专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

KR1020140099411A ＴＭ 센서를 구비한 측정 장치 无效
标题翻译：具有TM传感器的测量系统
公开(公告)号：KR1020140099411A
公开(公告)日：2014-08-12
申请号：KR1020130012076
申请日：2013-02-01
申请人： 주식회사 아츠
发明人： 조정호 , 장상래
IPC分类号： G01B21/08
CPC分类号： G01B21/08 , H01L22/12
摘要： A measuring device with a TM sensor capable of controlling the position thereof comprises: a housing which includes a sensor cover unit where a nozzle hole is formed; a TM sensor module which is installed inside the sensor cover unit by being fixated to a first shaft installed inside the housing in order to rotate, where multiple TM sensors are installed along the circumference of the center of rotation, and where one of the TM sensors is exposed through the nozzle hole according to the rotational angle of the first shaft; a chopper unit which is installed in the outer side of the housing in order to face the sensor cover unit by being fixated to a second shaft installed inside the first shaft in order to rotate, where multiple slits are formed along the circumference of the center of rotation in order to expose the TM sensor exposed through the nozzle hole; a first and a second motor which are installed inside the housing so that a motor shaft can be in parallel with the first and second shafts in order to rotate the first and second shafts respectively; and a first and a second rotational force transmitting unit which transmit the rotational force of the first and second motors to the first and second shafts. Therefore, the measuring device can alternately use multiple TM sensors, can contribute to the simplification and compactness of a multi-axis ferro-alloy structure capable of alternating TM sensors, can improve assembly properties by simply attaching or detaching the TM sensor module without bolt fastening, can facilitate security of space inside the housing by placing the motor in the side of the ferro-alloy, and can accurately sense the starting position of the TM sensor without disassembling the device by differentiating the size of pins for sensing the position of the TM sensor.
摘要翻译：具有能够控制其位置的TM传感器的测量装置包括：壳体，其包括形成有喷嘴孔的传感器盖单元; TM传感器模块，其通过固定在安装在壳体内部的第一轴以便旋转，安装在传感器盖单元内部，其中多个TM传感器沿着旋转中心的圆周安装，并且其中一个TM传感器根据第一轴的旋转角度，通过喷嘴孔露出; 斩波单元，其安装在壳体的外侧，以便通过固定在安装在第一轴内部的第二轴以便旋转的方式面对传感器盖单元，其中沿着中心的圆周形成多个狭缝旋转以暴露通过喷嘴孔暴露的TM传感器; 第一和第二电动机，其安装在壳体内部，使得电动机轴可以与第一和第二轴平行，以分别旋转第一和第二轴; 以及第一和第二旋转力传递单元，其将第一和第二电动机的旋转力传递到第一和第二轴。因此，测量装置可以交替使用多个TM传感器，有助于能够交替TM传感器的多轴铁合金结构的简化和紧凑性，可以通过简单地连接或拆卸TM传感器模块而无需螺栓固定来提高组装性能，可以通过将电机放置在铁合金的侧面来促进壳体内的空间安全，并且可以通过区分用于感测TM位置的销的尺寸来拆卸TM传感器而无需拆卸TM传感器的起始位置传感器。

2. 发明公开

KR1020130118589A 글래스기판 이송용 크로스 롤러 장치 无效
标题翻译：用于传输玻璃基板的交叉滚子装置
公开(公告)号：KR1020130118589A
公开(公告)日：2013-10-30
申请号：KR1020120041565
申请日：2012-04-20
申请人： 주식회사 아츠
发明人： 정진황 , 조재현
IPC分类号： B65G49/06 , H01L21/677 , G02F1/13
CPC分类号： B65G49/061 , B65G39/02 , B65G49/067 , G02F1/1303 , H01L21/67706
摘要： PURPOSE: A cross roller apparatus for transferring a glass substrate is provided to stably, smoothly, and perpendicularly transfer a tray on which a glass substrate is placed. CONSTITUTION: A cross roller apparatus for transferring a glass substrate includes a pair of first transferring units (100) and a pair of second transferring units (200). The first transferring units are installed side by side. The second transferring units are installed side by side, and are perpendicular to the first transferring units. The first transferring units and the second transferring units are arranged into a rectangular shape. The first transferring unit includes a first supporting member (110), a first roller (120), a first transfer driving part, and a first lift driving part. The second transferring unit includes a second supporting member (210), a second roller (220), a second transfer driving part, and a second lift driving part. The second lift driving part supports and lifts the second supporting member.
摘要翻译：目的：提供用于转移玻璃基板的交叉滚柱装置，以稳定，平稳且垂直地传送其上放置玻璃基板的托盘。构造：用于转移玻璃基板的交叉滚柱装置包括一对第一转印单元（100）和一对第二转印单元（200）。第一个转运单元并排安装。第二转印单元并排安装，并且垂直于第一转印单元。第一传送单元和第二传送单元被布置成矩形。第一转印单元包括第一支撑构件（110），第一辊（120），第一转印驱动部和第一升降驱动部。第二转印单元包括第二支撑构件（210），第二辊（220），第二转印驱动部和第二升降驱动部。第二提升驱动部支承并提升第二支承构件。

