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    • 3. 发明公开
    • 건식법에 의한 알루미늄 에칭박 제조 기술
    • 干式铝蚀刻箔制造技术
    • KR1020020063379A
    • 2002-08-03
    • KR1020010004005
    • 2001-01-29
    • (주)씨이드
    • 김종민
    • C23F1/36
    • C23F4/00H01G2009/0408H01G2009/0416
    • PURPOSE: A technology is provided which manufactures etching foil for an electrolytic capacitor by forming aluminum etching foil not using chemical conversion solution but using RF plasma in aluminum foil etching. CONSTITUTION: The dry type aluminum etching foil manufacturing technology is characterized in that contamination by other gases can be minimized when initial base pressure is 2x10¬-7 torr, gases (Ar and O2) are injected until working pressure becomes 4x10¬-5 torr, an antenna is wound around a quartz tube to generate plasma as an ICP type plasma source, RF power is impressed to the antenna to generate an RF ion source as a water cooling type, RF power for generating plasma uses frequency of 13.56 MHz, size of an ion gun is a diameter of 350 mm, a grid is installed to accelerate ions, ion energy is 500 to 1500 eV, ion current is 900 mA, gas flow rate is 8 to 25 mA, the RF ion source is positioned left and right sides around a circular foil to etch both sides of the circular foil, and a roll etching system comprises a winding system for continuously etching a roll shaped aluminum film having a width of 30 cm, a tension system and a control system, wherein the roll etching system is fabricated in such a manner that the aluminum film can be wound and rewound in a proper transfer speed during etching and further comprises a guide roll system to prevent crimple of the film.
    • 目的:提供一种技术,通过形成不使用化学转化解决方案的铝蚀刻箔,但在铝箔蚀刻中使用RF等离子体,制造用于电解电容器的蚀刻箔。 构造:干式铝蚀刻箔制造技术的特征在于,当初始基底压力为2×10 -7 torr时,其他气体的污染可以最小化,气体(Ar和O 2)被注入,直到工作压力变为4×10 -5 torr, 将天线缠绕在石英管周围以产生等离子体作为ICP型等离子体源,向天线施加RF功率以产生作为水冷式的RF离子源,用于产生等离子体的RF功率使用13.56MHz的频率, 离子枪的直径为350mm,安装栅格加速离子,离子能量为500〜1500eV,离子电流为900mA,气体流量为8〜25mA,射频离子源位于左右两侧 围绕圆形箔来蚀刻圆形箔的两侧,并且辊蚀刻系统包括用于连续蚀刻宽度为30cm的卷状铝膜的卷绕系统,张力系统和控制系统,其中辊蚀刻 系统是fabr 以能够在蚀刻期间以适当的转印速度卷绕和重绕铝膜的方式进一步制成,并且还包括导辊系统以防止卷曲。