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    • 4. 发明公开
    • 패턴막의 제조 방법 및 감광성 수지 조성물
    • 生产图案薄膜和感光树脂组合物的方法
    • KR1020090029207A
    • 2009-03-20
    • KR1020087030328
    • 2006-10-19
    • 세키스이가가쿠 고교가부시키가이샤
    • 후꾸이,히로지아오끼,겐이찌이찌무라,구니히로스에자끼,미노루에나미,도시오이시자와,히데아끼우나떼,다까오고바야시,히로시
    • H01L21/027G03F7/004
    • G03F7/36G03F7/0045G03F7/038G03F7/004G03F7/0047G03F7/0382H01L21/027H01L21/0271
    • A process for producing a film pattern, in which a layer of photosensitive resin composition is formed on a substrate and exposed selectively through a mask to light to thereby obtain a film pattern provided on its surface with protrusions and depressions without the need to remove the layer of photosensitive resin composition at unexposed regions or exposed regions by, for example, development; and a photosensitive resin composition for use in the above process for producing a film pattern. There is provided a process for producing a patterned film, comprising the steps of preparing a photosensitive resin composition that upon light irradiation, generates an acid or a base and is hardened; coating substrate (2) with the photosensitive resin composition to thereby form photosensitive resin composition layer (1) of given thickness; and exposing the photosensitive resin composition layer (1) selectively through mask (3) to light so as to travel at least portion of the photosensitive resin composition at unexposed regions toward the exposed regions and further effect hardening thereof, thereby obtaining patterned film (1A) furnished on its surface with protrusion/depression pattern.
    • 一种薄膜图案的制造方法,其中在基板上形成感光性树脂组合物层,并通过掩模选择性地曝光于光,从而获得在其表面上设置有突起和凹陷的膜图案,而不需要去除层 感光性树脂组合物在未曝光区域或曝光区域的显影; 以及用于上述制造薄膜图案的方法的感光性树脂组合物。 提供一种图案化膜的制造方法,包括以下步骤:制备在光照射时产生酸或碱并被硬化的感光性树脂组合物; 用感光性树脂组合物涂布基材(2),形成规定厚度的感光性树脂组合物层(1) 通过掩模(3)选择性地使感光性树脂组合物层(1)发光,使未曝光区域的感光性树脂组合物的至少一部分向露出区域移动,进一步进行硬化,得到图案化膜(1A) 其表面上具有突出/凹陷图案。
    • 9. 发明公开
    • 마이크로펌프 장치
    • MICROPUMP设备
    • KR1020100053692A
    • 2010-05-20
    • KR1020107008115
    • 2009-03-17
    • 세키스이가가쿠 고교가부시키가이샤
    • 야마모또,가즈끼후꾸오까,마사떼루아까기,요시노리후꾸이,히로지
    • B01J19/00B81B1/00F04B49/06G01N37/00
    • F04B19/006F04B9/12F04B19/20F04B19/24F04F1/06
    • Provided is a micropump device exhibiting good controllability of the quantity of gas generated from a gas generating material and the pumping quantity of a micropump. A micropump device comprises a micropump (10) and a controller (50). The micropump (10) comprises a microchannel (22) that is a liquid channel, a gas generating material (34) for generating gas by receiving irradiation of light and supplying the gas to the microchannel (22), and a light source (42) for irradiating the gas generating material (34) with light (44). The controller (50) supplies the light source (42) with a control pulse signal (CS) for flickering the light source (42) in two-level state by repeating a pulse sequence pattern consisting of a plurality of bits of a fixed number, each bit of which can take two states of a first level for lighting the light source (42) and a second level for unlighting the light source (42).
    • 本发明提供一种显示从气体发生材料产生的气体的量的可控性和微型泵的泵送量的微型泵装置。 微型泵装置包括微型泵(10)和控制器(50)。 微型泵(10)包括作为液体通道的微通道(22),用于通过接收光的照射并将气体供应到微通道(22)产生气体的气体发生材料(34),以及光源(42) 用于用光(44)照射气体发生材料(34)。 控制器(50)通过重复由固定数量的多个位组成的脉冲序列模式,以二级状态向光源(42)提供用于使光源(42)闪烁的控制脉冲信号(CS) 其每个位可以采取用于点亮光源(42)的第一电平的两个状态和用于使光源(42)反光的第二电平。