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1. 发明授权

KR101881905B1 표시 장치 및 그 제조방법 有权
公开(公告)号：KR101881905B1
公开(公告)日：2018-07-26
申请号：KR1020167024321
申请日：2014-11-21
申请人： 가부시키가이샤 한도오따이 에네루기 켄큐쇼
发明人： 야마자키슌페이 , 오노마사카츠 , 아다치히로키 , 이도지리사토루 , 타케시마코이치
IPC分类号： H01L51/56 , H01L51/00 , H01L27/32 , H01L51/50
CPC分类号： H01L27/3272 , B23K26/04 , B23K26/0617 , B23K26/0622 , B23K26/0643 , B23K26/0648 , B23K26/083 , H01L27/1225 , H01L27/1266 , H01L27/322 , H01L27/3244 , H01L27/3258 , H01L27/3262 , H01L29/24 , H01L29/66969 , H01L29/78603 , H01L29/7869 , H01L41/314 , H01L51/0024 , H01L51/0027 , H01L51/003 , H01L51/0097 , H01L51/5096 , H01L51/5246 , H01L51/5253 , H01L51/5284 , H01L51/56 , H01L2227/323 , H01L2227/326 , H01L2251/5338 , H01L2251/558 , Y02E10/549 , Y02P70/521
摘要： 제 1 유기수지층이제 1 기판위에형성되고, 상기제 1 유기수지층위에제 1 절연막이형성되며, 상기제 1 절연막위에제 1 소자층이형성되고, 제 2 기판위에제 2 유기수지층이형성되며, 제 2 유기수지층위에제 2 절연막이형성되고, 제 2 절연막위에제 2 소자층이형성되며, 제 1 기판과제 2 기판이접착되고, 제 1 분리단계에서는제 1 유기수지층과제 1 기판사이의밀착성이감소되며, 제 1 유기수지층과제 1 가요성기판이제 1 접착층으로접착되고, 제 2 분리단계에서는제 2 유기수지층과상기제 2 기판사이의밀착성이감소되며, 상기제 2 유기수지층과제 2 가요성기판이제 2 접착층으로접착된다.

2. 发明公开

KR1020160106224A 표시 장치 및 그 제조방법 审中-实审
标题翻译：显示装置及其制造方法
公开(公告)号：KR1020160106224A
公开(公告)日：2016-09-09
申请号：KR1020167024321
申请日：2014-11-21
申请人： 가부시키가이샤 한도오따이 에네루기 켄큐쇼
发明人： 야마자키슌페이 , 오노마사카츠 , 아다치히로키 , 이도지리사토루 , 타케시마코이치
IPC分类号： H01L51/56 , H01L51/00 , H01L27/32 , H01L51/50
CPC分类号： H01L27/3272 , B23K26/04 , B23K26/0617 , B23K26/0622 , B23K26/0643 , B23K26/0648 , B23K26/083 , H01L27/1225 , H01L27/1266 , H01L27/322 , H01L27/3244 , H01L27/3258 , H01L27/3262 , H01L29/24 , H01L29/66969 , H01L29/78603 , H01L29/7869 , H01L41/314 , H01L51/0024 , H01L51/0027 , H01L51/003 , H01L51/0097 , H01L51/5096 , H01L51/5246 , H01L51/5253 , H01L51/5284 , H01L51/56 , H01L2227/323 , H01L2227/326 , H01L2251/5338 , H01L2251/558 , Y02E10/549 , Y02P70/521
摘要： 제 1 유기수지층이제 1 기판위에형성되고, 상기제 1 유기수지층위에제 1 절연막이형성되며, 상기제 1 절연막위에제 1 소자층이형성되고, 제 2 기판위에제 2 유기수지층이형성되며, 제 2 유기수지층위에제 2 절연막이형성되고, 제 2 절연막위에제 2 소자층이형성되며, 제 1 기판과제 2 기판이접착되고, 제 1 분리단계에서는제 1 유기수지층과제 1 기판사이의밀착성이감소되며, 제 1 유기수지층과제 1 가요성기판이제 1 접착층으로접착되고, 제 2 분리단계에서는제 2 유기수지층과상기제 2 기판사이의밀착성이감소되며, 상기제 2 유기수지층과제 2 가요성기판이제 2 접착층으로접착된다.
摘要翻译：在第一基板上形成第一有机树脂层; 在第一有机树脂层上形成第一绝缘膜; 第一元件层形成在第一绝缘膜上; 在第二基板上形成第二有机树脂层; 在第二有机树脂层上形成第二绝缘膜; 第二元件层形成在第二绝缘膜上; 第一基板和第二基板接合; 第一分离步骤，其中第一有机树脂层和第一基板之间的粘合力减小; 第一有机树脂层和第一柔性基板与第一接合层接合; 第二分离步骤，其中所述第二有机树脂层和所述第二基板之间的粘合减小; 并且第二有机树脂层和第二柔性基板与第二接合层接合。

