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1. 发明公开

KR1020070005725A 실리콘 웨이퍼들로부터 복합 블레이드 외형 제조방법 및블레이드 외형들의 강화방법 无效
标题翻译：从硅片制作复合叶片几何的方法和加强叶片几何
公开(公告)号：KR1020070005725A
公开(公告)日：2007-01-10
申请号：KR1020067023873
申请日：2005-04-29
申请人： 비버-비지텍 인터내셔날 (유에스) 인코포레이티드
发明人： 휴즈제임스 , 다스칼바딤 , 키난조셉 , 키스아틸라 , 샤베즈수잔
IPC分类号： H01L21/301
CPC分类号： A61B17/3211 , A61B2017/00526
摘要： Ophthalmic surgical blades are manufactured from either a single crystal or poly-crystalline material, preferably in the form of a wafer. The method comprises preparing the single crystal or poly-crystalline wafers by mounting them and etching trenches into the wafers using one of several processes. Methods for machining the trenches, which form the bevel blade surfaces, include a diamond blade saw, laser system, ultrasonic machine, a hot forge press and a router. Other processes include wet etching (isotropic and anisotropic) and dry etching (isotropic and anisotropic, including reactive ion etching), and combinations of these etching steps. The wafers are then placed in an etchant solution which isotropically etches the wafers in a uniform manner, such that layers of crystalline or poly- crystalline material are removed uniformly, producing single, double or multiple bevel blades. Nearly any angle can be machined into the wafer, and the machined angle remains after etching. The resulting radii of the blade edges is 5-500 nm, which is the same caliber as a diamond edged blade, but manufactured at a fraction of the cost. A range of radii may be 30 to 60 nm, with a specific implementation being about 40 nm. The blade profile may have an angle of, for example, about 60. The ophthalmic surgical blades can be used for cataract and refractive surgical procedures, as well as microsurgical, biological and non-medical, non-biological purposes. Surgical and non-surgical blades and mechanical devices manufactured as described herein can also exhibit substantially smoother surfaces than metal blades. ® KIPO & WIPO 2007
摘要翻译：眼科手术刀片由单晶或多晶材料制成，优选为晶片形式。该方法包括通过使用几种方法之一安装它们并将沟槽蚀刻到晶片中来准备单晶或多晶晶片。用于加工形成斜面刀片表面的沟槽的方法包括金刚石锯片锯，激光系统，超声波机器，热锻压机和路由器。其他工艺包括湿蚀刻（各向同性和各向异性）和干蚀刻（各向同性和各向异性，包括反应离子蚀刻）以及这些蚀刻步骤的组合。然后将晶片放置在蚀刻剂溶液中，其均匀地蚀刻晶片，使得均匀地去除晶体或多晶材料层，产生单个，双重或多个斜面叶片。几乎任何角度可以加工到晶片中，并且在蚀刻之后保留加工角度。叶片边缘的最终半径为5-500nm，其与金刚石边缘刀片相同的口径，但是以成本的一小部分制造。半径范围可以为30至60nm，具体实施方案为约40nm。刀片轮廓可以具有例如约60°的角度。眼科手术刀片可用于白内障和屈光手术，以及显微手术，生物和非医学，非生物学目的。如本文所述制造的手术和非手术刀片和机械装置也可以表现出比金属刀片更基本平滑的表面。 ®KIPO＆WIPO 2007

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