3. 发明授权

KR101256131B1 ＴＭ 센서를 구비한 측정 장치 失效
标题翻译：具有TM传感器的测量系统
公开(公告)号：KR101256131B1
公开(公告)日：2013-04-23
申请号：KR1020120006009
申请日：2012-01-19
申请人： 주식회사 아츠
发明人： 정진황 , 노태우 , 한만수 , 조재현 , 신윤철
IPC分类号： G01B5/06 , H01L51/56
CPC分类号： G01B5/06
摘要： PURPOSE: A measuring device with TM(Thickness Measurement) sensors is provided to prevent inconvenience caused by replacing the TM sensor by alternately utilizing a plurality of the TM sensors and to simplify a multi-shaft Ferro seal structure. CONSTITUTION: A measuring device with TM sensors comprises a housing unit, a TM sensor module(120), a chopper unit(130), a first motor(140), a second motor(160), a first measuring unit, and a second measuring unit. The TM sensor module is installed inside a sensor cover and fixed to a Ferro seal first shaft. A plurality of the TM sensors is installed along the periphery of the center of rotation. The TM sensors are selectively exposed to an exposure hole according to a rotating angle of the Ferro seal first shaft.
摘要翻译：目的：提供具有TM（厚度测量）传感器的测量装置，以防止通过交替使用多个TM传感器来更换TM传感器造成的不便，并简化多轴Ferro密封结构。构成：具有TM传感器的测量装置包括壳体单元，TM传感器模块（120），斩波单元（130），第一电动机（140），第二电动机（160），第一测量单元和第二测量单位 TM传感器模块安装在传感器盖内并固定在Ferro密封件第一轴上。多个TM传感器沿旋转中心的周边安装。 TM传感器根据Ferro密封件第一轴的旋转角度选择性地暴露于曝光孔。

4. 发明公开

KR1020140099412A 위치 제어가 가능한 ＴＭ 센서를 구비한 측정 장치 无效
标题翻译：具有控制位置的TM传感器的测量系统
公开(公告)号：KR1020140099412A
公开(公告)日：2014-08-12
申请号：KR1020130012078
申请日：2013-02-01
申请人： 주식회사 아츠
发明人： 박창봉 , 이청명
IPC分类号： G01B21/08
CPC分类号： G01B21/08 , H01L22/12
摘要： A measuring device with a TM sensor capable of controlling the position thereof comprises: a housing which includes a sensor cover unit where a nozzle hole is formed; a TM sensor module which is installed inside the sensor cover unit by being fixated to a first shaft installed inside the housing in order to rotate, where multiple TM sensors are installed along the circumference of the center of rotation, and where one of the TM sensors is exposed through the nozzle hole according to the rotational angle of the first shaft; a first motor which is installed inside the housing in order to rotate the first shaft; and a first sensing unit which is placed inside the housing in order to sense the position of the TM sensor. The first sensing unit comprises: a first sensor dog which is installed in order to rotate along with the first shaft, where multiple pins are aligned along the edge thereof, and where one of the pins has a different width from other pins in order to recognize one specific TM sensor among the multiple TM sensors; and a first sensor which senses the pin of the first sensor dog in order to output a sensing signal. Therefore, the measuring device can remove inconvenience due to the replacement of a TM sensor by alternately using multiple TM sensors, can accurately sense the starting position of the TM sensor without disassembling the device by differentiating the size of pins for sensing the position of the TM sensor, can contribute to the simplification and compactness of a multi-axis ferro-alloy structure capable of alternating TM sensors, and can improve assembly properties by simply attaching or detaching the TM sensor module without bolt fastening.
摘要翻译：具有能够控制其位置的TM传感器的测量装置包括：壳体，其包括形成有喷嘴孔的传感器盖单元; TM传感器模块，其通过固定在安装在壳体内部的第一轴以便旋转，安装在传感器盖单元内部，其中多个TM传感器沿着旋转中心的圆周安装，并且其中一个TM传感器根据第一轴的旋转角度，通过喷嘴孔露出; 第一电动机，其安装在壳体内以便旋转第一轴; 以及第一感测单元，其被放置在壳体内以便感测TM传感器的位置。第一感测单元包括：第一传感器狗，其安装成与第一轴一起旋转，其中多个销沿其边缘排列，并且其中一个销具有与其它销不同的宽度以便识别多个TM传感器中的一个特定的TM传感器; 以及第一传感器，其感测第一传感器狗的引脚以输出感测信号。因此，测量装置可以通过交替使用多个TM传感器来消除由于更换TM传感器造成的不便，可以通过区分用于感测TM位置的引脚尺寸来拆分TM传感器，而不会拆卸TM传感器的起始位置传感器可以有助于简化和紧凑的多轴铁合金结构，能够交替使用TM传感器，并且可以通过简单地连接或拆卸TM传感器模块而无需螺栓固定来提高组装性能。