3. 发明公开

KR1020150052412A 기판 처리 장치 및 이를 이용한 기판 처리 방법 审中-实审
标题翻译：用于处理基板的装置和使用该基板处理基板的方法
公开(公告)号：KR1020150052412A
公开(公告)日：2015-05-14
申请号：KR1020130133010
申请日：2013-11-04
申请人： 삼성디스플레이 주식회사
发明人： 한경희
IPC分类号： G09F9/00
CPC分类号： H01L51/0027 , B23K26/10 , B23K2201/40 , G02F1/1303 , H01L51/0015 , H01L51/56
摘要： 기판처리장치및 기판처리방법이제공된다. 본발명의일 실시예에따른기판처리장치는하부를향해개방된개구를갖는챔버, 개구를개폐하는도어, 챔버의외부에개구와대향되게배치되는레이저조사장치, 개구와레이저조사장치사이에개재되는커버글래스, 개구의외주와인접하며, 서로대향되게배치되는제1 전극플레이트및 제2 전극플레이트를포함한다.
摘要翻译：提供了一种处理基板的装置和方法。根据本发明的处理基板的装置包括具有向下开口的开口的室，打开/关闭开口的门，面向室外的开口的激光照射装置，夹在玻璃之间的盖玻璃开口和激光照射装置以及与开口的外部相邻并且彼此面对的第一电极板和第二电极板。

4. 发明公开

KR1020140065146A 유기 발광 소자의 리페어 장치 및 방법 有权
标题翻译：用于修复有机发光装置的装置和方法
公开(公告)号：KR1020140065146A
公开(公告)日：2014-05-29
申请号：KR1020120132330
申请日：2012-11-21
申请人： 참엔지니어링(주)
发明人： 김현정
IPC分类号： H01L51/56 , H05B33/10
CPC分类号： H01L51/56 , H01L51/0013 , H01L51/0027 , H05B33/10
摘要： The present invention is related to an apparatus for repairing an organic light emitting device, which includes a donor film including a transfer layer and a light-to-heat conversion layer formed on a support layer, a roll which winds the donor film, and a light source which emits light to the donor film, and to a repairing method for transferring the transfer layer of the donor film on a defective pixel of the organic light emitting device using the apparatus.
摘要翻译：本发明涉及一种用于修复有机发光器件的装置，其包括施主膜，该施主膜包括转印层和形成在支撑层上的光热转换层，卷绕供体膜的辊和向供体膜发光的光源以及使用该装置将施主膜的转印层转印到有机发光元件的缺陷像素上的修复方法。

