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    • 4. 发明公开
    • 용해 특성을 조절하는 감광성 수지 조성물 및 이를 이용한이층 구조의 패턴 형성 방법
    • 用于控制熔融特性的光催化剂树脂组合物及其形成两层结构图案的方法
    • KR1020040031137A
    • 2004-04-13
    • KR1020020060500
    • 2002-10-04
    • 주식회사 동진쎄미켐삼성전자주식회사
    • 양석윤노수귀김길래박찬석박춘호
    • G02B5/20
    • G03F7/032G03F7/0007G03F7/0751Y10S430/106
    • PURPOSE: A photoresist resin composition for controlling a melting characteristic and a method for forming a pattern of a two layer structure using the same are provided to control a gamma value and the thickness of the layer by using a new photopolymerization initiator and a hardener for bottom layer. CONSTITUTION: A photoresist resin composition for controlling a melting characteristic includes a binder of 5 to 30 weight percent, a crosslinkable monomer of 5 to 30 weight percent, paints of 10 to 60 weight percent, a photopolymerization initiator of 1 to 5 weight percent, a hardener of 0.1 to 2 weight percent, and a solvent of 20 to 80 weight percent. The binder melts in alkali aqueous solution. The crosslinkable monomer is formed with two or more ethylene-based double bond. The photopolymerization initiator is formed with one or more materials, which are selected from a group including an acetophenone compound, a xanthone compound, a benzoin compound, and an imidazole compound. The hardener is formed with one or more materials, which are selected from a group including a silane polymer, an ethylene monomer having one or more epoxy bases and an oligomer of the ethylene monomer.
    • 目的:提供用于控制熔融特性的光致抗蚀剂树脂组合物和使用其的形成两层结构的图案的方法,以通过使用新的光聚合引发剂和底部的固化剂来控制该层的γ值和厚度 层。 构成:用于控制熔融特性的光致抗蚀剂树脂组合物包括5至30重量%的粘合剂,5至30重量%的可交联单体,10至60重量%的涂料,1至5重量%的光聚合引发剂,1至5重量%的光聚合引发剂, 0.1〜2重量%的硬化剂,20〜80重量%的溶剂。 粘合剂在碱性水溶液中熔化。 可交联单体由两个或更多个乙烯基双键形成。 光聚合引发剂由选自苯乙酮化合物,呫吨酮化合物,苯偶姻化合物和咪唑化合物的一种或多种材料形成。 硬化剂由一种或多种材料形成,其选自包括硅烷聚合物,具有一个或多个环氧基的乙烯单体和乙烯单体的低聚物的组。
    • 5. 发明公开
    • 레지스트 제거용 신너 조성물
    • 用于去除电阻的薄膜组合物
    • KR1020030043190A
    • 2003-06-02
    • KR1020010074243
    • 2001-11-27
    • 주식회사 동진쎄미켐
    • 김길래박춘호김경아
    • G03F7/32
    • G03F7/322C11D3/044G03F7/063G03F7/30G03F7/34G03F7/425
    • PURPOSE: A thinner composition for removing resist is provided, which is used to remove the edge part of resist film coated on a substrate or an unnecessary film component formed on the back face of a substrate in manufacturing process of a TFT-LCD device or a semiconductor device. CONSTITUTION: The thinner composition comprises 0.1-10 wt% of an inorganic and/or organic alkali; 0.1-30 wt% of an organic solvent; 0.01-10 wt% of a nonionic surfactant; 50-99 wt% of water; and optionally 0.01-5 wt% of an anionic surfactant and/or 0.01-1.0 wt% of an antifoaming agent. Preferably the organic solvent is an organic amine-based solvent, an alcohol ether-based organic solvent, a nitrogen-containing organic solvent or a sulfur-containing organic solvent; the nonionic surfactant is selected from the group consisting of polyoxy ethyl ether, polyoxy propyl ether, polyoxy ethyl propyl ether, polyoxy ethyl alkyl phenyl ether, polyoxy propyl alkyl phenyl ether, polyoxy ethyl oxypropyl alkyl phenyl ether and their mixtures; and the anionic surfactant is selected from the group consisting of alkyl ether sulfate, alkyl sulfate, alkyl benzenesulfonic acid, alkyl benzenesulfonate, alkyl naphthalene sulfonate and their mixtures.
