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    • 3. 发明公开
    • 기판 처리 장치
    • 基板处理设备
    • KR1020170108155A
    • 2017-09-26
    • KR1020177024545
    • 2016-01-15
    • 가부시키가이샤 스크린 홀딩스
    • 나카이히토시
    • H01L21/67G01N27/10
    • G01N27/10H01L21/304H01L21/6715H01L21/67051H01L21/67242
    • 기판처리장치의확인부 (67) 는, 검사관로 (671) 와, 도전율취득부 (672) 와, 판단부 (673) 를구비한다. 검사관로 (671) 는, 내주면에있어서길이방향으로각각연장됨과함께둘레방향으로교대로배치되는복수의도전부 (675) 와복수의절연부 (676) 를갖는다. 도전율취득부 (672) 는, 2 개의도전부 (675) 간의도전율을취득한다. 판단부 (673) 는, 도전율취득부 (672) 에의해취득된도전율에기초하여, 검사관로 (671) 내에있어서의처리액 (71) 의존재여부, 또는, 검사관로 (671) 내의처리액 (71) 의종류를판단한다. 확인부 (67) 에서는, 처리액 (71) 의존재여부또는처리액 (71) 의종류를, 비교적긴 검사관로 (671) 의전체길이에걸쳐판단할수 있다. 따라서, 처리액 (71) 의존재여부또는종류확인의정밀도를향상시킬수 있다.
    • 基板处理装置的确认单元67包括检查管炉子671,导电率获取单元672和确定单元673。 检查管式炉671具有多个导电部分675和多个绝缘部分676,多个绝缘部分676在内圆周表面上沿纵向方向延伸并沿圆周方向交替布置。 电导率获得部分672获得两个导电部分675之间的电导率。 在671依赖材料与否,或者,检查员671(在确定单元673,基于由所述导电率获取单元672获得的,由检查员处理液体(71)的导电性处理溶液 它决定的71的类型)。 确认单元67可以在较长的检查管式炉671的整个长度上确定处理液71是依赖的还是处理液71的种类。 因此,可以提高关于是否依赖于处理液体71的确定的准确性。
    • 4. 发明公开
    • 전압 조절 방식을 이용한 가스 센서의 감도 개선 방법
    • 使用电压控制提高气体传感器感应灵敏度的方法
    • KR1020090005899A
    • 2009-01-14
    • KR1020070069317
    • 2007-07-10
    • 한국기계연구원
    • 김준동한창수신동훈
    • G01N27/10G01N27/00B82Y15/00
    • A method for improving sensitivity of a gas sensor is provided to improve the gas reaction property by regulating applied voltage over the specific level. A nano material gas sensor comprises a substrate(11), an insulating layer(12) formed on the top of the substrate, electrodes(13) formed on the insulating layer, a nano material(14) provided between the electrodes, a voltage supplier(2) applying signal voltage between the electrodes, and an electrical characteristic measuring apparatus(3) for measuring the resistance variation. A method for improving sensitivity of the gas sensor comprises a step for adjusting the voltage applied between the electrodes over the specific level through adjustment of Schottky barrier between the electrode and the nano material at the normal temperature and normal pressure in order to maximize the reaction of specific gas about nanotube.
    • 提供了一种提高气体传感器灵敏度的方法,通过调节施加在特定水平上的电压来改善气体反应性能。 纳米材料气体传感器包括基板(11),形成在基板顶部的绝缘层(12),形成在绝缘层上的电极(13),设置在电极之间的纳米材料(14),电压供应器 (2)在电极之间施加信号电压,以及用于测量电阻变化的电特性测量装置(3)。 一种用于提高气体传感器的灵敏度的方法包括通过在正常温度和常压下调节电极和纳米材料之间的肖特基势垒来调节在特定电平之间施加的电压之间的步骤,以使 关于纳米管的比气体。
    • 5. 发明公开
    • 확산식 적외선 가스센서 모듈
    • 使用红外辐射的扩散型气体传感器模块
    • KR1020080093767A
    • 2008-10-22
    • KR1020070037958
    • 2007-04-18
    • 주식회사 가스트론
    • 송찬영
    • G01N27/10G01N21/3504G01N21/35G01N21/00
    • A diffusion-type gas sensor module using infrared rays is provided to accurately measure the concentration of gas in air by forming an infrared ray transmission path for detecting variation in the concentration of gas. A diffusion-type gas sensor module using infrared rays comprises an infrared ray generator(9), an infrared ray transmission path, a sensor part(8), a housing(4), a sensor case(2), a first electric wire(81a), a second electric wire, a third wire(91), and an electric wire through-hole(51). The sensor part generates an output signal for the concentration of target gas in air by detecting infrared rays transmitted through the infrared ray transmission path. The housing has the infrared ray generator on its one end, the sensor part on its other end, and the infrared ray transmission path between its two ends. The sensor case coupled to the other end where the sensor part of the housing is installed has the sensor part. The first and second electric wires connect the sensor part to the infrared ray generator. The electric wire through-hole, wherein the third electric wire is passed, is formed inside the housing.