5. 发明公开

KR1020080110683A 도포 장치, 유기 재료 박막의 형성 방법, 유기 ＥＬ 패널 제조 장치 无效
标题翻译：涂料设备，有机材料薄膜成型方法和有机EL面板制造设备
公开(公告)号：KR1020080110683A
公开(公告)日：2008-12-18
申请号：KR1020087028043
申请日：2005-12-13
申请人： 가부시키가이샤 알박
发明人： 네기시도시오
IPC分类号： H05B33/10
CPC分类号： B41J11/002 , H01L51/0005 , H01L51/0027 , H01L51/56 , H01L51/0015 , H01L2924/12044
摘要： A coating apparatus which does not require a heating chamber nor a cooling chamber is provided. An object (14) to be coated moves in an X axis direction, and on the object, an ejector (31) and laser irradiation apparatuses (32a, 32b), which can reciprocate in a Y axis direction, are arranged. An organic material ejected on a part of the surface of the object (14) from the ejector (31) is irradiated with laser beams, dried or polymerized by heating, and formed into a thin film. Moving of the ejector (31) and the laser irradiation apparatuses (32a, 32b) in the Y axis direction and moving of the object (14) in the X axis direction are repeatedly performed, and a thin film made of the organic material is formed on a prescribed region of the object (14). Since coating and laser beam irradiation can be performed parallel, operation efficiency is high. Further, since the temperature of the object (14) does not become high, a cooling process is not required. ® KIPO & WIPO 2009
摘要翻译：提供不需要加热室和冷却室的涂布装置。待涂覆的物体（14）沿X轴方向移动，并且在物体上设置能够沿Y轴方向往复运动的喷射器（31）和激光照射装置（32a，32b）。用喷射器（31）在物体（14）的一部分表面喷射的有机材料用激光照射，通过加热干燥或聚合，并形成薄膜。喷射器（31）和激光照射装置（32a，32b）沿Y轴方向的移动和物体（14）在X轴方向上的移动被重复地进行，并且形成由有机材料制成的薄膜在物体（14）的规定区域上。由于可以并行地进行涂布和激光束照射，因此操作效率高。此外，由于物体（14）的温度不高，因此不需要冷却处理。 ®KIPO＆WIPO 2009

6. 发明公开

KR1020080101658A ＳＯＩ 기판의 제작 방법, 및 반도체 장치의 제작 방법 有权
标题翻译： SOI衬底的制造方法和半导体器件的制造方法
公开(公告)号：KR1020080101658A
公开(公告)日：2008-11-21
申请号：KR1020080029033
申请日：2008-03-28
申请人： 가부시키가이샤 한도오따이 에네루기 켄큐쇼
发明人： 미야이리히데까즈 , 시모무라아키히사 , 미조이타츠야 , 히가에이지 , 나가노요지
IPC分类号： H01L27/12
CPC分类号： H01L27/1203 , H01L21/76254 , H01L27/1214 , H01L27/1266 , H01L29/78654 , H01L51/0027 , H01L2224/03552
摘要： A manufacturing method of SOI substrate and a manufacturing method of semiconductor device are provided to improve the value of the semiconductor device by thinning the semiconductor layer after irradiating the laser beam. The manufacturing method of the SOI substrate includes the step of forming the ion implantation layer(113) within the semiconductor substrate by injecting the ion beam into the semiconductor substrate(111); the step of forming the ion implantation layer within the semiconductor substrate; the step of forming the junction layer(114) on the semiconductor substrate; the step of welding to the base substrate(101) with the semiconductor substrate; the step of leaving the semiconductor layer on the base substrate by heating up the semiconductor substrate and the base substrate; the step of irradiating the laser light onto the semiconductor layer; the step of thinning the semiconductor layer by etching the semiconductor layer.
摘要翻译：提供SOI衬底的制造方法和半导体器件的制造方法，以在照射激光束之后通过使半导体层变薄来提高半导体器件的值。 SOI衬底的制造方法包括通过将离子束注入半导体衬底（111）而在半导体衬底内形成离子注入层（113）的步骤; 在半导体衬底内形成离子注入层的步骤; 在所述半导体衬底上形成所述结层（114）的步骤; 用半导体衬底焊接到基底衬底（101）的步骤; 通过加热半导体衬底和基底衬底将半导体层留在基底衬底上的步骤; 将激光照射到半导体层上的步骤; 通过蚀刻半导体层来稀释半导体层的步骤。

