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    • 3. 发明公开
    • 입자량 평가 장치와 딥식 세정 시스템 및 입자 부착량평가 방법
    • 颗粒数量评估装置和DIP类型洗涤系统和颗粒物数量评估方法
    • KR1020010006829A
    • 2001-01-26
    • KR1020000013957
    • 2000-03-20
    • 가부시끼가이샤 한도따이 센단 테크놀로지스
    • 도이미노루
    • H01L21/304
    • H01L21/67253B08B3/00B08B3/04G01N1/38G01N15/06G01N2015/0675H01L21/67057Y10S134/902
    • PURPOSE: To realize quantitative evaluation of actual particle-stuck quantity in liquid with high accuracy and washing degree evaluation with low cost and high reliability without using a monitor substrate. CONSTITUTION: This device is provided with a residual liquid recovering pan 12 for recovering residual liquid, and a residual liquid quantitative measuring tank 13 for in-liquid particle measurement are installed between a first substrate treating tank 20A and a second substrate treating tank 20B. The residual liquid dropped from a substrate 60, when the substrate 60 is conveyed from the first substrate treating tank 20A to the second substrate treating tank 20B by using a substrate conveying means 50, is recovered by a residual liquid recovering pan 12 and the residual liquid quantitative measuring tank 13 to form sample liquid. The sample liquid is diluted with pure water from a pure water supply source 30 in a pure water quantitative tank 14 by a fixed quantity for measuring by an in-liquid particle measuring instrument 40.
    • 目的:在不使用显示器基板的情况下,以低成本,高可靠性实现高精度,高洗涤度评估液体中实际颗粒物吸收量的定量评估。 构成:该装置具有用于回收残余液体的残留液体回收盘12,并且在第一基板处理槽20A和第二基板处理槽20B之间安装用于液体内颗粒测量的残余液体定量测量槽13。 当基板60从基板处理槽20A通过基板输送装置50从第一基板处理槽20A输送到第二基板处理槽20B时,残留液体从残留液体回收盘12回收,残留液体 定量测量罐13以形成样品液体。 将样品液体用纯水从纯水定量槽14中的纯水供应源30中以固定量稀释,用于通过液体内颗粒测量仪40进行测量。