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    • 63. 发明公开
    • 반도체 공정에서 알콕시실란 가수분해 반응을 위한 촉매 및 그러한 촉매를 포함한 포뮬레이션
    • 在半导体工艺中含有烷氧基硅烷水解反应的催化剂和配方
    • KR1020130084641A
    • 2013-07-25
    • KR1020130005510
    • 2013-01-17
    • 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드
    • 시아오,만차오피얼스테인,로날드마틴호,리차드레이,신지안마요르가,스티븐제라드스펜스,다니엘피.
    • B01J31/16C07F7/18
    • C09D1/00B65B1/04C08G77/04H01L21/02126H01L21/02216H01L21/02282
    • PURPOSE: A catalyst for hydrolyzing alkoxysilane in a semiconductor manufacturing process and a formulation containing the catalyst are provided to improve chemical stability of a formulation for a semiconductor manufacturing process by matching an alkoxy or aryloxy group in a silicon-containing precursor with an alkoxy or aryloxy group in a catalyst compound. CONSTITUTION: A formulation contains a silicon-containing precursor and a catalyst compound. The silicon-containing precursor is selected from alkoxy silane, aryloxy silane, or alkyl alkoxy silane. The catalyst compound contains haloalkoxyalkyl silane or haloaryloxyalkyl silane. Substituents are identical in the silicon-containing precursor and the catalyst compound. A formulation A contains a silicon-containing precursor, Si (OR1)nR24-n, containing alkoxyalkyl silane or aryloxy silane and a catalyst, XSi (OR1)nR23-n, containing haloalkoxyalkyl silane. A formulation B contains a silicon-containing precursor, R23-p (R1O)pSi-R3-Si (OR1)pR23-p, containing alkoxyalkyl silane or aryloxy silane and a catalyst, (R1O)mR22-m (X)Si-R3-Si (OR4)2R5, containing haloalkoxyalkyl silane or haloaryloxyalkyl silane.
    • 目的:提供半导体制造方法中的水解烷氧基硅烷的催化剂和含有该催化剂的制剂,以通过使含硅前体中的烷氧基或芳氧基与烷氧基或芳氧基相匹配来改善半导体制造方法的制剂的化学稳定性 在催化剂化合物中。 构成:制剂含有含硅前体和催化剂化合物。 含硅前体选自烷氧基硅烷,芳氧基硅烷或烷基烷氧基硅烷。 催化剂化合物含有卤代烷氧基烷基硅烷或卤代烷氧基烷基硅烷。 取代基在含硅前体和催化剂化合物中是相同的。 制剂A含有含硅前体Si(OR1)nR24-n,含有烷氧基烷基硅烷或芳氧基硅烷和含有卤代烷氧基烷基硅烷的催化剂XSi(OR1)nR23-n。 制剂B含有含硅前体R23-p(R1O)pSi-R3-Si(OR1)pR23-p,含有烷氧基烷基硅烷或芳氧基硅烷和催化剂(R1O)mR22-m(X)Si-R3 -Si(OR4)2R5,含有卤代烷氧基烷基硅烷或卤代烷氧基烷基硅烷。