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    • 5. 发明授权
    • 고밀도 3차원 집적 커패시터
    • 高密度三维集成电容器
    • KR101108947B1
    • 2012-02-08
    • KR1020110026686
    • 2011-03-25
    • 테세라, 인코포레이티드
    • 오가네시안베이그하바벨가셈모하메드일야스사발리아피유시
    • H01G4/12H01L27/02
    • H01L28/91H01L23/481H01L28/60H01L2223/6622H01L2924/0002H01L2924/09701H01L2924/00
    • PURPOSE: A 3D integrated capacitor with high density is provided to remove a noise and reduce inductance by connecting a ground plane to an external ground layer through a trace and via. CONSTITUTION: A substrate(20) has a first surface(21), a second surface(22), and a through opening(30) extended between the first surface and the second surface. A first metal element is exposed to the first surface and is extended to the through opening. A first electrode(63) is connected to the first metal element. A second metal element is exposed to the second surface and is extended to the through opening. A second electrode(73) is connected to the second metal element. A capacitor dielectric layer separates and insulates the first metal element from the second metal element. A dielectric area(90) is located on the dielectric layer and a plate(60,70).
    • 目的:提供高密度的3D集成电容器,以通过迹线和通孔将接地平面连接到外部接地层来消除噪声并降低电感。 构成:衬底(20)具有在第一表面和第二表面之间延伸的第一表面(21),第二表面(22)和通孔(30)。 第一金属元件暴露于第一表面并延伸到通孔。 第一电极(63)连接到第一金属元件。 第二金属元件暴露于第二表面并延伸到通孔。 第二电极(73)连接到第二金属元件。 电容器电介质层将第一金属元件与第二金属元件隔离并绝缘。 电介质区域(90)位于电介质层和板(60,70)上。