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    • 2. 发明公开
    • 반도체장치 제조방법
    • 制造半导体器件的方法
    • KR1020090041322A
    • 2009-04-28
    • KR1020080102069
    • 2008-10-17
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 후지카와사이시호소야쿠니오치바요쿄
    • H01L29/786H01L21/027
    • H01L27/1288G02F2001/13606G02F2001/136231G02F2001/136236G02F2001/13625G02F2201/50H01L21/0273H01L21/31144H01L21/32139H01L27/1214
    • A method for manufacturing a semiconductor device is provided to suppress the lowering of the yield due to misalignment with other photomasks and to reduce the frequency of the position arrangement of the photomask by reducing the number of masks. A first conductive layer with a transparent conductive layer(101) and a metal layer(102) is formed on an insulation substrate(100). A gate electrode and a pixel region which becomes a pixel electrode are formed by etching the transparent conductive layer and the metal layer by using the first resist. The pixel electrode formed as the transparent conductive layer is made by etching the metal layer on the pixel region by using the remaining first resist after ashing the first resist. A gate insulating layer is formed on the insulating substrate. The semiconductor layer is formed on the gate insulating layer. A contact hole is formed by etching the gate insulating layer, the semiconductor layer on the pixel electrode and the semiconductor layer with the impurity element. An island type semiconductor layer is formed by etching the semiconductor and the semiconductor layer with the impurity element giving one conductivity by using the remaining second resist after using the second resist.
    • 提供了一种用于制造半导体器件的方法,以抑制由于与其它光掩模的不对准而导致的屈服的降低,并且通过减少掩模的数量来降低光掩模的位置布置的频率。 在绝缘基板(100)上形成具有透明导电层(101)和金属层(102)的第一导电层。 通过使用第一抗蚀剂蚀刻透明导电层和金属层,形成栅极电极和成为像素电极的像素区域。 形成为透明导电层的像素电极通过在灰化第一抗蚀剂之后通过使用剩余的第一抗蚀剂蚀刻像素区域上的金属层来制造。 在绝缘基板上形成栅极绝缘层。 半导体层形成在栅极绝缘层上。 通过用杂质元素蚀刻栅极绝缘层,像素电极上的半导体层和半导体层来形成接触孔。 通过在使用第二抗蚀剂之后通过使用剩余的第二抗蚀剂,用杂质元素蚀刻半导体和半导体层来形成岛型半导体层。
    • 3. 发明公开
    • 반도체장치 및 그의 제작방법
    • 半导体器件及制造半导体器件的方法
    • KR1020090041317A
    • 2009-04-28
    • KR1020080100665
    • 2008-10-14
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 호소야쿠니오후지카와사이시
    • H01L29/786
    • H01L27/1288H01L27/1214H01L29/41733H01L29/66765H01L29/78609H01L29/78678H01L27/12H01L29/458
    • A semiconductor device and a manufacturing method thereof are provided to reduce the number of a photo mask and a photolithography process by forming an active matrix substrate by three photolithography processes and two photo masks. A first conductive layer(102) is formed on a substrate(101). A first insulating layer(104), a first amorphous semiconductor layer(106), and a second amorphous semiconductor with a second conductive impurity element are successively formed on a first conductive layer. A first photoresist pattern is formed by forming the photoresist on the second amorphous semiconductor layer and exposing and developing the photoresist by using a first photo mask. The conductive layer, the first insulating layer, the first amorphous semiconductor layer are etched by using the first photoresist pattern as the mask. The second insulating layer is formed on the front of the substrate.
    • 提供一种半导体器件及其制造方法,通过三个光刻工艺和两个光掩模形成有源矩阵衬底来减少光掩模和光刻工艺的数量。 第一导电层(102)形成在衬底(101)上。 在第一导电层上依次形成第一绝缘层(104),第一非晶半导体层(106)和具有第二导电杂质元素的第二非晶半导体。 通过在第二非晶半导体层上形成光致抗蚀剂并通过使用第一光掩模曝光和显影光致抗蚀剂来形成第一光致抗蚀剂图案。 通过使用第一光致抗蚀剂图案作为掩模来蚀刻导电层,第一绝缘层,第一非晶半导体层。 第二绝缘层形成在基板的前面。
    • 7. 发明授权
    • 액정 표시장치 및 그의 제작방법
    • 液晶显示装置及其制造方法
    • KR101258676B1
    • 2013-04-26
    • KR1020060056040
    • 2006-06-21
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 후지카와사이시호소야쿠니오
    • G02F1/136
    • G02F1/136209G02F1/133345G02F2001/136222
    • 본 발명에서는, 액티브 매트릭스 기판과 대향 기판을 부착시킬 때 정밀도 높은 위치맞춤이 불필요하고, 또한, 전극으로부터 액정에 대한 전계의 인가에 영향을 주지 않는 액정 표시장치 및 그의 제작방법을 제공하는 것을 목적으로 한다. 본 발명의 액정 표시장치는, 차광막 및 착색막이 형성된 기판 위에, 복수의 TFT 및 배선 등으로 구성되는 구동회로와, 복수의 TFT, 배선, 및 화소 전극 등으로 구성되는 화소부 등이 일체 형성된 액티브 매트릭스 기판을 사용하여 형성되는 것을 특징으로 하고, 이와 같은 액티브 매트릭스 기판과 대향 기판과의 사이에 액정이 주입된 구성을 가진다.
