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    • 1. 发明公开
    • 결합 계면 시험 방법
    • 联合边界面测试方法
    • KR1020010029833A
    • 2001-04-16
    • KR1020000034795
    • 2000-06-23
    • 프랙스에어 에스.티. 테크놀로지, 인코포레이티드
    • 헌트토마스제이.길먼폴에스.
    • G01L1/00
    • G01N19/04G01N3/08G01N2203/0423
    • PURPOSE: To provide a testing method for easily and surely testing joint strength between two layers of metallic composite material such as a sputter target/ receiving plate assembly. CONSTITUTION: In one end of a sample 10 cut out from a stutter target/receiving plate assembly, a slit 20 cutting a part of a joint boundary face 16 is formed, and sample 10 is divided into a connected area 18 including the joint boundary face 16 and an unconnected area 22 including no joint boundary face. In the unconnected area 22, holes 24, 26 are bored in a sputter target 12 and a receiving plate 14 individually, and a force separating the sputter target 12 and the receiving plate 14 from each other is applied to rods inserted through the holes, and then, the force is measured when the joint is broken. Because the joint boundary face 16 is isolated by means of the slit 20, joint strength alone can be measured without influence of the material strength.
    • 目的:提供一种测试方法,用于容易且可靠地测试两层金属复合材料如溅射靶/接收板组件之间的接合强度。 构成:在从咬入口/接收板组件切出的样品10的一端形成切割接合界面16的一部分的狭缝20,将样品10分割成包括接合界面的连接区域18 16和不包括接合边界面的未连接区域22。 在未连接区域22中,孔24,26分别在溅射靶12和接收板14中钻孔,并且将溅射靶12和接收板14彼此分离的力施加到穿过孔插入的杆,并且 那么当接头断裂时测量力。 由于接合边界面16通过狭缝20隔离,所以可以测量单独的接合强度而不受材料强度的影响。