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    • 3. 发明授权
    • 패턴 형성 방법 및 패턴 형성 장치
    • 形成图案的方法和装置形成图案
    • KR101232837B1
    • 2013-02-13
    • KR1020110077506
    • 2011-08-03
    • 한국과학기술연구원
    • 임정아홍재민송용원최희덕김학성
    • H05K3/12H05K3/22H05K3/46B41F15/14
    • PURPOSE: A pattern forming method and a pattern forming device thereof are provided to stably plasticize or sinter a pattern, thereby preventing deformation of a substrate. CONSTITUTION: A transport unit(100) transfers a substrate. A pattern forming unit(200) forms a pattern on the substrate. A change measurement unit(400) measures a change of a pattern. A control unit(500) controls at least one of the transport unit and an illuminating unit. The change measurement unit measures a change of electric resistance of the pattern. [Reference numerals] (200) Pattern forming unit; (400) Change measurement unit; (510,530) Central control unit; (520) Optical control unit
    • 目的:提供图案形成方法和图案形成装置,以稳定地塑化或烧结图案,从而防止基板的变形。 构成:传送单元(100)传送衬底。 图案形成单元(200)在基板上形成图案。 变化测量单元(400)测量图案的变化。 控制单元(500)控制传送单元和照明单元中的至少一个。 变化测量单元测量图案的电阻的变化。 (附图标记)(200)图案形成单元; (400)改变测量单位; (510,530)中央控制单位; (520)光控单元
    • 9. 发明公开
    • 그래핀 제조 방법 및 그에 따라 제조되는 그래핀, 그 그래핀을 포함하는 전자 소자
    • 用于制造石墨的方法,通过该方法制造的石墨,包含石墨的电子设备
    • KR1020130101391A
    • 2013-09-13
    • KR1020120022507
    • 2012-03-05
    • 한국과학기술연구원
    • 송용원임정아강동석김원준
    • C01B31/02C23C16/26H01L21/08
    • C01B32/186B01J23/755C23C16/26H01L21/08
    • PURPOSE: A graphene, a graphene manufactured by the same, and an electronic diode including the same are provided to manufacture graphene without artificial carbon supply source. CONSTITUTION: A manufacturing method of a graphene comprises a step of depositing a catalyst on a substrate (S110); a step of heating the substrate to make carbon included in the deposited catalyst diffuse in the interlayer between the substrate and the catalyst through the interference of the catalyst (S120); a step of making the diffused carbon form a graphene crystal, grow, and form graphene by cooling the heated substrate (S130); and a step of etching a catalyst to obtain generated graphene (S140). [Reference numerals] (S110) Depositing a catalyst on a substrate; (S120) Heating the substrate; (S130) Cooling the heated substrate; (S140) Etching a catalyst
    • 目的:提供石墨烯,由其制造的石墨烯和包含该石墨烯的电子二极管,以制造没有人造碳源的石墨烯。 构成:石墨烯的制造方法包括在基板上沉积催化剂的步骤(S110); 通过加热基板以使包含在沉积的催化剂中的碳通过催化剂的干扰而扩散到基板和催化剂之间的中间层中的步骤(S120); 使扩散的碳形成石墨烯晶体的步骤,通过冷却加热的衬底生长并形成石墨烯(S130)。 和蚀刻催化剂以获得生成的石墨烯的步骤(S140)。 (参考号)(S110)在基板上沉积催化剂; (S120)加热基板; (S130)冷却加热的基板; (S140)蚀刻催化剂