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    • 1. 发明授权
    • 히팅 플레이트
    • 加热板
    • KR101147577B1
    • 2012-05-21
    • KR1020110049884
    • 2011-05-26
    • 충북보건과학대학교 산학협력단(주)에스티에스테크놀로지
    • 이덕기
    • H05K7/20H01L23/34G06F1/20
    • PURPOSE: A heating plate integrated with a heat radiation pin is provided to rapidly transfer and radiate heat through the heat radiation pin using a medium inside the plate. CONSTITUTION: A heating plate integrated with a heat radiation pin comprises the following: a main body(100) having a hollow structure for filling a heat-transfer medium; the heat radiation pin(200) formed on one side of the main body; and a partition wall(110) formed by increase the contact area of the heat-transfer medium, and separated from the inner wall surface of the main body. The main body includes a copper foil and an insulation film on one surface of combining a heating unit(300).
    • 目的:提供与散热针集成在一起的加热板,通过使用介质内部的介质快速传递辐射热量。 构成:与散热销一体化的加热板包括:主体(100),具有用于填充传热介质的中空结构; 所述散热销(200)形成在所述主体的一侧; 以及通过增加传热介质的接触面积并与主体的内壁表面分离而形成的分隔壁(110)。 主体在组合加热单元(300)的一个表面上包括铜箔和绝缘膜。
    • 2. 发明公开
    • LED조명램프
    • LED照明灯
    • KR1020110131908A
    • 2011-12-07
    • KR1020100051596
    • 2010-06-01
    • (주)에스티에스테크놀로지
    • 이덕기
    • F21V17/16F21V29/70F21V29/83
    • F21V17/164F21V29/83Y10S362/80
    • PURPOSE: An LED illumination lamp is provided to effectively emit internal heat outside by using a light diffusion pipe and the combining protrusion of a side cap. CONSTITUTION: In an LED illumination lamp, a light diffusion pipe(110) diffuses the light to outside. An LED(120) radiates the light to outside. A metal circuit board(130) forms a circuit for supplying power to the LED. The side cap(140) is combined with the both ends of the light diffusion pipe and supplies external power to inside. The light diffusion pipe forms a plurality of fine holes for emitting heat. The light diffusion pipe has a protrusion groove(111) which is combined with the side cap. The side cap has the protrusion groove corresponding to the protrusion groove. The side cap is that the jamming protrusion(141) is formed in the location corresponding to the barrier groove.
    • 目的:提供LED照明灯,通过使用光扩散管和侧盖的组合突起,有效地将内部热量散发出来。 构成:在LED照明灯中,光扩散管(110)将光扩散到外部。 LED(120)将光照射到外部。 金属电路板(130)形成用于向LED供电的电路。 侧盖(140)与光扩散管的两端结合,向内部供给外部电力。 光扩散管形成多个用于发热的细孔。 光扩散管具有与侧盖结合的突出槽(111)。 侧盖具有与突出槽对应的突出槽。 侧盖是在对应于阻挡槽的位置形成有卡住突起(141)。
    • 5. 发明公开
    • 기판의 열처리 장치
    • 用于加热处理基材的装置
    • KR1020120070202A
    • 2012-06-29
    • KR1020100131654
    • 2010-12-21
    • (주)에스티에스테크놀로지
    • 이덕기
    • H01L21/324
    • H01L21/67098H01L21/324
    • PURPOSE: An apparatus for heat-treating a substrate is provided to reduce a defective substrate by rapidly and uniformly heating a chamber in which a substrate is received. CONSTITUTION: A main body(400) of a heating furnace blocks inner heat not to be discharged to the outside while receiving a substrate placing part, a chamber, and a heating part. A substrate support on which a plurality of accommodating grooves is prepared is installed on the substrate placing part in a vertical direction. A supporting part is formed at a lower portion of the substrate support and fixes the substrate support. The substrate support selectively has different sizes and is attached and detached to/from the top of the support part. A reflecting body(430) is coated on an inner wall of the main body of the heating furnace.
