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    • 10. 发明公开
    • 테스터 및 이를 구비한 반도체 디바이스 검사 장치
    • 测试和测试半导体器件的设备
    • KR1020110015272A
    • 2011-02-15
    • KR1020090072909
    • 2009-08-07
    • 삼성전자주식회사
    • 김병주황인석김정우
    • H01L21/66G01R1/067
    • G01R31/2891
    • PURPOSE: A tester and a device for testing a semiconductor device are provided to improve the reliability of an electrical property test by stabilizing a contact between electrode terminals of the semiconductor device and the probes of a probe card. CONSTITUTION: A tester body inputs and outputs an electric signal for testing a semiconductor device. A tester head transfers an electric signal between a probe card(300) and the tester body. The tester head includes a base connected to the probe card on the open lower side thereof. A horizontality maintaining unit(500) is installed on the tester head and includes a first support plate and an elastic member. The horizontality maintaining unit horizontally maintains the probe card by adding the load to the probe card.
    • 目的:提供一种用于测试半导体器件的测试器和设备,以通过稳定半导体器件的电极端子和探针卡的探针之间的接触来提高电性能测试的可靠性。 规定:测试人员输入并输出用于测试半导体器件的电信号。 测试器头在探针卡(300)和测试器主体之间传送电信号。 测试头包括在其开放的下侧与探针卡连接的基座。 水平保持单元(500)安装在测试器头部上,并包括第一支撑板和弹性构件。 水平维护单元通过向探针卡添加负载来水平维护探针卡。