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    • 5. 发明公开
    • 설비 상황의 실시간 동적 감시 시스템
    • 设备条件实时动态监测系统
    • KR1020050070491A
    • 2005-07-07
    • KR1020030100083
    • 2003-12-30
    • 삼성전자주식회사
    • 이재남
    • H01L21/66
    • 본 발명은 설비 상황의 실시간 동적 감시 시스템에 관한 것으로서, 종래에는 반도체 제조 설비에서 이상이 발생하였을 경우 모니터나 경광등을 이용하여 표시하므로 작업자가 인식하지 못하여 방치하는 문제가 있었다. 본 발명에 따른 실시간 동적 감시 시스템은, 설비 이상이 발생하였을 때 그에 해당하는 에러 코드를 에러 코드 출력부에서 출력하고, 복호기에서 에러 코드를 해독하여 에러 코드에 해당하는 출력 정보를 선택하고, 선택된 출력 정보에 맞는 음성 데이터를 음성 저장/출력부에서 출력한다. 출력된 음성 데이터는 무선 모듈에 의하여 작업자에게 전송되며, 작업자는 이어폰을 통하여 음성 데이터를 수신한다. 본 발명에 따르면, 설비 상황을 실시간으로 작업자에게 직접 알려주기 때문에, 작업자는 작업 위치나 작업 형태에 상관없이 설비 이상을 감지할 수 있으므로 효율적인 설비 운용이 가능하다.
    • 6. 发明公开
    • 레시피 제어 장치
    • 用于控制食谱的设备
    • KR1020030017905A
    • 2003-03-04
    • KR1020010051523
    • 2001-08-25
    • 삼성전자주식회사
    • 이재남
    • H01L21/00
    • PURPOSE: An apparatus for controlling a recipe is provided to prevent previously an accident by identifying an operating state prior to a rebooting operation though condition of modules are initialized by the rebooting operation. CONSTITUTION: A state setup portion(100) displays a recipe according to condition of modules provided from a condition decision portion(140). A connection portion(130) is used for connecting the condition setup portion(100) with the condition decision portion(140) in order to transmit or receive input signals and output signals between the condition setup portion(100) and the condition decision portion(140). The condition decision portion(140) decides the condition of the modules and transmits the decided result to the condition setup portion(100). A power supply portion(150) supplies a static voltage of 5V to the condition setup portion(100).
    • 目的:提供一种用于控制配方的装置,用于通过在重新启动操作之前识别模块的状态,通过重新启动操作来初始化模块的状态来防止事先发生。 构成:状态设定部(100)根据从条件决定部(140)提供的模块的状态显示配方。 连接部分(130)用于将条件建立部分(100)与条件判定部分(140)连接,以便在条件建立部分(100)和条件判定部分(100)之间发送或接收输入信号和输出信号 140)。 条件决定部(140)决定模块的状态,并将判定结果发送给条件设定部(100)。 电源部分(150)向条件设置部分(100)提供5V的静态电压。
    • 7. 发明公开
    • 웨이퍼 스테이지 및 이를 이용한 웨이퍼 가공장치
    • WAFER阶段和使用它的加工方法的装置
    • KR1020020061994A
    • 2002-07-25
    • KR1020010003182
    • 2001-01-19
    • 삼성전자주식회사
    • 허삼성박기문이재남조승래
    • H01L21/66
    • PURPOSE: A wafer stage is provided to prevent damage to a wafer while the wafer is transferred, by determining whether the wafer is normally loaded so that an operator can recognize an abnormal state if the wafer is abnormally loaded. CONSTITUTION: The wafer stage has a wafer loading surface(104). A light emitting unit(106) generates a light signal. A light receiving unit(112) detect a light signal. The light signal is radiated to one end of a light path(110) of the light emitting unit. The other end of the light path of the light emitting unit is open to the wafer loading surface. The radiated light signal reaches the wafer loading surface. A light path(110) of the light receiving unit is so formed that the light signal passing through the light path of the light emitting unit and reflected from the wafer reaches the light receiving unit only when the wafer is normally placed on the wafer stage.
    • 目的:提供晶片台,以通过确定晶片是否正常负载,以便在晶片异常加载时操作者可以识别异常状态,以防止晶片转移时损坏晶片。 构成:晶片台具有晶片加载表面(104)。 发光单元(106)产生光信号。 光接收单元(112)检测光信号。 光信号被照射到发光单元的光路(110)的一端。 发光单元的光路的另一端对晶片装载面开放。 辐射光信号到达晶片装载表面。 光接收单元的光路(110)形成为使得仅当晶片通常放置在晶片台上时,通过发光单元的光路并从晶片反射的光信号到达光接收单元。
    • 8. 发明公开
    • 매거진의 로킹 장치
    • 锁定杂志的装置
    • KR1020110019511A
    • 2011-02-28
    • KR1020090077064
    • 2009-08-20
    • 삼성전자주식회사
    • 지창환김종훈양희상이재남김종철
    • H05K13/02B65G7/00
    • H01L21/6734
    • PURPOSE: A locking apparatus for magazines is provided t preventing the breakage of substrates by selectively blocking the front side of a magazine according to a substrate detected signal. CONSTITUTION: A locking apparatus(100) includes an elevation driving unit(110), a rotation driving unit(120), a rotary block(130), a locking element(140). The elevation driving unit is mounted at the upper center part of a magazine(M). An elevation block(114) is expanded to both lateral sides of the magazine in a horizontal direction. The rotation driving unit is mounted to the magazine and is in connection with the elevation block using a screw. The rotation block is in connection with the rotation driving unit and rotates based on a vertical shaft. The rotation block rotates the locking element. When the locking element rotates, the front side of the magazine is blocked by the locking element.