    • 提供使用红外线的扩散型气体传感器模块,通过形成用于检测气体浓度变化的红外线传输路径来精确地测量空气中的气体浓度。 使用红外线的扩散型气体传感器模块包括红外线发生器(9),红外线传输路径,传感器部分(8),壳体(4),传感器壳体(2),第一电线 81a),第二电线,第三线(91)和电线通孔(51)。 传感器部分通过检测通过红外线传输路径传输的红外线产生用于浓缩目标气体在空气中的输出信号。 壳体的一端具有红外线发生器,另一端具有传感器部分,并且其两端之间的红外线传输路径。 耦合到壳体的传感器部分的另一端的传感器壳体具有传感器部分。 第一和第二电线将传感器部分连接到红外线发生器。 其中第三根电线通过的电线通孔形成在壳体的内部。
    • 6. 发明公开
    • 사용된 전체-손실 실린더 윤활유의 염기성을 판단하는방법과 장치
    • 用于确定使用的全损失润滑剂的基本原理的方法和装置
    • KR1020080072654A
    • 2008-08-06
    • KR1020087011505
    • 2006-10-13
    • 더루우브리졸코오포레이션
    • 보일,프레드릭,피.르보비치,바딤,에프.캄페,피터,브이.
    • G01N27/02G01N27/10G01N33/28
    • G01N33/2876G01N27/02
    • A method and apparatus for determining the total base number of a used lubricant from an open, all loss, lubricating system. An AC voltage signal is applied between electrodes immersed in the used lubricant and a used-lubricant dependent response to the applied signal measured. The used lubricant base number is determined from the response. To allow for changes in the fresh lubricant inputted to the open lubricating system, the method and apparatus can have means for determining properties of the fresh lubricant needed to determine the total base number of used lubricant. To allow for possible contamination of the used lubricant, the method and apparatus can have means for determining the concentration of contamination and for determining properties of the contaminant needed to determine the total base number of used lubricant.
    • 一种用于从开放的全损失润滑系统确定使用的润滑剂的总碱值的方法和装置。 交流电压信号被施加在浸在所使用的润滑剂中的电极和所测量的所施加的信号的依赖于润滑剂的响应之间。 所使用的润滑剂基数由响应决定。 为了允许输入到开放润滑系统的新鲜润滑剂的变化,该方法和装置可以具有确定新鲜润滑剂的性质以确定所使用的润滑剂的总碱值的装置。 为了允许使用润滑剂可能的污染,该方法和装置可以具有确定污染物浓度和确定污染物的性质的方法,以确定所使用的润滑剂的总碱值。
    • 7. 发明授权
    • 수신반까지의 전선의 길이에 적응하여 출력전류를 일정하게조절하는 회로를 가진 가스누설 감지기
    • 气体泄漏检测器,包括电路,用于根据电缆长度控制面板的输出电流
    • KR100778153B1
    • 2007-11-22
    • KR1020060112441
    • 2006-11-14
    • 주식회사 가스트론
    • 송찬영
    • G01N27/12G01N27/10
    • A gas leakage detector is provided to prevent a current signal from being reduced by resistance of the cable by continuously controlling the current signal according to the level of the current signal. A gas leakage detector includes a sensor(110), an A/D converter(120), a controller(130), a memory(150), a current signal converter and adjustor(160), and a power supply(140). The sensor outputs an analog signal according to gas concentration in surrounding air. The A/D converter converts the analog signal to a digital signal. The controller outputs a voltage signal according to the gas concentration calculated from the digital signal, and controls the level of the voltage signal by a feedback signal. The memory stores data required for operation of the controller. The current signal converter and adjustor transmits an analog signal, converted from the voltage signal, to a control panel and generates the feedback signal by comparing a standard voltage signal with a check voltage signal generated by detecting voltage drop between two points of the cable in which the analog signal is transmitted to the control panel.
