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    • 62. 发明公开
    • 연결 배관 및 이를 포함하는 배기 장치
    • 连接导管和排气装置
    • KR1020070001504A
    • 2007-01-04
    • KR1020050057038
    • 2005-06-29
    • 삼성전자주식회사
    • 최재혁
    • H01L21/02H01L21/027
    • G03F7/70916G03F7/70841
    • A linking pipe and an exhaust apparatus having the same are provided to prevent residuals on the linking pipe by forming the linking pipe of which front and end sections have different widths. A vacuum pump(232) exhausts an exhausting gas including a pollutant from a process chamber where a predetermined process is performed. Plural branched pipes(242) are extended from the process chamber to provide a flow route of the exhausting gas. A linking pipe(250) is connected to the branched pipes and has a first portion(246) and a second portion(248). The first portion has a first width. The second portion is extended from the first portion and has a second width that is small than the first width. A main pipe(244) connects the second portion to the vacuum pump.
    • 通过形成具有不同宽度的前端部和端部部的连接管,设置连接管和具有该连接管的排气装置,以防止连接管上的残留物。 真空泵(232)从执行预定处理的处理室排出包括污染物的排出气体。 多个分支管(242)从处理室延伸以提供排气的流动路径。 连接管(250)连接到分支管,并具有第一部分(246)和第二部分(248)。 第一部分具有第一宽度。 第二部分从第一部分延伸并且具有小于第一宽度的第二宽度。 主管(244)将第二部分连接到真空泵。