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    • 2. 发明公开
    • 엑스선 디지털 이미지 센서 장치, 엑스선 디지털 이미지 장치 및 엑스선 디지털 이미지 센서 제조 방법
    • 用于X射线数字图像的传感器装置,用于X射线的数字图像装置,以及X射线数字图像传感器的制造方法
    • KR1020110043043A
    • 2011-04-27
    • KR1020090099974
    • 2009-10-20
    • 한국과학기술원
    • 조규성김현기배준형차보경전호상김종열
    • H01L27/146A61B6/12
    • H01L27/14625H01L27/14627H01L27/14658H01L27/14676H01L27/14685H04N5/32
    • PURPOSE: A sensor device for an x-ray digital image, a digital image device for an x-ray, and a manufacturing method of the x-ray digital image sensor are provided to directly receive a light from a scintillator on a corresponding pixel without crosstalk with another pixels, thereby improving an effective signal. CONSTITUTION: In a sensor device for an x-ray digital image, a digital image device for an x-ray, and a manufacturing method of the x-ray digital image sensor, a plurality of image sensors(260) comprises a photo diode having an area less than a predetermined value by reducing a photo diode area ratio per unit pixel area. A plurality of image sensors are corresponded to each pixel on a substrate. A micro lens(210) is bonded in the photo diode of the each image sensor. A scintillator is deposited on the micro lens to be a pixel.
    • 目的:提供一种用于x射线数字图像的传感器装置,用于x射线的数字图像装置和x射线数字图像传感器的制造方法,以直接从相应像素上的闪烁体接收光,而无需 与另一个像素串扰,从而改善有效信号。 构成:在用于x射线数字图像的传感器装置,用于x射线的数字图像装置和x射线数字图像传感器的制造方法中,多个图像传感器(260)包括光电二极管,其具有 通过降低每单位像素面积的光电二极管面积比而小于预定值的面积。 多个图像传感器对应于基板上的每个像素。 在每个图像传感器的光电二极管中接合微透镜(210)。 闪烁体沉积在微透镜上成为像素。