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1. 发明公开

KR1020130102184A 포토레지스트를 포함한 현상액의 농도 산출 방법 및 농도 조절 장치 有权
标题翻译：用于包括光电子发展者的浓度计算方法和浓度控制系统
公开(公告)号：KR1020130102184A
公开(公告)日：2013-09-17
申请号：KR1020120023204
申请日：2012-03-07
申请人： 주식회사 에이치에스티
发明人： 홍석진 , 박범수 , 임현수 , 김정현
IPC分类号： G01N15/06 , G01N21/31 , G03F7/32 , H01L21/027
CPC分类号： G01N15/0612 , G01N2021/3137 , G03F7/327 , G03F7/422 , H01L21/0273
摘要： PURPOSE: A method for measuring the concentration of a developer including photoresist and a concentration regulating device are provided to reduce a waste of the developer by recovering the developer spread on a substrate when a developing process is progressing and to reduce the amount of the developer utilized for the developing process by directly regulating the concentration of the recovered developer. CONSTITUTION: A method for measuring the concentration of a developer including photoresist includes the following steps of: dissolving the photoresist in a developer of reference concentration and measuring absorbance with a nephelometer while increasing the amount of the photoresist dissolved in the developer at a predetermined speed; measuring a difference of the concentration of the developer per each of measured absorbance values with neutralimetry and obtaining a correlation function between the absorbance and a concentration error of the developer; measuring the concentration of carbonate by measuring the absorbance of a developer sample with a nephelometer and measuring the conductivity of the developer sample with a nephelometer and the speed of ultrasonic waves; and calculating the concentration of the developer sample by using the measured absorbance, the concentration of the carbonate, the correlation function between the absorbance and the concentration error of the developer, the correlation function between the concentration of the carbonate and the concentration error of the developer, and the reference concentration of the developer. [Reference numerals] (5) Densitometer; (AA) Ultrapure water; (BB) Undiluted solution of a developer (25%); (CC) Regeneration solution for a developer; (DD) Developer with reference concentration; (EE,FF) Developing machine; (GG) System for regenerating a developer
摘要翻译：目的：提供一种用于测量包括光致抗蚀剂和浓度调节装置的显影剂浓度的方法，以在显影过程进行时回收显影剂扩散在基底上并减少显影剂的用量来减少显影剂的浪费通过直接调节回收显影剂的浓度来进行显影过程。构成：用于测量包括光致抗蚀剂的显影剂浓度的方法包括以下步骤：将光致抗蚀剂溶解在参考浓度的显影剂中并用浊度计测量吸光度，同时以预定速度增加溶解在显影剂中的光致抗蚀剂的量; 用中和法测量每个测量的吸光度值的显影剂浓度的差异，并获得显影剂的吸光度和浓度误差之间的相关函数; 通过用浊度计测量显影剂样品的吸光度并用浊度仪测量显影剂样品的电导率和超声波的速度来测量碳酸盐的浓度; 并通过使用测量的吸光度，碳酸盐浓度，显影剂的吸光度和浓度误差之间的相关函数来计算显影剂样品的浓度，碳酸盐浓度与显影剂浓度误差之间的相关函数，以及显影剂的参考浓度。（附图标记）（5）密度计; （AA）超纯水; （BB）未稀释的显影剂溶液（25％）; （CC）开发商的再生解决方案（DD）具有参考浓度的显影剂; （EE，FF）开发机; （GG）用于再生显影剂的系统

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