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    • 1. 发明授权
    • METHOD FOR FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD
    • 喷嘴头压电致动器的制作方法
    • KR100682964B1
    • 2007-02-08
    • KR20060012598
    • 2006-02-09
    • SAMSUNG ELECTRONICS CO LTD
    • LIM SEUNG MOLEE KYO YEOLCHUNG JAE WOOLEE HWA SUNLEE JAE CHANG
    • B41J2/045B41J2/055B41J2/135B41J2/14B41J2/16H01L41/09H01L41/187H01L41/22H01L41/29H01L41/314H01L41/337H02N2/00
    • B41J2/161B41J2/1631B41J2/1645B41J2/1646B41J2002/1425Y10T29/42Y10T29/435Y10T29/49401
    • A method for forming a piezoelectric actuator of an ink-jet head is provided to form a uniform electric field with a constant distance between an upper electrode and a lower electrode by uniformly controlling shape, size, and thickness of the upper electrode. A method for forming a piezoelectric actuator of an ink-jet head includes the steps of forming a lower electrode(141) on an upper part of a vibration plate(120), forming a piezoelectric layer(142) in a location corresponding to each of a plurality of pressure chambers(113) on the lower electrode, forming a protection layer(150) covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer with reducing thicknesses of the protection layer and the piezoelectric layer, forming an upper electrode(143) on the upper surface of the piezoelectric layer, and removing the protection layer. The ink-jet head is formed on the upper part of the vibration plate, and provides a driving force for ink discharge to each of the plurality of pressure chambers.
    • 提供一种用于形成喷墨头的压电致动器的方法,通过均匀地控制上电极的形状,尺寸和厚度,形成上电极和下电极之间具有恒定距离的均匀电场。 一种用于形成喷墨头的压电致动器的方法包括以下步骤:在振动板(120)的上部形成下电极(141),在对应于每一个的位置形成压电层(142) 形成在下部电极上的多个压力室,形成覆盖下部电极和压电体层的保护层,使保护层和压电体层的厚度减小而使压电体层的上表面露出,形成 在所述压电层的上表面上的上电极(143),并且去除所述保护层。 喷墨头形成在振动板的上部,并且为多个压力室中的每一个提供用于喷墨的驱动力。
    • 6. 发明公开
    • 잉크제트헤드
    • 墨水喷头
    • KR1020000016488A
    • 2000-03-25
    • KR1019980710073
    • 1998-04-14
    • 파나소닉 주식회사
    • 간노이사쿠후지이사토루다카야마료이치가마다다케시
    • B41J2/045
    • B41J2/1623B41J2/14233B41J2/161B41J2/1629B41J2/1632B41J2/1642B41J2/1643B41J2/1645B41J2/1646B41J2002/1425B41J2002/14258B41J2002/14379B41J2202/03
    • PURPOSE: An ink jet head is provided to be equipped with an outlet formed in a high density, by being able to minutely process normally used in the processing a semiconductor by filming a piezoelectric body or a vibrating body composing a piezoelectric element. CONSTITUTION: An ink jet head(100) is equipped:many outlets(2); a compressing room(1) installed to correspond to each outlet(2); a piezoelectric element(3) installed in the compressing room(1); the outlets(2) formed at regular intervals in the side of a main body unit(52); the compressing room(1) abreast formed with the main body unit(50) to correspond each outlet(2); an ink passage(2a) formed in the main body unit(50) connected with the compressing room(1) corresponding to the outlet(2); an opening unit(51) formed corresponding to the compressing room(1) in the upper face of the main body unit(50); the vibrating plate(4) formed to interrupt the opening unit(51) in the upper face of the main body unit(50); and the piezoelectric element(3) to located on the opening(51) corresponding to the compressing room(1) on the vibrating plate(4).
    • 目的:提供一种喷墨头,其配备有以高密度形成的出口,能够通过将压电体或构成压电元件的振动体成膜来对半导体的加工进行通常的处理。 构成:喷墨头(100)配备有许多出口(2); 安装成对应于每个出口(2)的压缩室(1); 安装在压缩室(1)中的压电元件(3); 在主体单元(52)侧形成为规则间隔的出口(2); 与主体单元(50)形成的压缩室(1)对应于每个出口(2); 形成在与出口(2)对应的压缩室(1)连接的主体单元(50)中的墨水通道(2a) 在主体单元(50)的上表面形成与压缩室(1)相对应的开口单元(51); 所述振动板(4)形成为中断所述主体单元(50)的上表面中的开口单元(51); 以及位于与振动板(4)上的压缩室(1)对应的开口(51)上的压电元件(3)。