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1. 发明公开

KR1020010063395A 내식성을 향상시킬 수 있는 정전척의 제조방법 및 그에따른 정전척 无效
标题翻译：用于制造耐腐蚀性和静电卡住的静电卡盘的方法
公开(公告)号：KR1020010063395A
公开(公告)日：2001-07-09
申请号：KR1019990060466
申请日：1999-12-22
申请人： 주식회사 케이씨
发明人： 배규호 , 방철용 , 오세태 , 조규태
IPC分类号： H01L21/68
摘要： PURPOSE: A method for fabricating an electrostatic chuck capable of improving a corrosion resistance and an electrostatic chuck according thereof are provided to prevent a crack of an edge part as minimizing a curvature of the edge part of a minor diametric part of an upper part of the electrostatic chuck. CONSTITUTION: A body(2) fabricated with an aluminum has a flange part(4) and its bottom is wide and its top is narrow. A focus ring(6) is located on the flange part to prevent the separation of a wafer(W), and an anodizing film(8) as thick as 50 micrometer is formed on a part except the part where the focus ring is located. A dielectric layer(10) is formed on a surface of the anodizing film to absorb the wafer in vacuum by a polarization phenomenon occurring between a conductive part of the chuck and the wafer when a high voltage is applied. The dielectric film comprises the first insulation layer film(12) attached to the anodizing film and the second insulation film having a conductive copper film(14). The surface of the dielectric film has a number of paths(11) connected from a center path.
摘要翻译：目的：提供一种用于制造能够提高耐腐蚀性的静电卡盘的方法和一种静电卡盘，以防止边缘部分的裂纹使得上部的小直径部分的边缘部分的曲率最小化静电吸盘。构成：用铝制成的主体（2）具有凸缘部分（4），并且其底部较宽并且其顶部较窄。焦点环（6）位于凸缘部分上以防止晶片（W）分离，并且在除了聚焦环所在部分之外的部分上形成厚度为50微米的阳极氧化膜（8）。在阳极氧化膜的表面上形成电介质层（10），以在施加高电压时通过在卡盘的导电部分和晶片之间发生的偏振现象在真空中吸收晶片。电介质膜包括附着到阳极化膜的第一绝缘层膜（12）和具有导电铜膜（14）的第二绝缘膜。电介质膜的表面具有从中心路径连接的多条路径（11）。

2. 发明公开

KR1020010063393A 열 압착 원리를 이용한 필름의 완전 평면 접착 방법 및 그장치 无效
标题翻译：使用热压缩原理无空气孔的完全遮盖膜的方法和装置
公开(公告)号：KR1020010063393A
公开(公告)日：2001-07-09
申请号：KR1019990060464
申请日：1999-12-22
申请人： 주식회사 케이씨
发明人： 배규호 , 방철용 , 오세태 , 조규태
IPC分类号： B29C65/70
CPC分类号： B29C65/02 , B29C65/4835 , B29C65/50 , B29C65/7847 , B29C66/0242 , B29C66/472 , B29C66/7422 , B29C66/74281 , B29C66/74283 , B29C66/8266 , B29C66/914 , B29C66/924 , B29C66/944 , B29K2677/00 , B29K2705/02 , B29K2705/10 , B29K2705/12 , H01L21/6833
摘要： PURPOSE: A complete film sticking method without pores using a thermal compression principle and a sticking device thereof are provided to completely stick a film with regular sticking force without damages and to stick the film regardless of the surface shape of a film contacted body. CONSTITUTION: A complete film sticking device comprises a chamber(1) having a sealing space, with at least one jig(3) inside the sealing space; a worktable(7) putting a body(5) on, inside the jig; a vacuum pump(11) connected to the jig and controlled by a vacuum valve(9) to evacuate the jig; a compressor(15) connected to the chamber and controlled by a compression valve(13), to generate a pressure difference between the chamber and the jig with compressed gas; and a pressurizing cover(21) sealing the jig to stick the body, a sticking film(17) and a stuck film(19) with the pressure difference and equally pressurizing the films.
摘要翻译：目的：提供一种使用热压缩原理的无毛孔的完全膜粘贴方法及其粘贴装置，以便在不损坏的情况下以规则的粘附力完全粘贴薄膜，并且不管膜接触体的表面形状如何，都能粘贴薄膜。构成：完整的胶片粘贴装置包括具有密封空间的腔室（1），在密封空间内具有至少一个夹具（3）; 工作台（7）将身体（5）放在夹具内部; 连接到夹具并由真空阀（9）控制以抽真空的真空泵（11）; 压缩机（15），其连接到所述室并由压缩阀（13）控制，以利用压缩气体产生所述室和所述夹具之间的压力差; 以及密封夹具以粘贴身体的加压盖（21），粘贴膜（17）和具有压力差的粘膜（19），同时加压膜。

3. 发明公开

KR1020010063394A 그 표면에 세라믹이 코팅된 정전척과 세라믹 코팅방법 无效
标题翻译：用陶瓷和陶瓷涂层方法涂覆表面的静电卡盘
公开(公告)号：KR1020010063394A
公开(公告)日：2001-07-09
申请号：KR1019990060465
申请日：1999-12-22
申请人： 주식회사 케이씨
发明人： 배규호 , 방철용 , 오세태 , 조규태
IPC分类号： H01L21/68
摘要： PURPOSE: An electrostatic chuck whose surface is coated with a ceramic and a ceramic coating method are provided to improve the productivity and to prolong the lifetime of the electrostatic chuck by reducing the generation of particle as minimizing the influence of the electrostatic chuck body by plasma. CONSTITUTION: The electrostatic chuck includes an insulation layer(32) coated by plasma jet on an upper part of an aluminum body(30), an anodizing film(34) formed on the above coating film, an insulation film adhered onto the anodizing film by intervening an adhesive film(42). The chuck also includes a conductive copper film(38) adhered onto the insulation film by the adhesive film and a polyimide insulation film(40) thermally compressed onto the copper film. According to the method for fabricating the electrostatic chuck, a prepared electrostatic chuck body is fixed, and a revealed part and an unrevealed part are separated by masking the body partially. And an insulation film is formed by jetting a ceramic powder using a high temperature of plasma into the revealed part of the body. Then a surface roughness is increased by polishing the insulation film.
摘要翻译：目的：提供一种表面涂有陶瓷和陶瓷涂层方法的静电卡盘，以通过减少静电卡盘体等离子体的影响来减少颗粒的产生来提高生产率和延长静电卡盘的使用寿命。构成：静电卡盘包括在铝体（30）的上部涂覆有等离子体射流的绝缘层（32），形成在上述涂膜上的阳极氧化膜（34），通过以下方式附着在阳极氧化膜上的绝缘膜插入粘合膜（42）。卡盘还包括通过粘合剂膜粘合到绝缘膜上的导电铜膜（38）和热压缩到铜膜上的聚酰亚胺绝缘膜（40）。根据制造静电卡盘的方法，固定制备的静电卡盘体，并且通过部分地遮蔽身体来分离透明部分和未显露部分。并且通过使用高温等离子体将陶瓷粉末喷射到身体的显露部分中形成绝缘膜。然后通过抛光绝缘膜来增加表面粗糙度。

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