7. 发明授权

KR100776473B1 유기 전계 발광표시장치의 제조방법 有权
标题翻译：有机发光显示方法
公开(公告)号：KR100776473B1
公开(公告)日：2007-11-16
申请号：KR1020060072587
申请日：2006-08-01
申请人： 삼성에스디아이 주식회사
发明人： 송명원 , 김무현
IPC分类号： H05B33/10
CPC分类号： H01L51/5056 , H01L51/0013 , H01L51/0015 , H01L51/0027 , H01L51/56
摘要： A manufacturing method of an organic light emitting display is provided to improve light emitting efficiency by preventing the thermal and mechanical damage of a hole transport material layer. A manufacturing method of an organic light emitting display includes the steps of: preparing a substrate with a pixel electrode; forming a hole transport material layer(220) on the substrate; annealing the hole transport material layer; preparing a donor film(270) which includes a base substrate(260) on the upper part of the substrate, a photo-thermal converting layer(250) formed on the base substrate, and a transfer layer formed on the photo-thermal converting layer; arranging the transfer layer of the donor film to face the hole transport material layer of the substrate; and transferring the transfer layer on the hole transport material of the substrate by irradiating laser on an area which corresponds to the hole transport material layer of the donor film.
摘要翻译：提供有机发光显示器的制造方法，以通过防止空穴传输材料层的热和机械损伤来提高发光效率。有机发光显示器的制造方法包括以下步骤：准备具有像素电极的基板; 在所述基板上形成空穴传输材料层（220）; 退火空穴传输材料层; 制备施主膜（270），其在基板的上部包括基底（260），形成在基底基板上的光热转换层（250）和形成在光热转换层 ; 将施主膜的转印层布置成与基板的空穴传输材料层相对; 以及通过在对应于施主膜的空穴传输材料层的区域上照射激光将转印层转印到基板的空穴传输材料上。

8. 发明公开

KR1020070024820A 레이저 열전사 장치 및 이를 이용한 유기발광소자의제조방법 失效
标题翻译：激光诱导热成像装置及其使用的有机发光装置的制备方法
公开(公告)号：KR1020070024820A
公开(公告)日：2007-03-08
申请号：KR1020050080345
申请日：2005-08-30
申请人： 삼성에스디아이 주식회사
发明人： 노석원 , 이성택 , 김무현 , 성진욱 , 송명원 , 김선호
IPC分类号： H05B33/10
CPC分类号： H01L51/0013 , H01L51/0027 , H01L51/5016 , H01L51/56 , H01L2924/12044
摘要： A laser induced thermal imaging apparatus and a method of manufacturing an organic light emitting diode using the same are provided to facilitate thermal imaging of a light emitting layer of the OLED by preventing pores from being formed between an acceptor substrate and a donor film. A LITI(Laser Induced Thermal Imaging) apparatus forms a light emitting layer of an OLED(Organic Light Emitting Diode). The LITI apparatus includes a substrate stage(110), a laser resonator(120), an attachment frame(130), and an attachment frame conveyor unit(140). An acceptor substrate and a donor film are sequentially moved to the substrate stage which includes a magnet. A pixel defining region is formed on the acceptor substrate. The laser resonator irradiates a laser on the donor film. The attachment frame is arranged between the substrate stage and the laser resonator and includes an aperture and a magnet. The laser passes through the aperture. The magnet generates a magnetic force with respect to the substrate stage. The attachment frame conveyor unit reciprocally moves the attachment frame toward the substrate stage. A first attachment frame unit having a first aperture and a second attachment frame unit having a second aperture are alternatively mounted on the substrate stage. The first aperture forms first and second sub-pixels. The second aperture forms two third sub-pixels.
摘要翻译：提供激光感应热成像装置和使用其的有机发光二极管的制造方法，以便于通过防止在受主衬底和供体膜之间形成孔而促进OLED的发光层的热成像。 LITI（激光诱导热成像）装置形成OLED（有机发光二极管）的发光层。 LITI装置包括衬底台（110），激光谐振器（120），附接框架（130）和附接框架输送单元（140）。接受体基板和施主膜依次移动到包括磁体的基板台上。在受主基板上形成像素限定区域。激光谐振器在供体膜上照射激光。附接框架布置在基板台和激光谐振器之间，并且包括孔和磁体。激光穿过光圈。磁体相对于基板台产生磁力。附接框架输送单元将附接框架往复地移动到基板台。具有第一孔的第一附接框架单元和具有第二孔的第二附接框架单元交替地安装在基板台上。第一光圈形成第一和第二子像素。第二孔形成两个第三子像素。