    • 目的:提供一种用于杂志的锁定装置,通过根据基板检测信号选择性地阻挡盒的前侧来防止基板的破损。 构造:锁定装置(100)包括升降驱动单元(110),旋转驱动单元(120),旋转块(130),锁定元件(140)。 升降驱动单元安装在盒(M)的上中心部分。 升降块(114)在水平方向上扩展到盒的两侧。 旋转驱动单元安装到料仓,并使用螺钉与升降块连接。 旋转块与旋转驱动单元连接并且基于竖直轴旋转。 旋转块旋转锁定元件。 当锁定元件旋转时,盒体的前侧被锁定元件阻挡。
    • 9. 发明公开
    • 트레이 밴딩 장치
    • 装纸托盘装置
    • KR1020080036863A
    • 2008-04-29
    • KR1020060103669
    • 2006-10-24
    • 삼성전자주식회사
    • 이재남김중현
    • B65B27/08B65B27/00B65D63/00B65D71/04
    • B65B13/02B65B13/184B65D63/10B65D71/04B65D2563/101
    • A tray banding apparatus is provided to prevent failure through dust suppression by using a dust-free belt instead of a conventional Velcro band. A tray banding apparatus includes a belt(200), a pair of frames(400a,400b), and locking units(300). The belt is wound around long side surfaces and a top surface of a tray stack(100) to fix the tray stack. The pair of frames surround an edge of the tray stack and cross each other on short side surfaces of the tray stack. The locking units are installed at lower ends of the long side surfaces of the tray stack and have fixing grooves to receive the frames, drum units to wind and unwind the belt, and fixing devices to support and fix the tray stack. The locking unit has a first surface in parallel to the side surfaces of the tray stack, a second surface in parallel to a bottom surface of the tray stack, and a third surface at an acute angle with the first and second surfaces.
    • 提供了一种托盘捆绑装置,以通过使用无尘皮带代替常规的魔术贴带来防止通过灰尘抑制的故障。 托盘捆扎装置包括带(200),一对框架(400a,400b)和锁定单元(300)。 皮带缠绕在长侧表面和托盘堆叠(100)的顶表面上以固定托盘堆叠。 一对框架围绕托盘堆叠的边缘并在托盘堆叠的短边表面上彼此交叉。 锁定单元安装在托盘堆叠的长侧表面的下端,并且具有用于容纳框架的固定槽,用于卷绕和展开带的滚筒单元以及固定装置以支撑和固定托盘堆叠。 锁定单元具有平行于托盘堆叠的侧表面的第一表面,平行于托盘堆叠的底表面的第二表面和与第一表面和第二表面成锐角的第三表面。
    • 10. 发明公开
    • 물품 입출고 시스템 및 그를 이용한 물품 입출고 방법
    • 用于永久性仓储/交付物品的系统和方法
    • KR1020040110729A
    • 2004-12-31
    • KR1020030040170
    • 2003-06-20
    • 삼성전자주식회사
    • 이성열선용균이상훈박노신이재남
    • G06Q10/08
    • B65G1/1371B65G1/1378
    • PURPOSE: A system and a method for instantly warehousing/delivering articles are provided to prevent inefficient problems such as delivery time delay and storing space waste by comparing articles information and input/out data of a management server. CONSTITUTION: A warehousing conveyor(242) conveys the articles(100) warehoused by a warehousing part(210). A delivery conveyor(243) conveys the articles the outside and receives the articles from the warehousing conveyor by partially/mechanically connecting to the warehousing conveyor. A stacker crane(244) transfers the articles on the warehousing conveyor or transfers the article stored in a storing part(230) to the delivery conveyor. A management server(260) manages warehousing/delivery information and transfers a control signal corresponding to the warehousing/delivery information to the corresponding part. The server performs judges warehousing or delivery of the article by comparing the article information received from an article identifier(270) with the warehousing/delivery information on a moment that the article is warehoused.
    • 目的:通过比较文章信息和管理服务器的输入/输出数据,提供了一种用于即时仓储/传送物品的系统和方法,以防止低效率的问题,如交货时间延迟和存储空间浪费。 构成:仓储输送机(242)输送由仓库部件(210)仓储的物品(100)。 输送输送机(243)将物品输送到外部,并通过部分/机械地连接到仓储输送机从仓储输送机接收物品。 堆垛机(244)将物品运送到仓库输送机上,或将储存在存储部件(230)中的物品转移到输送输送机。 管理服务器(260)管理仓储/传送信息,并将对应于仓储/传送信息的控制信号传送到相应的部件。 服务器通过将文章标识符(270)接收到的文章信息与文章存储的时刻的仓储/传递信息进行比较来执行评估文件的仓储或传递。