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    • 3. 发明公开
    • 웨이퍼의 가공 방법 및 상기 웨이퍼의 가공 방법에 의해 얻어진 웨이퍼
    • 通过波浪加工方法获得的波浪加工方法和波形
    • KR1020140059732A
    • 2014-05-16
    • KR1020130133533
    • 2013-11-05
    • 닛토덴코 가부시키가이샤
    • 스기무라도시마사다나카순페이다카하시도모카즈아키즈키신야
    • H01L21/78H01L21/302H01L21/48
    • The present invention relates to a wafer processing method which includes a solvent cleaning process before a temporary suitable processing step is carried out, and provides a wafer processing method which appropriately maintains and supports a wafer in a processing step and prevents adhesive residue after the delamination of an adhesive sheet. A wafer processing method according to the present invention includes a process of attaching a wafer to an adhesive sheet for a wafer process, comprising a base material and an adhesive layer including a radiation hardening adhesive; a process of emitting radioactive ray to the adhesive layer of the adhesive sheet for a wafer process; a process of cleaning the wafer with a solvent; and a process of processing the wafer. In the wafer processing method according to the present invention, a radiation irradiation process is carried out before the cleaning process.
    • 本发明涉及一种晶片处理方法,其包括在进行临时合适的处理步骤之前的溶剂清洗工艺,并提供在处理步骤中适当地维持和支撑晶片的晶片处理方法,并防止在分层之后的粘合剂残留 粘合片。 根据本发明的晶片处理方法包括将晶片附着到用于晶片工艺的粘合片上的方法,包括基底材料和包括辐射硬化粘合剂的粘合剂层; 向用于晶片工艺的粘合片的粘合剂层发射放射线的过程; 用溶剂清洗晶片的工艺; 以及处理晶片的过程。 在根据本发明的晶片处理方法中,在清洁处理之前进行放射线照射处理。
    • 5. 发明公开
    • 점착 시트와 그의 제조방법, 상기 점착 시트의 사용방법,및 상기 점착 시트에 사용되는 다층 시트와 그의 제조방법
    • 粘合片及其制造方法,以及用于粘合片的多层片材及其制造方法,以减少在抛光过程中的损害,并且在不引起环境问题的情况下弯曲和失真
    • KR1020040030240A
    • 2004-04-09
    • KR1020030050470
    • 2003-07-23
    • 닛토덴코 가부시키가이샤
    • 요시다요시노리마에노요헤이아카자와고우지마츠무라다케시다카하시도모카즈
    • C09J7/00
    • H01L21/6835B32B27/08C09J7/29C09J2201/162C09J2433/006C09J2475/006H01L21/6836H01L2221/68327H01L2221/6839Y10T428/28Y10T428/2848
    • PURPOSE: An adhesive sheet and method for producing and use thereof, and a multilayered sheet used to the adhesive sheet and preparation method thereof are provided to improve the storage modulus and flexural modulus, thereby when used to a semiconductor wafer manufacturing process, reducing the number of damaged wafer during a polishing process, bending and distortion of wafer, without using environmentally hazardous chemicals. CONSTITUTION: The adhesive sheet comprises: a complex film(2) formed by a composition comprising an urethane polymer and a vinyl polymer as active ingredients; a first film(1) comprised of a material different from the complex film; and an adhesive layer. The adhesive sheet has 9-250N/mm2 of elastic modulus when the long strip of the sheet with the width of 20mm is bent to 3.0mm of radius of curvature. The sheet is produced by: forming an urethane polymer by reacting polyol and polyisocyanate in the presence of radical polymerizable monomers; coating the mixture of the urethane polymer and radical polymerizable monomers, onto the first film; and curing them with irradiation. The multilayered sheet used to the adhesive sheet as a support comprises a complex film having storage modulus of less than 2.0x(10)¬8Pa at 25deg.C and more than 3.0x(10)¬5Pa at 100deg.C.