9. 发明公开

KR1020070024816A 레이저 열전사 장치 및 이를 이용한 유기발광소자의제조방법 有权
标题翻译：激光诱导热成像装置及其使用的有机发光装置的制备方法
公开(公告)号：KR1020070024816A
公开(公告)日：2007-03-08
申请号：KR1020050080340
申请日：2005-08-30
申请人： 삼성에스디아이 주식회사
发明人： 노석원 , 강태민 , 김진수
IPC分类号： H05B33/10
CPC分类号： H01L51/0013 , H01L51/0027 , H01L51/56 , H01L2924/12044
摘要： A laser induced thermal imaging apparatus and a method of manufacturing an organic light emitting device using the same are provided to perform a manufacturing process at a vacuum condition by laminating an interface between a donor film and an acceptor substrate at the vacuum condition. A conveyor unit is arranged outside a chamber(610). The conveyor unit conveys a donor film having a permanent magnet and an acceptor substrate. A substrate stage(620) including at least one electromagnet is arranged under the chamber. The electromagnets are arranged in co-centric circles or plural rows and columns. The substrate stage includes mounting units which receive the acceptor substrate and the donor film. The mounting units mount the acceptor substrate on the required position. A laser oscillator(630) is installed inside or outside the chamber to throw the laser from the upper portion and includes two galvanometer scanners, a scan lens, and a cylinder lens..
摘要翻译：提供激光诱导热成像装置和使用其的有机发光装置的制造方法，以在真空状态下通过在真空条件下层叠施主膜和受主基板之间的界面来进行制造过程。输送单元布置在室（610）的外部。输送单元输送具有永磁体和受主衬底的施主膜。包括至少一个电磁体的衬底台（620）布置在室下方。电磁铁排列成同心圆或多行和列。衬底台包括接收受体衬底和施主膜的安装单元。安装单元将接收器基板安装在所需位置。激光振荡器（630）安装在室内或室外以从上部抛出激光，并包括两个电流计扫描仪，扫描透镜和圆柱透镜。

10. 发明授权

KR100673758B1 탈가스 포집부가 구비된 도너 필름 및 이의 제조방법 有权
标题翻译：带气体跟踪层的透明膜及其制造方法
公开(公告)号：KR100673758B1
公开(公告)日：2007-01-24
申请号：KR1020050085410
申请日：2005-09-13
申请人： 삼성에스디아이 주식회사
发明人： 성진욱 , 김무현 , 노석원 , 김선호
IPC分类号： H05B33/10
CPC分类号： H01L51/0013 , H01L51/0027 , H01L51/56 , H01L2924/12044
摘要： A donor film with an out-gas trapping layer and a method for manufacturing the same are provided to reduce a defective proportion of products and to manufacture a high quality transferring layer by trapping an out-gas generated by heat in a transferring process and to prevent the out-gas from being transmitted to a transferring layer. A donor film(3) with an out-gas trapping layer includes a base material layer(31), a photo-thermal converting layer(33) provided on the base material layer(31), an out-gas trapping layer(34) provided on the photo-thermal converting layer(33), and a transferring layer(35) provided on the out-gas trapping layer(34). The out-gas trapping layer(34) includes a porous out-gas trapping unit. The out-gas trapping layer(34) is made of porous material. The out-gas trapping layer(34) has a plurality of vent holes(P) of 1 to 50 nm, and has a thickness less than 1 micrometer. The out-gap trapping layer(34) is made of a ceramic or a metal.
摘要翻译：提供具有外部气体捕获层的供体膜及其制造方法，以减少产品的不良比例并通过在转印过程中捕集由热产生的外部气体来制造高质量的转印层并防止输出气体被传送到转移层。具有外部气体捕获层的施主膜（3）包括基材层（31），设置在基材层（31）上的光热转换层（33），外部气体捕获层（34）设置在光热转换层（33）上，以及设置在外气捕获层（34）上的转印层（35）。废气捕集层（34）包括多孔的外气捕获单元。废气捕集层（34）由多孔材料制成。外气捕获层（34）具有1〜50nm的多个通气孔（P），其厚度小于1微米。外部间隙捕获层（34）由陶瓷或金属制成。

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