会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明公开
    • 압전 박막 공진자
    • 压电薄膜共振器
    • KR1020080064842A
    • 2008-07-09
    • KR1020087009701
    • 2006-02-09
    • 가부시키가이샤 무라타 세이사쿠쇼
    • 우메다케이이치카와무라히데키
    • H03H9/24
    • H03H9/02086H03H9/02157H03H9/173H03H9/175H03H9/584H03H9/587
    • A piezoelectric thin film resonator in which spurious of short wavelength can be suppressed. In a part of a thin film portion supported partially on a substrate (12) while isolated acoustically therefrom, a) an oscillatory portion (24) consisting of a pair of electrodes (14, 18) superposed in plan view while sandwiching a piezoelectric film (16), and b) an extra film (20) provided on the piezoelectric film (16) or the electrode (18) at least along a portion of the outer circumference of the oscillatory portion (24) are included. Assuming the acoustic impedance of the extra film (20) defined by the root of product of density and Young's modulus is x(MN sec/m3), product of the density and thickness of the extra film (20) is A, product of the density and thickness of the electrodes (14, 18) is B, and y=A/B, following relations are satisfied; (i) for 9.0
    • 可以抑制短波长寄生的压电薄膜谐振器。 在薄膜部分部分地部分地支撑在衬底(12)上,同时隔离其中的薄膜部分的一部分中,a)由平面图叠加的一对电极(14,18)组成的振荡部分(24),同时夹着压电薄膜 16),以及b)至少沿振荡部分(24)的外圆周的一部分设置在压电薄膜(16)或电极(18)上的额外的薄膜(20)。 假设由密度积和杨氏模量的根值定义的额外的膜(20)的声阻抗为x(MN sec / m3),额外膜(20)的密度和厚度乘积为A, 电极(14,18)的密度和厚度为B,y = A / B,满足关系; (i)对于9.0 <= x <44.0,0.0092.x + 0.88 <= y <0.067.x + 0.60(1a)和(ii)对于44.0 <= x <79.0,-0.0035.x + 1.45 <= y <0.015.x + 2.9(1b)。