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    • 6. 发明授权
    • Discharge method and apparatus for generating plasmas
    • 用于产生等离子体的放电方法和装置
    • US6059935A
    • 2000-05-09
    • US218572
    • 1998-12-22
    • Paul D. Spence
    • Paul D. Spence
    • B01J19/08H01J37/32
    • H01J37/3244H01J37/32H01J37/32027H01J37/32082H01J37/3277H01J37/32825Y10S422/906
    • Two methods and corresponding electrode designs are provided for the generation of a plasma, for example, at or about one atmosphere. Using these methods, various webs, films and three-dimensional objects are beneficially treated in a reduced amount of time. A first method utilizes a repetitive, asymmetric voltage pulse to generate a plasma discharge between two electrodes. An asymmetric voltage pulse is used to generate a discharge in which a substrate can be exposed predominately to either positive or negative plasma species depending on the voltage polarity used. A second method uses the gap capacitance of an electrode pair and an external inductor in shunt to form a resonant LC circuit. The circuit is driven by a high power radio frequency source operating at 1 to 30 MHz to generate a uniform discharge between the electrode pair. Both methods have temperature controlled discharge surfaces with supply gas temperature, humidity and flow rate control. The gas flow is typically sufficient to cause a turbulent flow field in the discharge region where materials are treated. Electrode pairs implement these methods and include a metal faced electrode and a dielectric covered electrode, one or both of which have a series of holes extending through the electrode face for supply gas flow. The second of the above-described methods will also operate with paired, metal faced electrodes, but under more restricted operating conditions.
    • 提供两种方法和相应的电极设计用于产生等离子体,例如在一个或大约一个大气压下。 使用这些方法,以减少的时间量有利地处理各种网,膜和三维物体。 第一种方法利用重复的非对称电压脉冲在两个电极之间产生等离子体放电。 使用非对称电压脉冲来产生放电,其中基于所使用的电压极性,衬底可以主要暴露于正或负等离子体物质。 第二种方法使用分流器中的电极对和外部电感器的间隙电容来形成谐振LC电路。 该电路由工作于1至30MHz的高功率射频源驱动,以在电极对之间产生均匀的放电。 两种方法都具有温度控制的排放表面,供应气体温度,湿度和流量控制。 气流通常足以在排出区域引起湍流流场,其中材料被处理。 电极对实现这些方法,并且包括金属面电极和电介质覆盖电极,其中一个或两个具有延伸穿过电极面的一系列孔,用于供应气体流动。 上述方法中的第二种也将使用成对的金属面对电极操作,但是在更受限制的操作条件下。