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1. 发明公开

KR1020130034474A 레이저 출력 조정 장치 및 그 방법 无效
标题翻译：用于控制激光输出的装置及其方法
公开(公告)号：KR1020130034474A
公开(公告)日：2013-04-05
申请号：KR1020110098501
申请日：2011-09-28
申请人： 참엔지니어링(주)
发明人： 정훈 , 윤성진 , 김준래 , 이윤재 , 김현수 , 지영수
IPC分类号： H01S3/10 , H01S3/13 , B23K26/03 , B23K26/067
CPC分类号： H01S3/10 , B23K26/03 , B23K26/067 , H01S3/13
摘要： PURPOSE: A laser output adjustment apparatus and a method thereof are provided to easily adjust an output of a laser beam irradiated in a substrate. CONSTITUTION: A laser unit(100) generates a laser beam(10). An optical unit(200) provides a path of the laser beam. A processing unit(300) irradiates the laser beam passing the optical unit in a substrate(20). A first measurement unit(400) is arranged between the laser unit and the optical unit and measures an output of the laser beam generated from the laser unit. A second measurement unit(500) is arranged within the optical unit and measures the output of the laser beam passing the optical unit. A controlling unit(600) receives an output signal of the laser beam measured in the first measurement unit and the second measurement unit, transmits the signal to the laser unit, and adjusts the output of the laser beam generated from the laser unit. [Reference numerals] (100) Laser unit; (200) Optical unit; (400) First measurement unit; (500) Second measurement unit; (600) Controlling unit;
摘要翻译：目的：提供激光输出调节装置及其方法，以容易地调节照射在基板中的激光束的输出。构成：激光单元（100）产生激光束（10）。光学单元（200）提供激光束的路径。处理单元（300）将通过光学单元的激光束照射在基板（20）中。第一测量单元（400）设置在激光单元和光学单元之间，并测量从激光单元产生的激光束的输出。第二测量单元（500）布置在光学单元内，并测量通过光学单元的激光束的输出。控制单元（600）接收在第一测量单元和第二测量单元中测量的激光束的输出信号，将该信号发送到激光单元，并调整从激光单元产生的激光束的输出。（附图标记）（100）激光单元; （200）光学单元; （400）第一测量单元; （500）第二测量单元; （600）控制单元;

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