    • 目的:提供一种用于热处理基板的设备,通过快速且均匀地加热其中接收基板的室来减少有缺陷的基板。 构成:加热炉的主体(400)在接收基板放置部分,室和加热部分的同时阻止不被排出到外部的内部热量。 其上准备有多个容纳槽的基板支撑件沿垂直方向安装在基板放置部件上。 支撑部分形成在基板支撑件的下部并且固定基板支撑件。 衬底支撑件选择性地具有不同的尺寸,并且与支撑部件的顶部相连接和分离。 反射体(430)涂覆在加热炉主体的内壁上。
    • 6. 发明公开
    • 기판의 열처리 장치
    • 用于加热处理基材的装置
    • KR1020120070200A
    • 2012-06-29
    • KR1020100131650
    • 2010-12-21
    • (주)에스티에스테크놀로지
    • 이덕기
    • H01L21/324
    • H01L21/67098H01L21/324
    • PURPOSE: An apparatus for heat-treating a substrate is provided to improve a quality by rapidly and uniformly heating a chamber in which the substrate is accepted. CONSTITUTION: A main body(400) of a heating furnace blocks inner heat not to be discharged to the outside while receiving a substrate placing part, a chamber, and a heating part. A heating part(300) is divided into a side irradiation type heating lamp and an upper irradiation type heating lamp. The side irradiation type heating lamp surrounds the circumference of the chamber. The upper irradiation type heating lamp is located on the upper portion of the chamber. The side irradiation type heating lamp and the upper irradiation type heating lamp simultaneously run and rapidly increase temperature of the entire portion of the chamber.
    • 目的:提供一种用于对基底进行热处理的装置,通过快速且均匀地加热其中接受基底的腔室来提高质量。 构成:加热炉的主体(400)在接收基板放置部分,室和加热部分的同时阻止不被排出到外部的内部热量。 加热部(300)分为侧照射型加热灯和上照射型加热灯。 侧面照射型加热灯围绕室的周边。 上部照射型加热灯位于室的上部。 侧面照射式加热灯和上部照射型加热灯同时运行并迅速地增加室的整个部分的温度。
    • 9. 发明公开
    • 급속 열 배기 성능을 향상시킨 기판의 열처리 장치
    • 用于加热处理基材的装置
    • KR1020120070198A
    • 2012-06-29
    • KR1020100131648
    • 2010-12-21
    • (주)에스티에스테크놀로지
    • 이덕기
    • H01L21/02H01L21/205H01L21/027
    • H01L21/2053G03F7/202H01L21/02002H01L21/02019H01L21/0274H01L21/2056
    • PURPOSE: An apparatus for heat-treating a substrate is provided to prevent the increase of inner pressure in a chamber and a main body of a heating furnace by providing gas through a diffuser consisting of a porous material. CONSTITUTION: A main body(400) of a heating furnace blocks heat not to be emitted to the outside while forming a space inside thereof and receiving a substrate placing part, a chamber, and a heating part. A first gas supply pipeline(220) is connected to the inner space of the chamber. A first exhaust pipe(230) is formed on either the chamber or a flange and discharging inner heat. A second gas supply pipeline is connected to the inner space of the main body of the heating furnace. A second exhaust pipe(420) discharges inner heat while being formed on either a side or an upper side of the main body.
    • 目的:提供一种用于对基底进行热处理的装置,以通过由通过多孔材料构成的扩散器提供气体来防止加热炉的腔室和主体内部压力的增加。 构成:加热炉的主体(400)在形成其内部的空间并接收基板放置部分,室和加热部分的同时阻止不发射到外部的热量。 第一气体供应管道(220)连接到腔室的内部空间。 第一排气管(230)形成在室或凸缘上并排出内部热量。 第二供气管道连接到加热炉主体的内部空间。 第二排气管(420)在形成在主体的一侧或上侧的同时排出内部热量。