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    • 4. 发明公开
    • 액체 토출 헤드 제조 방법, 이 방법에 의해 제조된 액체토출 헤드 및 미소 기계 장치 제조 방법
    • 制造液体放电头的方法,由该方法制造的液体放电头以及制造分钟机械装置的方法
    • KR1020010007219A
    • 2001-01-26
    • KR1020000030559
    • 2000-06-03
    • 캐논 가부시끼가이샤
    • 스즈끼요시아끼다가와요시노리미야가와마사시와따나베마꼬또마스까와다쯔야구리하라요시아끼이이지마야스시
    • B41J2/135
    • B41J2/14048B41J2/1604B41J2/1623B41J2/1628B41J2/1631B41J2/1635B41J2/1642B41J2/1645B41J2/1646B41J2202/13Y10S29/016Y10T29/49083Y10T29/49401
    • PURPOSE: A method for manufacturing a liquid discharge head is provided to discharge a predetermined liquid due to a bubble generated by heat energy and to exhibit a reduced manufacturing time and a film thickness of several dozen microns. CONSTITUTION: A liquid discharge head includes a discharge opening(5) for discharging liquid droplets therefrom, a wall member constituting a liquid flow path(7) communicating with the discharge opening(5) to supply liquid to the discharge opening, a substrate provided with a bubble creating element for creating a bubble in the liquid, and a movable member(6) supported by and fixed to the substrate with the discharge opening side thereof as a free end and provided at a position facing the bubble creating element in the liquid flow path(7) with a gap between it and the substrate, wherein the free end of the movable member(6) being displaced away from the substrate by pressure produced by creating the bubble to thereby directs the pressure to the discharge opening side and discharges the droplet of the liquid from the discharge opening(5). A method for manufacturing the liquid discharge head has the steps of preparing the substrate provided with the movable member, filling the gap between the movable member and the substrate with liquid photo-curing resin and applying the resin to the substrate by spin coating until it covers the movable member, exposing that area of the photo-curing resin which excludes an area including at least the liquid flow path to light to thereby harden a portion corresponding to the wall member, and removing the unexposed portion of the photo-curing resin to thereby form the movable member in the liquid flow path.
    • 目的:提供一种用于制造液体排出头的方法,用于由于由热能产生的气泡而排出预定液体,并且显示减少的制造时间和几十微米的膜厚度。 构成:液体排出头包括用于从其排出液滴的排出口(5),构成与排出口(5)连通以向排出口提供液体的液体流路(7)的壁构件, 用于在液体中产生气泡的气泡产生元件,以及可移动构件(6),其以排出口侧作为自由端支撑并固定到基板,并且设置在面向液体流中的气泡产生元件的位置 路径(7),其与基板之间具有间隙,其中可移动构件(6)的自由端通过产生气泡而产生的压力从基板移开,从而将压力引导到排放开口侧,并且将 来自排出口(5)的液体液滴。 一种液体排出头的制造方法,其特征在于,准备具有可动部件的基板,用液体光固化树脂填充可动部件与基板之间的间隙,并通过旋涂将树脂施加到基板上,直到其覆盖 所述可动构件将除了至少包含所述液体流路的区域的所述光固化树脂的所述区域曝光,从而使对应于所述壁构件的部分硬化,并且除去所述光固化树脂的未曝光部分,从而 在液体流路中形成可动构件。