    • 目的:提供一种粘合片及其制造方法以及用于粘合片的多层片材及其制备方法,以提高储存模量和弯曲弹性模量,从而当用于半导体晶片制造工艺时,减少数量 在抛光过程中损坏的晶片,晶片的弯曲和变形,而不使用对环境有害的化学品。 构成:粘合片包括:由包含氨基甲酸酯聚合物和乙烯基聚合物作为活性成分的组合物形成的复合膜(2) 由与复合膜不同的材料构成的第一膜(1) 和粘合剂层。 当宽度为20mm的片材的长条弯曲到曲率半径为3.0mm时,粘合片具有9-250N / mm 2的弹性模量。 该片材通过以下方法制备:在可自由基聚合的单体存在下,使多元醇和多异氰酸酯反应形成聚氨酯聚合物; 将聚氨酯聚合物和可自由基聚合的单体的混合物涂覆到第一膜上; 并用照射固化。 用作粘合片作为载体的多层片材包含在25℃时储能模量小于2.0×(10)-8Pa的复合膜,在100℃下的复合膜大于3.0×(10)·5Pa。
    • 6. 发明公开
    • 콜릿, 및 칩 부품을 흡착하여 픽업하는 방법
    • 使用该芯片的芯片和方法
    • KR1020040018958A
    • 2004-03-04
    • KR1020030058754
    • 2003-08-25
    • 닛토덴코 가부시키가이샤
    • 야마모토쇼지다카하시도모카즈
    • H01L21/50
    • H01L24/75
    • PURPOSE: To provide a collet formed with a recess 10 brought into contact with one plate surface of a chip part and sucks the chip by evacuating the recess 10 in a contact state and picks up it, and can pick up even a chip part that is too thin to cause deformation during picking up without a strong suction force causing breakage, and to provide a method for picking up the chip part using the same. CONSTITUTION: The method is used to pick up a chip part. The collet is provided with a projection 12 which projects from the inner side surface 101 and/or the inner bottom surface 102 of a recess 10 and is brought into contact with the plate surface of the chip part in contact with the recess 10. Furthermore, the method includes a step where the collect is brought into contact with the chip so that a distance between at least one outer circumference edge of the chip to be picked up and the opening edge of the recess 10 is 0.001-0.3mm.
    • 目的:提供一种夹头,其形成有与芯片部分的一个板表面接触的凹部10,并且在接触状态下抽空凹部10并吸收芯片,并且可以拾取甚至芯片部分, 太薄而不会引起变形,而没有强力的吸力造成断裂,并提供使用该芯片拾取芯片部件的方法。 构成:该方法用于拾取芯片部分。 夹头具有从凹部10的内侧面101和/或内侧底面102突出并与与凹部10接触的芯片部的板面接触的突起部12.此外, 该方法包括使集合体与芯片接触的步骤,使得要拾取的芯片的至少一个外周边缘与凹部10的开口边缘之间的距离为0.001-0.3mm。
    • 8. 发明公开
    • 반도체 소자의 제조 방법
    • 制造半导体器件的方法
    • KR1020140051078A
    • 2014-04-30
    • KR1020130123916
    • 2013-10-17
    • 닛토덴코 가부시키가이샤
    • 아키즈키신야후쿠하라준지스기무라도시마사다카하시도모카즈미즈노고지
    • H01L21/78H01L21/60
    • H01L24/94H01L2924/15788H01L2924/00
    • The present invention provides a method for manufacturing a semiconductor device having a via conductive path with great production efficiency. The manufacturing method of the present invention comprises the following processes of: [Process A] preparing a semiconductor wafer which has an active surface on which a plurality of semiconductors are formed, a conductive layer which is formed on the opposite surface of the active surface and has a given pattern, and a via conductive path which connects the active surface with the opposite surface; [Process B] forming a solder bump on the conductive layer; and [Process C] dicing the semiconductor wafer, wherein [Process A] includes that of the opposite surface of the active surface is grounded while a protective tape is attached to the active surface which is on a semiconductor wafer and on which a plurality of semiconductor devices are formed, and processes from the grinding to the dicing in [Process C] performed while the protective tape is attached.
    • 本发明提供一种制造具有生产效率高的通孔导电路径的半导体器件的方法。 本发明的制造方法包括以下工序:[制备方法A]制备其上形成有多个半导体的有源表面的半导体晶片,形成在有源表面的相对表面上的导电层和 具有给定的图案,以及将活性表面与相对表面连接的通孔导电路径; [工艺B]在导电层上形成焊料凸块; 和[工艺C]切割半导体晶片,其中[工艺A]包括有源表面的相对表面的接地接地,同时将保护带附接到半导体晶片上的有源表面上,并且在其上具有多个半导体 形成装置,并且在安装保护带的同时在[方法C]中从研磨到切割的处理。