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1. 发明公开

KR20070115502A SCANNING PROBE MICROSCOPE AND METHOD OF SCAN USING THE SAME 审中-公开
标题翻译：扫描探针显微镜及其扫描方法
公开(公告)号：KR20070115502A
公开(公告)日：2007-12-06
申请号：KR20060050028
申请日：2006-06-02
申请人： PARK SYSTEMS CORP
发明人： SHIN HYUN SEUNG , KIM YOUNG DOO , KIM YONG SEOK , PARK SANG IL
IPC分类号： H01J37/28 , G01B21/30 , G01Q10/04
CPC分类号： G01Q30/06 , G01Q10/06
摘要： A scanning probe microscope and a scanning method using the same are provided to prevent distortion of an image due to an alignment error of scanners. A position of a probe(100) is linearly changed by a first scanner(310), and a position of a sample(200) is linearly changed by a second scanner(320). An adjusting unit(400) adjusts a position of the first scanner or the second scanner, so that a plane formed by position variation of the sample is perpendicular to a straight line formed by position variation of the probe. The adjusting unit obtains a first shape of the sample along a straight line in the plane, obtains a second shape of the sample along the straight line, and adjusts the position of the first or second scanner according to a difference between the first or second shape and an average shape of the first and second shapes.
摘要翻译：提供扫描探针显微镜和使用其的扫描方法以防止由于扫描仪的对准误差引起的图像变形。探针（100）的位置由第一扫描器（310）线性地改变，并且样品（200）的位置被第二扫描器（320）线性地改变。调整单元（400）调节第一扫描仪或第二扫描仪的位置，使得通过样品的位置变化形成的平面垂直于由探针的位置变化形成的直线。调整单元沿着平面中的直线获得样品的第一形状，沿着直线获得样品的第二形状，并且根据第一或第二形状之间的差异来调整第一或第二扫描仪的位置以及第一和第二形状的平均形状。

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