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1. 发明公开

KR20070076987A INK-JET PRINTHEAD ADOPTING PIEZOELECTRIC ACTUATOR AND DRIVING METHOD THEREOF 无效
标题翻译：喷墨打印机采用压电致动器及其驱动方法
公开(公告)号：KR20070076987A
公开(公告)日：2007-07-25
申请号：KR20060006583
申请日：2006-01-21
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： LEE HWA SUN , LEE KYO YEOL , LEE TAE KYUNG , MOON CHANG YOUL , CHUNG JAE WOO
IPC分类号： B41J2/045
CPC分类号： B41J2/14233
摘要： An ink jet print head using a piezoelectric actuator is provided to remarkably reduce a drive voltage by dividing a piezoelectric film into a plurality of sections. An ink jet print head includes a passage forming substrate(110) and a piezoelectric actuator(140). The passage forming substrate includes a pressure chamber. The piezoelectric actuator is formed at an upper portion of the passage forming substrate. The piezoelectric actuator provides a driving force to discharge ink to the pressure chamber. The piezoelectric actuator includes a piezoelectric film(142), a plurality of common electrodes(141), and a plurality of drive electrodes. The piezoelectric film is provided at an upper portion of the passage forming substrate to face the pressure chamber. The plurality of common electrodes and the drive electrodes are alternately arranged in a longitudinal direction of the piezoelectric film.
摘要翻译：提供使用压电致动器的喷墨打印头，通过将压电膜分割成多个部分来显着地降低驱动电压。喷墨打印头包括通道形成基板（110）和压电致动器（140）。通道形成基板包括压力室。压电致动器形成在通道形成基板的上部。压电致动器提供驱动力以将油墨排出到压力室。压电致动器包括压电膜（142），多个公共电极（141）和多个驱动电极。压电膜设置在通道形成基板的上部，面对压力室。多个公共电极和驱动电极沿压电膜的长度方向交替排列。

2. 发明授权

KR100682964B1 METHOD FOR FORMING PIEZOELECTRIC ACTUATOR OF INKJET HEAD 无效
标题翻译：喷嘴头压电致动器的制作方法
公开(公告)号：KR100682964B1
公开(公告)日：2007-02-08
申请号：KR20060012598
申请日：2006-02-09
申请人： SAMSUNG ELECTRONICS CO LTD
发明人： LIM SEUNG MO , LEE KYO YEOL , CHUNG JAE WOO , LEE HWA SUN , LEE JAE CHANG
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/314 , H01L41/337 , H02N2/00
CPC分类号： B41J2/161 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/1425 , Y10T29/42 , Y10T29/435 , Y10T29/49401
摘要： A method for forming a piezoelectric actuator of an ink-jet head is provided to form a uniform electric field with a constant distance between an upper electrode and a lower electrode by uniformly controlling shape, size, and thickness of the upper electrode. A method for forming a piezoelectric actuator of an ink-jet head includes the steps of forming a lower electrode(141) on an upper part of a vibration plate(120), forming a piezoelectric layer(142) in a location corresponding to each of a plurality of pressure chambers(113) on the lower electrode, forming a protection layer(150) covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer with reducing thicknesses of the protection layer and the piezoelectric layer, forming an upper electrode(143) on the upper surface of the piezoelectric layer, and removing the protection layer. The ink-jet head is formed on the upper part of the vibration plate, and provides a driving force for ink discharge to each of the plurality of pressure chambers.
摘要翻译：提供一种用于形成喷墨头的压电致动器的方法，通过均匀地控制上电极的形状，尺寸和厚度，形成上电极和下电极之间具有恒定距离的均匀电场。一种用于形成喷墨头的压电致动器的方法包括以下步骤：在振动板（120）的上部形成下电极（141），在对应于每一个的位置形成压电层（142）形成在下部电极上的多个压力室，形成覆盖下部电极和压电体层的保护层，使保护层和压电体层的厚度减小而使压电体层的上表面露出，形成在所述压电层的上表面上的上电极（143），并且去除所述保护层。喷墨头形成在振动板的上部，并且为多个压力室中的每一个提供用于喷墨的驱动力。

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