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    • 2. 发明公开
    • 반도체장치 제조방법
    • 制造半导体器件的方法
    • KR1020090041322A
    • 2009-04-28
    • KR1020080102069
    • 2008-10-17
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 후지카와사이시호소야쿠니오치바요쿄
    • H01L29/786H01L21/027
    • H01L27/1288G02F2001/13606G02F2001/136231G02F2001/136236G02F2001/13625G02F2201/50H01L21/0273H01L21/31144H01L21/32139H01L27/1214
    • A method for manufacturing a semiconductor device is provided to suppress the lowering of the yield due to misalignment with other photomasks and to reduce the frequency of the position arrangement of the photomask by reducing the number of masks. A first conductive layer with a transparent conductive layer(101) and a metal layer(102) is formed on an insulation substrate(100). A gate electrode and a pixel region which becomes a pixel electrode are formed by etching the transparent conductive layer and the metal layer by using the first resist. The pixel electrode formed as the transparent conductive layer is made by etching the metal layer on the pixel region by using the remaining first resist after ashing the first resist. A gate insulating layer is formed on the insulating substrate. The semiconductor layer is formed on the gate insulating layer. A contact hole is formed by etching the gate insulating layer, the semiconductor layer on the pixel electrode and the semiconductor layer with the impurity element. An island type semiconductor layer is formed by etching the semiconductor and the semiconductor layer with the impurity element giving one conductivity by using the remaining second resist after using the second resist.
    • 提供了一种用于制造半导体器件的方法,以抑制由于与其它光掩模的不对准而导致的屈服的降低,并且通过减少掩模的数量来降低光掩模的位置布置的频率。 在绝缘基板(100)上形成具有透明导电层(101)和金属层(102)的第一导电层。 通过使用第一抗蚀剂蚀刻透明导电层和金属层,形成栅极电极和成为像素电极的像素区域。 形成为透明导电层的像素电极通过在灰化第一抗蚀剂之后通过使用剩余的第一抗蚀剂蚀刻像素区域上的金属层来制造。 在绝缘基板上形成栅极绝缘层。 半导体层形成在栅极绝缘层上。 通过用杂质元素蚀刻栅极绝缘层,像素电极上的半导体层和半导体层来形成接触孔。 通过在使用第二抗蚀剂之后通过使用剩余的第二抗蚀剂,用杂质元素蚀刻半导体和半导体层来形成岛型半导体层。
    • 3. 发明公开
    • 반도체장치 및 그의 제작방법
    • 半导体器件及制造半导体器件的方法
    • KR1020090041317A
    • 2009-04-28
    • KR1020080100665
    • 2008-10-14
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 호소야쿠니오후지카와사이시
    • H01L29/786
    • H01L27/1288H01L27/1214H01L29/41733H01L29/66765H01L29/78609H01L29/78678H01L27/12H01L29/458
    • A semiconductor device and a manufacturing method thereof are provided to reduce the number of a photo mask and a photolithography process by forming an active matrix substrate by three photolithography processes and two photo masks. A first conductive layer(102) is formed on a substrate(101). A first insulating layer(104), a first amorphous semiconductor layer(106), and a second amorphous semiconductor with a second conductive impurity element are successively formed on a first conductive layer. A first photoresist pattern is formed by forming the photoresist on the second amorphous semiconductor layer and exposing and developing the photoresist by using a first photo mask. The conductive layer, the first insulating layer, the first amorphous semiconductor layer are etched by using the first photoresist pattern as the mask. The second insulating layer is formed on the front of the substrate.
    • 提供一种半导体器件及其制造方法,通过三个光刻工艺和两个光掩模形成有源矩阵衬底来减少光掩模和光刻工艺的数量。 第一导电层(102)形成在衬底(101)上。 在第一导电层上依次形成第一绝缘层(104),第一非晶半导体层(106)和具有第二导电杂质元素的第二非晶半导体。 通过在第二非晶半导体层上形成光致抗蚀剂并通过使用第一光掩模曝光和显影光致抗蚀剂来形成第一光致抗蚀剂图案。 通过使用第一光致抗蚀剂图案作为掩模来蚀刻导电层,第一绝缘层,第一非晶半导体层。 第二绝缘层形成在基板的前面。
    • 7. 发明公开
    • 표시 장치 및 그 제조 방법
    • 显示装置及其制造方法
    • KR1020090104730A
    • 2009-10-06
    • KR1020090026936
    • 2009-03-30
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 호소야쿠니오
    • G02F1/1343G02F1/136
    • G02F1/136286G02F1/134309G02F2001/136295H01L27/124H01L27/1255
    • PURPOSE: A display device and a manufacturing method thereof are provided to reduce the area of an auxiliary capacitor, thereby improving the aperture ratio of a pixel. CONSTITUTION: A display device comprises a gate electrode(104), a data signal line(102), the first insulating layer, a semiconductor film(105), a source electrode, a drain electrodes(106a,106b), a scanning signal line(101) and an auxiliary capacitance line(103). The gate electrode is formed on a light-transmissive substrate. The data signal line is formed by using the first conductive film. The first insulating layer is formed on the gate electrode and data signal line. The semiconductor film is formed on the first insulating layer. The source electrode and drain electrode are formed on the first insulating layer and semiconductor film.
    • 目的:提供一种显示装置及其制造方法,以减小辅助电容器的面积,从而提高像素的开口率。 构成:显示装置包括栅电极(104),数据信号线(102),第一绝缘层,半导体膜(105),源电极,漏电极(106a,106b),扫描信号线 (101)和辅助电容线(103)。 栅电极形成在透光基板上。 数据信号线通过使用第一导电膜形成。 第一绝缘层形成在栅电极和数据信号线上。 半导体膜形成在第一绝缘层上。 源电极和漏电极形成在第一绝缘层和半导体膜上。