5. 发明公开

KR1020130118585A 글래스기판 이송용 플로팅 롤러 장치 无效
标题翻译：用于传输玻璃基板的滚动滚筒装置
公开(公告)号：KR1020130118585A
公开(公告)日：2013-10-30
申请号：KR1020120041559
申请日：2012-04-20
申请人： 주식회사 아츠
发明人： 정진황 , 조재현
IPC分类号： B65G49/06 , H01L21/677 , G02F1/13
CPC分类号： B65G49/061 , B65G39/02 , B65G49/067 , G02F1/1303 , H01L21/67706
摘要： PURPOSE: A floating roller apparatus for transferring a glass substrate is provided to minimize the deformation of a transferring unit inside a chamber in order to transfer a glass substrate or a tray on which the glass substrate is placed even if the chamber is deformed by vacuum pressure inside the chamber. CONSTITUTION: A floating roller apparatus (10) for transferring a glass substrate includes a transferring unit (100), a guide part, and a spring (300). The transferring unit inside a chamber (20) transfers a glass substrate loaded inside the chamber or a tray on which the glass substrate is placed. The guide part guides the transferring unit so that the transferring unit moves in a width direction perpendicular to the transferring direction of the glass substrate. The spring provides the transferring unit with an elastic force so that the transferring unit guided by the guide part returns to an initial position. A pair of the transferring units at both sides inside the chamber is placed along the transferring direction of the glass substrate side by side. Multiple rollers (120) for transferring the tray on which the glass substrate is placed are longitudinally arranged at the supporting member (110) of the transferring unit. The guide part includes a fixing member and a first guide module (220).
摘要翻译：目的：提供一种用于转移玻璃基板的浮动辊装置，以使室内的转印单元的变形最小化，以便即使室由真空压力变形而转移玻璃基板或其上放置玻璃基板的托盘在房间里面构造：用于转移玻璃基板的浮动辊装置（10）包括转印单元（100），引导部分和弹簧（300）。室（20）内的传送单元传送装载在室内的玻璃基板或放置有玻璃基板的托盘。引导部引导传送单元，使得传送单元在与玻璃基板的传送方向垂直的宽度方向上移动。弹簧为传送单元提供弹性力，使得由引导部引导的传送单元返回到初始位置。沿着玻璃基板的输送方向并排放置在室内的两侧的一对转印单元。用于传送其上放置玻璃基板的托盘的多个辊（120）纵向布置在传送单元的支撑构件（110）处。引导部分包括固定部件和第一引导模块（220）。

6. 发明公开

KR1020130104139A 글래스기판 회전 장치 无效
标题翻译：旋转玻璃基板的装置
公开(公告)号：KR1020130104139A
公开(公告)日：2013-09-25
申请号：KR1020120025359
申请日：2012-03-13
申请人： 주식회사 아츠
发明人： 정진황 , 노태우 , 조재현 , 이승준 , 박상우 , 이청명 , 신윤철
IPC分类号： H01L51/56 , B65G49/00 , H01L21/677
CPC分类号： H01L21/67706 , B65G49/061 , B65G49/067 , H01L21/67718
摘要： PURPOSE: An apparatus for rotating a glass substrate is provided to stably load or unload the glass substrate by preventing interference on a fork of a transfer robot. CONSTITUTION: A flip body (120) rotates around a rotary shaft (113) which is horizontally located in a chamber (110). A gateway (111) is formed on one side of the chamber to horizontally input and output a glass substrate (10). A first holder (140) vertically faces a second holder (150) on the inner side of the flip body. A plurality of first lift driving units (160) and a plurality of second lift driving units (170) are formed on the upper surface and the lower surface of the flip body respectively. The first lift driving units and the second lift driving units are fixed on the upper surface and the lower surface of the flip body to be arranged in a vertical direction and a horizontal direction.
摘要翻译：目的：提供一种用于旋转玻璃基板的装置，通过防止对传送机器人的叉子的干扰来稳定地加载或卸载玻璃基板。构成：翻转体（120）围绕水平地位于室（110）中的旋转轴（113）旋转。网关（111）形成在室的一侧，以水平地输入和输出玻璃基板（10）。第一保持器（140）垂直面向翻盖体内侧上的第二保持器（150）。多个第一提升驱动单元（160）和多个第二提升驱动单元（170）分别形成在翻盖体的上表面和下表面上。第一升降驱动单元和第二提升驱动单元被固定在翻盖体的上表面和下表面上，以沿垂直方向和水平方向布置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式