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1. 发明公开

KR1020120053205A 클램프 압력측정 장치 无效
标题翻译：测量钳位预测的装置
公开(公告)号：KR1020120053205A
公开(公告)日：2012-05-25
申请号：KR1020100114362
申请日：2010-11-17
申请人： 엘지디스플레이 주식회사
发明人： 이명연 , 이제섭
IPC分类号： G02F1/13
CPC分类号： G02F1/1303 , H01L21/687 , H01L2224/7692
摘要： PURPOSE: A clamp pressure measuring device is provided to precisely measure pressure with which a clamp pressurizes a substrate. CONSTITUTION: A sensor unit(121) senses pressure made by a clamp. A circuit unit(126) generates a sensing signal corresponding to pressure applied to the sensing unit. A data display unit(127) receives the sensing signal from the circuit unit. The data display unit displays pressure made by the clamp using the inputted sensing signal. The sensor unit includes elements. The resistances of the elements are varied according to pressure made by the clamp.
摘要翻译：目的：提供夹紧压力测量装置，以精确测量夹具对基板加压的压力。构成：传感器单元（121）感测由夹具产生的压力。电路单元（126）产生对应于施加到感测单元的压力的感测信号。数据显示单元（127）从电路单元接收感测信号。数据显示单元使用输入的感测信号显示由夹具产生的压力。传感器单元包括元件。元件的电阻根据夹具的压力而变化。

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