    • 提供一种气体泄漏检测器,以通过根据电流信号的电平连续控制电流信号来防止电缆的电阻减小电流信号。 一种气体泄漏检测器,包括传感器(110),A / D转换器(120),控制器(130),存储器(150),电流信号转换器和调节器(160)以及电源(140)。 传感器根据周围空气中的气体浓度输出模拟信号。 A / D转换器将模拟信号转换为数字信号。 控制器根据从数字信号计算的气体浓度输出电压信号,并通过反馈信号控制电压信号的电平。 存储器存储控制器操作所需的数据。 电流信号转换器和调节器将从电压信号转换的模拟信号发送到控制面板,并通过将标准电压信号与通过检测电缆两点之间的电压降产生的检查电压信号进行比较来产生反馈信号,其中 模拟信号被传送到控制面板。
    • 9. 发明公开
    • 부스터펌프 시스템의 누수 및 침수 감지방법
    • 增压泵系统中的漏水和溢流检测方法
    • KR20180029634A
    • 2018-03-21
    • KR20160117963
    • 2016-09-13
    • DAEYOUNG POWER PUMP CO LTD
    • KIM DAE HEESONG KYUNG HEE
    • G01N27/10
    • 본발명은급수용부스터펌프시스템에있어서, 펌프의누수혹은침수가발생하였을때에누수와침수를구분하여감지하는시스템및 그방법에관한것이다. 본발명에서해결하고자하는과제는, 부스터펌프시스템에서고가의센서장비없이도저렴한접점센서만을사용하여특정펌프의누수여부를판단할수 있어야하며, 펌프별누수가아닌부스터펌프시스템전체의침수를판단할수 있어야한다. 상기과제를해결하기위해서, 부스터펌프시스템에사용하는베드와각 펌프사이에쟁반형태의고임판을각각삽입하고, 고임판의일측면에접점센서를장착하여고임판에유체가모여서접점센서가이를감지하면해당펌프의누수로판정한다. 또한, 펌프별로삽입된고임판에장착된접점센서가모두접점신호를감지하면, 누수가아닌침수로판정한다. 본발명을통해, 고가의센서없이도저렴한접점센서를이용하여펌프의누수를판단할수 있으며, 이를부스터펌프시스템에적용하는경우에는누수가발생한펌프를특정지을수 있을뿐만아니라, 부스터펌프시스템전체의침수를파악할수 있다는효과가있다.
    • 本发明涉及一种用于在供水增压泵系统中发生泵的泄漏或淹没时区分泄漏水和浸没水的系统和方法。 该问题在本发明中得到解决,从昂贵的传感器仅使用低接触传感器而不设备增压泵系统必须能够判断一个特定泵的泄漏,并且必须能够确定整个增压泵系统的浸水而不是由泵泄漏 的。 为了解决上述问题,在用于增压泵系统的床与每个泵之间插入托盘型高压板,在高压板的一侧安装接触传感器, 如果检测到,则判断为泵泄漏。 此外,如果安装在每个泵插入的虚拟板上的所有接触传感器检测到接触信号,则判断为浸入而不是泄漏。 通过本发明中,昂贵的,并且可以使用低的接触传感器,而不传感器判断所述泵的泄漏,与将其施加到增压泵系统,以及具体的jieulsu泵泄漏,整个增压泵系统的浸没的情况下 可以理解。
    • 10. 发明公开
    • 수질 측정 센서 장치
    • 水质传感器
    • KR20180027970A
    • 2018-03-15
    • KR20160115298
    • 2016-09-07
    • 이수남한희영임현규
    • 이수남한희영임현규
    • G01N27/10G01N3/34G01N33/18
    • G01N27/10G01N3/34G01N33/18
    • 본발명은수질측정센서장치에관한것으로, 센서바디의회전에따라측정센서가회전이동하면서물의수질을측정하게함으로써, 측정센서가고정된상태로물의수질을측정하는것이아니라물속에서이동하면서물의수질을측정하게되므로, 물과의접촉영역이계속변화하게되어물에대한전체평균적인수질측정결과를얻을수 있고수질측정결과의정확도를향상시킬수 있으며, 또한, 측정센서가회전이동함에따라스크래이핑블록에의해측정센서의표면이자동세척되도록함으로써, 주기적으로측정센서를분리하여세척할필요가없이반영구적으로계속사용할수 있는수질측정센서장치를제공한다.
    • 本发明是一种水质量,同时在水中移动时,涉及一种水质传感器装置中,由于传感器是,在旋转的同时移动措施的水根据现有传感器主体组件的质量,而不是测量由测量传感器的水质是固定 由于由seukeuraeyi平块作为与水的接触面积的测定是保持变化获得水的平均水质测量结果和从而可以提高质量测量结果的精度,而且,测量传感器的旋转运动 测量传感器的表面被自动清洁,从而提供水质传感器装置,其可以半永久地使用,而不需要周期性地移除测量传感器并对其进行清洁。