    • 目的:提供用于去除抗蚀剂的较薄组合物,其用于在TFT-LCD装置的制造过程中除去涂覆在基板上的抗蚀剂膜的边缘部分或形成在基板背面上的不需要的膜部件 半导体器件。 构成:较薄的组成包含0.1-10重量%的无机和/或有机碱; 0.1-30重量%的有机溶剂; 0.01-10重量%的非离子表面活性剂; 50-99重量%的水; 和0.01-5重量%的阴离子表面活性剂和/或0.01-1.0重量%的消泡剂。 优选有机溶剂是有机胺类溶剂,醇醚类有机溶剂,含氮有机溶剂或含硫有机溶剂; 非离子表面活性剂选自聚氧乙基醚,聚氧丙基醚,聚氧乙基丙基醚,聚氧乙基烷基苯基醚,聚氧丙基烷基苯基醚,聚氧乙基氧丙基烷基苯基醚及其混合物; 阴离子表面活性剂选自烷基醚硫酸盐,烷基硫酸盐,烷基苯磺酸,烷基苯磺酸盐,烷基萘磺酸盐及其混合物。
    • 9. 发明公开
    • LCD 흑색 컬러 레지스트용 감광성 수지 조성물
    • 液晶显示屏的黑色感光性感光树脂组合物,其包含在碱性溶液中发展的涂料
    • KR1020040092267A
    • 2004-11-03
    • KR1020030026517
    • 2003-04-25
    • 주식회사 동진쎄미켐
    • 김봉기유영길박춘호박찬석
    • G03F7/027
    • PURPOSE: Provided is a photosensitive resin composition for a black color resist of an LCD, which uses a resin having excellent curability by the UV light and adhesion to a substrate, and thus provides excellent pattern formability, developability and shelf stability. CONSTITUTION: The alkali-soluble photosensitive resin composition for a black color resist of an LCD comprises 2-10 wt% of an acid-modified bisphenol epoxy acrylate resin represented by the following formula 1, which is soluble in an aqueous alkaline solution. In formula 1, R1 is represented by the formula of CH2=CHC(O)ORCH2-, wherein R is a C1-C4 alkyl optionally having a hydroxy group, or an epoxy-modified alkyl group; and each of R2, R3 and R4 independently or simultaneously represents a hydrogen atom or methyl group.
    • 目的:提供一种用于LCD的黑色抗蚀剂的感光性树脂组合物,其使用通过UV光具有优异的固化性和对基材的粘附性的树脂,从而提供优异的图案形成性,显影性和搁置稳定性。 构成:用于LCD的黑色抗蚀剂的碱溶性感光性树脂组合物包含2-10重量%的可溶于碱性水溶液的由下式1表示的酸改性双酚环氧丙烯酸酯树脂。 在式1中,R 1由CH 2 = CHC(O)ORCH 2 - 表示,其中R是任选具有羟基的C 1 -C 4烷基或环氧基改性的烷基; R2,R3和R4各自独立地或同时地表示氢原子或甲基。
    • 10. 发明公开
    • 씬너 조성물
    • 薄膜组成
    • KR1020030000359A
    • 2003-01-06
    • KR1020010036103
    • 2001-06-23
    • 주식회사 동진쎄미켐
    • 박찬석김길래박춘호김경아
    • G03F7/32
    • G03F7/32C11D3/044G03F7/168G03F7/322G03F7/422G03F7/423G03F7/425
    • PURPOSE: A thinner composition is provided, which is used to remove the unnecessary membrane component formed at the edge of a resist membrane coated on a substrate or at the rear face of a substrate without the corrosion of an equipment, and is improved in the resist removing property. CONSTITUTION: The thinner composition comprises 0.1-5 wt% of an organic amine; 0.1-30 wt% of an organic solvent; 0.01-5 wt% of a surfactant comprising an anionic surfactant and a nonionic surfactant; and 60-99 wt% of water. The organic solvent is selected from the group consisting of ethylene glycol phenyl ether, propylene glycol phenyl ether, butylene glycol phenyl ether, diethylene glycol phenyl ether, dipropylene glycol phenyl ether, N-methylpyrrolidone, N-ethylpyrrolidone, N-propylpyrrolidone, N-hydroxymethylpyrrolidone, N-hydroxyethylpyrrolidone and their mixtures. Preferably the ratio of an anionic surfactant and a nonionic surfactant is 1:5 by mass.
    • 目的:提供更薄的组合物,其用于除去涂覆在基材上的抗蚀剂膜的边缘或基材的背面上形成的不必要的膜组分,而不会使设备腐蚀,并且改进了抗蚀剂 删除属性。 构成:较薄的组合物包含0.1-5重量%的有机胺; 0.1-30重量%的有机溶剂; 0.01-5重量%的包含阴离子表面活性剂和非离子表面活性剂的表面活性剂; 和60-99重量%的水。 有机溶剂选自乙二醇苯基醚,丙二醇苯基醚,丁二醇苯基醚,二甘醇苯基醚,二丙二醇苯基醚,N-甲基吡咯烷酮,N-乙基吡咯烷酮,N-丙基吡咯烷酮,N-羟甲基吡咯烷酮 ,N-羟乙基吡咯烷酮及其混合物。 阴离子表面活性剂和非离子表面活性剂的比例优选为1:5质量%。