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1. 发明公开

KR1020090023567A 기판 수납 용기 无效
标题翻译：基座容器
公开(公告)号：KR1020090023567A
公开(公告)日：2009-03-05
申请号：KR1020087027442
申请日：2007-05-21
申请人： 신에츠 폴리머 가부시키가이샤
发明人： 사사키시게노부 , 오호리신이치 , 야마기시히로키
IPC分类号： H01L21/673 , B65D85/38
CPC分类号： H01L21/67376
摘要： Provided is a substrate container by which contamination of substrates due to entry of gas or the like into a container main body is suppressed by appropriately sealing between the container main body and a cover. The substrate container is provided with a container main body (1) for storing substrates composed of semiconductor wafers, a cover (20) removably fitted in an opening front section (7) of the container main body (1), and a compression-deformable gasket (30) which seals between the container main body (1) and the cover (20). On the inner circumference of the opening front section (7) of the container main body (1), a sealing surface (11) for the gasket (30) is formed, and a difference between the maximum and minimum values of planarity of the sealing surface is less than 0.50mm. On the cover (20), an attaching section (22) for the gasket (30) is formed in frame-shape. The gasket (30) is composed of a base body (31) mounted on the attaching section (22), a flexible sealing piece (34) which extends in a direction of the sealing surface (11) from the base body (31), and a contact section (36) formed to be bended at the leading end of the sealing piece (34) and abuts to the sealing surface (11).
摘要翻译：提供了一种基板容器，通过适当地密封容器主体和盖子，可以抑制由于气体等进入容器主体而导致的基板的污染。基板容器设置有用于存储由半导体晶片构成的基板的容器主体（1），可移除地装配在容器主体（1）的开口前部（7）中的盖（20），以及可压缩变形密封在容器主体（1）和盖（20）之间的密封垫（30）。在容器主体（1）的开口前部（7）的内周上形成有密封面（30）的密封面（11），密封面的平面度的最大值与最小值之间的差表面小于0.50mm。在盖（20）上，用于垫圈（30）的安装部（22）形成为框状。垫圈30由安装在安装部22上的基体31构成，从基体31向密封面11的方向延伸的柔性密封件34，以及形成为在所述密封件（34）的前端弯曲并邻接所述密封面（11）的接触部（36）。

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