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    • 67. 发明授权
    • 광학 반사 소자
    • 광학반사소자
    • KR101187467B1
    • 2012-10-02
    • KR1020117011342
    • 2009-11-18
    • 파나소닉 주식회사
    • 히라오카소이치로데라다지로우나카조노신스케후루카와시게오
    • G02B26/08G02B5/08
    • G02B26/0858G02B26/101
    • An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
    • 光学反射元件包括镜面部分和耦合到镜面部分的振荡器。 该振荡器包括基座,绝缘层,驱动元件和监视元件。 绝缘层形成在基座上。 驱动元件和监视元件形成在绝缘层上,并且通过分离槽彼此分开。 驱动元件和监视器元件中的每一个都包括在绝缘层上依次形成的下电极层,压电层和上电极层。 监视元件具有高检测精度,允许光学反射元件以高精度执行自激驱动。