      액정 표시장치, 위치맞춤, 차광막, 착색막, 박막트랜지스터
    • 在本发明中,不需要用于安装时对置基板,并且,还有一个目的是提供一种液晶显示装置及其生产不影响电场的应用,来自电极的液晶高度精确对准的有源矩阵基板 的。 在形成有色膜的本发明中,光屏蔽膜和在基板上的液晶显示装置中,多个TFT的并用布线等,多个TFT,配线的构成的驱动电路,和像素电极等的像素部分等一体地形成在由有源矩阵 并且,在有源矩阵基板与对置基板之间注入液晶。
    • 8. 发明公开
    • 다이오드, 및 이것을 갖는 표시장치
    • 包含二极管的二极管和显示器件
    • KR1020090068180A
    • 2009-06-25
    • KR1020080130637
    • 2008-12-19
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 야마자키순페이호소야쿠니오스즈키야스타카후지카와사이시
    • H01L29/86
    • H01L29/66765H01L27/1222H01L27/124H01L29/04H01L29/458H01L29/4908H01L29/78696
    • A diode and a display device having the same are provided to enhance on-current and electric field mobility and to reduce off-current by improving a structure of a thin film transistor. A diode includes a microcrystalline semiconductor layer(258a,258b), an amorphous semiconductor layer, an impurity semiconductor layer, and a wiring. The microcrystalline semiconductor layer is installed in an inside of an end of a gate electrode(251). A gate insulating layer(52a,52b) is inserted into an upper part of the gate electrode. The microcrystalline semiconductor layer includes an impurity element as a donor. The amorphous semiconductor layer is formed to coat an upper surface and a lateral surface of the microcrystalline semiconductor layer. The impurity semiconductor layer has conductivity and includes the impurity element provided on the amorphous semiconductor layer. The wiring comes in contact with a source region or a drain region of the impurity semiconductor layer. The gate electrode and the wiring is connected with each other through the conductive layer.
    • 提供二极管及其显示装置以提高导通电流和电场迁移率,并通过改进薄膜晶体管的结构来减少截止电流。 二极管包括微晶半导体层(258a,258b),非晶半导体层,杂质半导体层和布线。 微晶半导体层安装在栅电极(251)的端部的内部。 栅绝缘层(52a,52b)插入栅电极的上部。 微晶半导体层包括作为供体的杂质元素。 形成非晶半导体层以涂覆微晶半导体层的上表面和侧表面。 杂质半导体层具有导电性并且包括设置在非晶半导体层上的杂质元素。 布线与杂质半导体层的源极区域或漏极区域接触。 栅电极和布线通过导电层彼此连接。
    • 10. 发明公开
    • 액정 표시장치
    • 液晶显示装置
    • KR1020080060182A
    • 2008-07-01
    • KR1020070137217
    • 2007-12-26
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 후지카와사이시키무라하지메
    • G02F1/1335
    • G02F1/133512G02F1/136227
    • An LCD(Liquid Crystal Display) is provided to prevent non-uniformity of color by selectively forming a light blocking layer so as to hide a contact hole. A switching device is formed on a substrate. A conductive layer is electrically connected with the switching device. A planarizing layer has a contact hole(103) formed on the switching device. A pixel electrode is formed on the planarizing layer, and electrically connected with the conductive layer through the contact hole. A first light blocking layer(108) is formed in an area corresponding to a gate line(151) and a source line(152). A second light blocking layer(109) is formed independent from the first light blocking layer. The first and second light blocking layers are formed on a counter substrate.
    • 提供LCD(液晶显示器)以通过选择性地形成遮光层以防止接触孔来防止颜色的不均匀。 开关装置形成在基板上。 导电层与开关装置电连接。 平面化层具有形成在开关装置上的接触孔(103)。 像素电极形成在平坦化层上,并通过接触孔与导电层电连接。 第一遮光层(108)形成在对应于栅极线(151)和源极线(152)的区域中。 独立于第一遮光层形成第二遮光层(109)。 第一和第二遮光层形成在相对基板上。