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    • 10. 发明公开
    • 잉크제트헤드
    • 墨水喷头
    • KR1020000016488A
    • 2000-03-25
    • KR1019980710073
    • 1998-04-14
    • 파나소닉 주식회사
    • 간노이사쿠후지이사토루다카야마료이치가마다다케시
    • B41J2/045
    • B41J2/1623B41J2/14233B41J2/161B41J2/1629B41J2/1632B41J2/1642B41J2/1643B41J2/1645B41J2/1646B41J2002/1425B41J2002/14258B41J2002/14379B41J2202/03
    • PURPOSE: An ink jet head is provided to be equipped with an outlet formed in a high density, by being able to minutely process normally used in the processing a semiconductor by filming a piezoelectric body or a vibrating body composing a piezoelectric element. CONSTITUTION: An ink jet head(100) is equipped:many outlets(2); a compressing room(1) installed to correspond to each outlet(2); a piezoelectric element(3) installed in the compressing room(1); the outlets(2) formed at regular intervals in the side of a main body unit(52); the compressing room(1) abreast formed with the main body unit(50) to correspond each outlet(2); an ink passage(2a) formed in the main body unit(50) connected with the compressing room(1) corresponding to the outlet(2); an opening unit(51) formed corresponding to the compressing room(1) in the upper face of the main body unit(50); the vibrating plate(4) formed to interrupt the opening unit(51) in the upper face of the main body unit(50); and the piezoelectric element(3) to located on the opening(51) corresponding to the compressing room(1) on the vibrating plate(4).
    • 目的:提供一种喷墨头,其配备有以高密度形成的出口,能够通过将压电体或构成压电元件的振动体成膜来对半导体的加工进行通常的处理。 构成:喷墨头(100)配备有许多出口(2); 安装成对应于每个出口(2)的压缩室(1); 安装在压缩室(1)中的压电元件(3); 在主体单元(52)侧形成为规则间隔的出口(2); 与主体单元(50)形成的压缩室(1)对应于每个出口(2); 形成在与出口(2)对应的压缩室(1)连接的主体单元(50)中的墨水通道(2a) 在主体单元(50)的上表面形成与压缩室(1)相对应的开口单元(51); 所述振动板(4)形成为中断所述主体单元(50)的上表面中的开口单元(51); 以及位于与振动板(4)上的压缩室(1)对应的开口(51)上的压电元件(3)。