are scanned with a charged-particle beam to detect secondary electrons. The obtained signal is stored as an inspected image in an image memory, together with positional data about the inspected regions. After completion of acceptance of images from all the inspected regions, the inspected image is compared with a separately prepared reference image by an image processing unit. Pattern elements in the inspected regions corresponding to the reference image are extracted. Deviations at field boundaries or the like can be detected from the relative positions of these pattern elements, if any.
    • 快速准确地检查光刻图案的区域在边界处被缝合的缝合精度的方法。 光刻图案的许多区域被暴露或划定,一次一个。 用带电粒子束扫描检查区域以检测二次电子。 所获得的信号与检查区域的位置数据一起作为检查图像存储在图像存储器中。 在完成从所有检查区域的图像的接受之后,将检查图像与图像处理单元单独准备的参考图像进行比较。 提取与参考图像对应的被检查区域中的图案元素。 可以从这些图形元素的相对位置(如果有的话)检测场边界等的偏差。
    • 2. 发明授权
    • Deflection control apparatus for a beam index color television receiver
    • 用于光束折射彩色电视接收机的偏转控制装置
    • US4636843A
    • 1987-01-13
    • US671955
    • 1984-11-16
    • Takashi HosonoAkira Tohyama
    • Takashi HosonoAkira Tohyama
    • H04N9/24H01J29/56H01J29/74H01J29/76
    • H04N9/24
    • Deflection control apparatus for a beam index color television receiver includes a phase-locked loop for synchronizing an oscillating signal with an index signal generated by an electron beam scanning index stripes on the screen of the cathode ray tube of the receiver. The oscillating signal is supplied to a color switcher so that the scanning electron beam is modulated with color information corresponding to the respective color phosphor stripe being scanned. An error signal representative of the horizontal scanning speed of the beam is supplied to a deflection device to cause the generation of a compensating magnetic field to correct for non-linearities in the scanning speed. A compensation circuit delays the error signal so that the elapsed time from the detection of the scanning of one of the index stripes to the time of generation of the compensating magnetic field in accordance therewith equals one horizontal line period.
    • 用于光束折射彩色电视接收机的偏转控制装置包括用于使振荡信号与由接收器的阴极射线管的屏幕上的电子束扫描指数条纹产生的指标信号同步的锁相环。 将振荡信号提供给颜色切换器,使得扫描电子束被调制为与被扫描的各个彩色荧光条相对应的颜色信息。 表示波束的水平扫描速度的误差信号被提供给偏转装置,以产生补偿磁场来校正扫描速度中的非线性。 补偿电路延迟误差信号,使得从检测到索引条之一的扫描到根据其产生补偿磁场的时间的经过时间等于一个水平行周期。