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    • 1. 发明公开
    • 프로브 카드상의 신호를 라우팅하기 위한 프로그래머블장치
    • 可编程设备用于探测卡上的信号
    • KR1020070100835A
    • 2007-10-11
    • KR1020077020035
    • 2006-01-30
    • 폼팩터, 인코포레이티드
    • 그레니쳐데인씨헨슨로이제이밀러찰스에이
    • G01R31/26H01L21/66G01R1/067
    • G01R31/31926G01R1/07385G01R31/2889
    • A probe card of a wafer test system includes one or more programmable Ics, such as FPGAS (150), to provide routing from individual test signal channels to one of multiple probes (16). The programmable ICs can be placed on a base PCB (30) of the probe card, or on a daughtercard (100) attached to the probe card. With programmability, the PCB (30) can be used to switch limited test system channels away from unused probes (16). Programmability further enables a single probe card to more effectively test devices having the same pad array, but having different pin-outs for different device options. Reprogrammability also allows test engineers to re-program as they are debugging a test program. Because the programmable IC (150) typically includes buffers that introduce an unknown delay, in one embodiment measurement of the delay is accomplished by first programming the programmable IC (150) to provide a loop back path to the test system so that buffer delay can be measured, and then reprogramming the programmable IC (150) now with a known delay to connect to a device being tested.
    • 晶片测试系统的探针卡包括一个或多个可编程IC,例如FPGAS(150),以提供从各个测试信号通道到多个探针(16)之一的路由。 可编程IC可以放置在探针卡的基板(30)上,或者放置在附接到探针卡的子卡(100)上。 具有可编程性,PCB(30)可用于将有限的测试系统通道从未使用的探头(16)切换出去。 可编程性进一步使单个探针卡更有效地测试具有相同焊盘阵列但具有不同引脚的不同器件选项的器件。 可重编程序还允许测试工程师在调试测试程序时进行重新编程。 因为可编程IC(150)通常包括引入未知延迟的缓冲器,在一个实施例中,通过首先对可编程IC(150)进行编程以提供到测试系统的回送路径来实现延迟的测量,使得缓冲器延迟可以 测量,然后以可知的延迟对可编程IC(150)进行重新编程,以连接到正被测试的设备。